Lam Research 853-031764-001-A-1997 Lower Electrode | Replacement, Equivalent & Selection Guide
The Lam Research 853-031764-001-A-1997 (also referenced as A0384140 / A0378622 / 0020-31035 / 0040-09263) is a Lower Electrode assembly used in Lam Research plasma etch and CVD systems. This page provides full technical specifications, compatible replacement options, and a structured selection guide to help engineers and procurement teams make the right sourcing decision.
Technical Specifications
- Manufacturer: Lam Research Corporation
- Part Number: 853-031764-001-A-1997
- Cross-Reference / Alternate P/N: A0384140 | A0378622 | 0020-31035 | 0040-09263
- Description: Lower Electrode Assembly
- Component Type: RF Electrode / Chuck Electrode
- Weight: Approx. 2,600 g
- Condition Available: New OEM, Refurbished, Used-Tested
- Lead Time: Contact us for current stock status
Compatible Replacement & Equivalent Models
The following part numbers are confirmed cross-references or functional equivalents for the 853-031764-001-A-1997 Lower Electrode. Always verify fit against your specific chamber configuration before installation.
- A0384140 — Lam Research internal assembly reference
- A0378622 — Alternate revision / sub-assembly number
- 0020-31035 — Lam Research consumable/spare part number
- 0040-09263 — Lam Research kit/assembly part number
- Third-party OEM-equivalent electrodes (contact us for compatibility matrix)
Note: Cross-reference compatibility depends on chamber model, process recipe, and revision level. Konmask.com engineers can assist with verification.
Why Choose the Original Model
- Process Consistency: OEM electrodes maintain plasma uniformity and etch rate stability validated by Lam Research process engineers.
- Material Certification: Manufactured to Lam Research material and surface finish specifications (anodization, surface roughness, flatness tolerance).
- Warranty & Traceability: Genuine parts carry full OEM traceability and are eligible for Lam Research service support.
- Reduced Qualification Risk: Avoids re-qualification cycles required when switching to third-party alternatives in regulated fabs.
Typical Applications
- Lam Research Versys, Exelan, 2300, and Rainbow series plasma etch chambers
- Dielectric etch (oxide, nitride) and conductor etch (poly, metal) processes
- CVD / PECVD chamber configurations using lower electrode RF coupling
- 300 mm and 200 mm wafer processing platforms
- Semiconductor front-end-of-line (FEOL) and back-end-of-line (BEOL) manufacturing
System Compatibility
| Platform | Chamber Type | Compatibility |
|---|---|---|
| Lam Research Versys | Dielectric Etch | Verify by revision |
| Lam Research Exelan | Conductor Etch | Verify by revision |
| Lam Research 2300 | Etch / CVD | Verify by revision |
| Lam Research Rainbow | Plasma Etch | Verify by revision |
Contact Konmask.com with your tool serial number and chamber ID for a definitive compatibility confirmation.
Selection Guide
Use the following criteria to select the correct electrode for your application:
- Step 1 — Identify your tool: Confirm Lam Research platform model and chamber serial number.
- Step 2 — Check revision level: The suffix -A-1997 indicates a specific revision. Confirm your BOM requires this exact revision or accepts later revisions.
- Step 3 — Verify cross-references: Match against A0384140 / A0378622 / 0020-31035 / 0040-09263 in your internal spare parts database.
- Step 4 — Choose condition: New OEM for critical process chambers; refurbished for non-critical or backup tools.
- Step 5 — Contact Konmask: Share your tool config and we will confirm stock, lead time, and pricing.
Quality Assurance & Sourcing
- All parts sourced through verified OEM channels and authorized distributors.
- Refurbished units undergo dimensional inspection, surface analysis, and functional testing prior to shipment.
- Full documentation available: CoC (Certificate of Conformance), inspection reports, and photos on request.
- Secure packaging with ESD protection and anti-static foam for safe international shipping.
- Export compliance: ECCN classification and export licensing support available.
How to Order
- Online: Add to cart directly on this page (subject to stock availability).
- Email RFQ: [email protected] — include part number, quantity, required condition, and delivery location.
- Phone / WhatsApp: +0086 19859288691
- Response Time: Quotations typically within 24 business hours.
- Payment: T/T (Wire Transfer), PayPal, and other methods available upon request.
Replacement & Compatibility FAQ
Q: Is A0384140 the same as 853-031764-001-A-1997?
A: A0384140 is a Lam Research internal assembly reference that corresponds to the 853-031764-001 part number family. Confirm the exact revision suffix matches your BOM.
Q: Can I use 0020-31035 as a direct drop-in replacement?
A: 0020-31035 is a Lam Research spare/consumable number cross-referencing this electrode. Functional compatibility is high, but always verify against your chamber’s current configuration.
Q: Do you offer refurbished Lower Electrodes?
A: Yes. Refurbished units are available with full inspection documentation. Contact us for pricing and lead time.
Q: What is the typical lead time for new OEM stock?
A: Lead time varies by current inventory. Contact Konmask.com for real-time availability.
Q: Can Konmask.com help with export documentation?
A: Yes. We provide commercial invoices, packing lists, CoC, and can assist with ECCN/export licensing for international shipments.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
