LAM RESEARCH 715-032760-106 Inner Gate Valve Drive Assembly | Replacement, Equivalent & Selection Guide
The LAM RESEARCH 715-032760-106 is an Inner Gate Valve Drive Assembly designed for LAM Research etcher systems. Cross-referenced as 712-214892-000 and associated with part number 36831 and system reference 15965001, this assembly controls the pneumatic or motorized actuation of the inner gate valve in semiconductor etch chambers. Sourced and verified by Konmask.com for B2B industrial buyers requiring reliable, spec-accurate components.
Technical Specifications
- Part Number: 715-032760-106
- Cross Reference: 712-214892-000 / 36831 / 15965001
- Description: Etcher Inner Gate Valve Drive Assembly
- Outer Diameter (OD): 22 cm
- Inner Diameter (ID): 20 cm
- Weight: 2,600 g (approx.)
- Manufacturer: LAM RESEARCH Corporation
- Application: Semiconductor Etch Chamber (Etcher)
- Condition Available: New / Refurbished / Used-Tested
Compatible Replacement & Equivalent Models
The following part numbers are confirmed compatible or functionally equivalent to the 715-032760-106:
- 712-214892-000 — LAM Research alternate PN (same assembly, different revision label)
- 36831 — LAM internal reference number
- 15965001 — System-level reference for etcher configurations
Always verify dimensional fit (OD 22 cm / ID 20 cm) and system compatibility before substitution. Contact [email protected] for cross-reference confirmation.
Why Choose the Original Model
- Factory-engineered tolerances ensure precise gate valve actuation and chamber seal integrity
- OEM-matched dimensions (OD 22 cm, ID 20 cm) eliminate fitment risk
- Designed for LAM Research etcher environments with validated thermal and chemical resistance
- Reduces unplanned downtime versus non-OEM alternatives
- Full traceability and documentation available upon request
Typical Applications
- LAM Research Versys, Kiyo, and Flex series etch systems
- Semiconductor wafer fabrication — etch chamber maintenance and rebuild
- Vacuum isolation and process gas flow control in plasma etch tools
- Scheduled preventive maintenance (PM) kits for etcher inner gate valve replacement
System Compatibility
- Compatible with LAM Research etcher platforms utilizing inner gate valve drive mechanisms with OD 22 cm / ID 20 cm form factor
- Verify against your tool’s BOM (Bill of Materials) or contact your LAM service engineer for confirmation
- Konmask technical team can assist with system-level cross-referencing — email [email protected]
Selection Guide
Use the table below to determine the correct part for your application:
| Requirement | Recommended Part |
|---|---|
| OEM original, full traceability | 715-032760-106 (this listing) |
| Alternate OEM revision | 712-214892-000 |
| Budget refurbished option | Contact Konmask for refurb stock |
| Emergency same-day dispatch | Contact Konmask — check live stock |
Not sure which part fits your system? Send your tool model and BOM reference to [email protected] and our engineers will confirm compatibility within 24 hours.
Quality Assurance & Sourcing
- All units inspected and tested prior to shipment
- Sourced from authorized distributors, OEM surplus, or certified refurbishers
- Condition clearly stated at time of order confirmation (New / Refurbished / Used-Tested)
- Packaging: anti-static, moisture-protected, with part label and inspection record
- Certificate of Conformance (CoC) available on request
How to Order
- Add to cart directly, or
- Email [email protected] with your PO or RFQ
- Include: Part Number, Quantity, Required Condition, Delivery Timeline
- Phone / WhatsApp: +0086 19859288691
- We respond within 1 business day; urgent orders prioritized
Replacement & Compatibility FAQ
Q: Is 712-214892-000 a direct replacement for 715-032760-106?
A: Yes, these are cross-referenced LAM Research part numbers for the same inner gate valve drive assembly. Verify revision compatibility with your system BOM.
Q: What is the lead time for this part?
A: In-stock units ship within 1–3 business days. Out-of-stock lead time is 2–6 weeks depending on sourcing. Contact us for real-time availability.
Q: Can I get a refurbished unit?
A: Yes. Konmask offers refurbished units that are fully tested and documented. Inquire at [email protected].
Q: Do you provide a warranty?
A: All units carry a 90-day functional warranty. Extended warranty available on request.
Q: Can Konmask source other LAM Research parts?
A: Yes. We specialize in hard-to-find semiconductor equipment components. Submit your parts list and we will respond with availability and pricing.
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Contact: [email protected] | +0086 19859288691
