LAM RESEARCH 716-028028-004 Upper Electrode Clamp Ring Ceramic – C3520 27CM Series
When the upper electrode clamp ring fails or degrades in a plasma etch chamber, the consequences are immediate and costly: process uniformity collapses, wafer yield drops, and the entire production line faces unplanned downtime. In high-volume semiconductor fabs running 24/7, every hour of lost uptime translates directly into millions of dollars in lost output. The LAM RESEARCH C3520 Upper Electrode Clamp Ring Ceramic (P/N 716-028028-004) is not a commodity consumable — it is a precision-engineered critical component that maintains the mechanical and dielectric integrity of the upper electrode assembly, ensuring plasma confinement geometry remains within specification across thousands of RF cycles.
Within the LAM RESEARCH C3520 27CM etch platform, this ceramic clamp ring occupies a uniquely demanding position. It must simultaneously withstand aggressive fluorine-based plasma chemistries, high RF power densities, and rapid thermal cycling — all while maintaining dimensional tolerances measured in microns. Cross-referenced under part numbers VCC-15-B-R1, 311750-001, and 850B-23172, this component is qualified for use in LAM Research Versys, Exelan, and 2300 series etch systems deployed in leading-edge logic and memory fabs worldwide. Its global installed base and multi-PN traceability make it one of the most sought-after ceramic consumables in the secondary semiconductor equipment market.
Technical Specifications
- OEM Brand: LAM RESEARCH
- Primary Part Number: 716-028028-004
- Cross-Reference PNs: VCC-15-B-R1 / 311750-001 / 850B-23172
- Platform Series: C3520 (27CM / 300mm-class electrode)
- Component Description: Upper Electrode Clamp Ring — Ceramic
- Material: High-purity alumina ceramic (Al₂O₃)
- Electrode Diameter Compatibility: 27CM (270mm)
- Weight: 2,600 g
- Application Environment: Plasma etch chamber (fluorine/chlorine chemistry compatible)
- Condition Available: New OEM, Refurbished OEM, Used Tested
Key Features & Benefits
- Plasma Chemistry Resistance: High-purity alumina construction provides superior resistance to F- and Cl-based etch chemistries, extending service life versus lower-grade ceramics.
- Dimensional Precision: OEM-tolerance geometry ensures correct electrode gap and plasma sheath uniformity — critical for CD (critical dimension) control at advanced nodes.
- Multi-PN Traceability: Verified cross-reference across four part numbers (716-028028-004, VCC-15-B-R1, 311750-001, 850B-23172) reduces procurement risk and simplifies BOM reconciliation.
- RF Dielectric Stability: Consistent dielectric properties across the operating frequency range maintain stable RF coupling and prevent arcing events.
- Drop-In Replacement: Fully interchangeable with OEM-installed units — no chamber modification required.
- Reduced Downtime: Ready-to-ship inventory enables rapid chamber recovery, minimizing mean time to repair (MTTR).
Industry & Equipment Applications
- Semiconductor Fabrication: 300mm wafer etch processes — logic (FinFET, GAA), DRAM, NAND Flash
- Compatible Systems: LAM Research Versys Metal, Versys Oxide, Exelan HP, Exelan Flex, 2300 Exelan series
- Process Types: Dielectric etch, conductor etch, hard mask open
- Fab Environments: High-volume manufacturing (HVM) fabs, R&D pilot lines, equipment refurbishment centers
- End Markets: TSMC, Samsung, SK Hynix, Micron, Intel supply chain and their equipment service providers
System Integration & Compatible Parts
The 716-028028-004 clamp ring interfaces directly with the following upper electrode assembly components. Sourcing these together ensures complete chamber rebuild efficiency:
- Upper Electrode (Si or SiC) — 27CM diameter
- Electrode Backing Plate
- Focus Ring / Edge Ring (C3520 series)
- Chamber Liner (C3520 compatible)
- Confinement Ring Set
- O-Ring Kit (upper electrode interface)
Contact our technical team to source a complete upper electrode assembly kit for your C3520 chamber rebuild.
Our Quality Assurance Process
- Visual & Dimensional Inspection: Every unit is inspected for cracks, chips, surface contamination, and OEM dimensional compliance before shipment.
- Part Number Verification: Physical PN markings cross-checked against procurement documentation and OEM databases.
- Condition Grading: Parts are graded as New OEM, Refurbished (cleaned + inspected), or Used Tested — clearly disclosed at time of quotation.
- Packaging: Cleanroom-compatible packaging with ESD protection and moisture barrier for safe international transit.
- Documentation: Certificate of conformance, inspection report, and traceability records available upon request.
How to Order
- Submit your RFQ via the Contact / Inquiry form on this page, or email [email protected].
- Provide your required quantity, preferred condition (New / Refurbished / Used), and target delivery date.
- Our team will respond with availability, lead time, and a formal quotation within 24 business hours.
- Upon PO confirmation, we arrange secure packaging and international freight (DHL / FedEx / UPS / sea freight).
Why Choose Konmask.com?
- Specialized Inventory: We focus exclusively on industrial automation and semiconductor equipment parts — not a generalist distributor.
- Global Sourcing Network: Direct relationships with OEM-authorized refurbishers and fab decommission channels ensure authentic parts.
- Technical Expertise: Our team includes engineers with hands-on experience in LAM Research etch platform maintenance and chamber qualification.
- Fast Response: RFQ responses within 24 hours; emergency same-day quotation available for critical downtime situations.
- Transparent Grading: No hidden condition misrepresentation — every part is graded and documented before quotation.
- Worldwide Shipping: Export-compliant shipping to 50+ countries with full customs documentation support.
Frequently Asked Questions
Q: Is 716-028028-004 the same as VCC-15-B-R1 and 311750-001?
A: Yes. These are cross-reference part numbers for the same LAM RESEARCH C3520 Upper Electrode Clamp Ring Ceramic. The part number 850B-23172 is also a known alternate reference. All refer to the same OEM component for the 27CM electrode assembly.
Q: What condition is this part available in?
A: We source this part in New OEM, Refurbished (cleaned, inspected, dimensionally verified), and Used Tested conditions. Condition and pricing are disclosed in the formal quotation.
Q: Can this clamp ring be used on both Versys and Exelan platforms?
A: The C3520 27CM clamp ring is compatible with multiple LAM Research etch platforms that use the 27CM upper electrode configuration. Please confirm your specific chamber model when submitting your RFQ so we can verify fitment.
Q: What is the typical lead time?
A: Lead time depends on condition and current stock. In-stock refurbished units typically ship within 3–5 business days. New OEM units may require 2–6 weeks depending on sourcing. We will confirm lead time in your quotation.
Q: Do you provide a warranty?
A: Yes. Refurbished and New OEM parts carry a 90-day warranty against defects in material and workmanship under normal operating conditions. Terms are specified in the sales agreement.
Q: Can you supply the complete upper electrode assembly?
A: Yes. We can source complete upper electrode assembly kits for C3520 chambers, including the electrode, backing plate, clamp ring, and associated hardware. Contact us with your full BOM for a consolidated quotation.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
