LAM RESEARCH 853-054147-001 Liquid Pump | Semiconductor Etch System Fluid Handling Component
When a liquid pump fails mid-process in a semiconductor etch chamber, the consequences are immediate and costly: chemical delivery halts, wafer batches are scrapped, and unplanned downtime can cascade into days of lost production. In high-throughput fabs running 24/7, every minute of pump downtime translates directly to yield loss and schedule disruption. The LAM RESEARCH 853-054147-001 liquid pump is the precision fluid-handling component engineered to prevent exactly this scenario — delivering consistent, contamination-free chemical flow to the etch process with the reliability that advanced node manufacturing demands.
The 853-054147-001 is a factory-specified liquid pump designed for LAM RESEARCH etch systems, cross-referenced under part numbers 853-54127-001, 3151701-010, and 17-291211-00. As a critical fluid-handling component within Lam’s process module architecture, this pump maintains precise chemical delivery rates essential for etch uniformity and repeatability. LAM RESEARCH remains one of the world’s leading suppliers of etch and deposition equipment, and genuine replacement parts like this pump are in continuous global demand across fabs in Asia, North America, and Europe.
Technical Specifications
- Manufacturer: LAM RESEARCH Corporation
- Primary Part Number: 853-054147-001
- Cross-Reference Part Numbers: 853-54127-001 | 3151701-010 | 17-291211-00
- Component Type: Liquid Pump / Chemical Delivery Pump
- Compatible System: LAM RESEARCH Etch Process Modules
- Weight: Approx. 1,450 g
- Condition Available: New (OEM), Refurbished, Tested Used
- Origin: OEM LAM RESEARCH supply chain
Note: Detailed electrical and flow specifications are available upon request. Contact our technical team with your system model for full compatibility confirmation.
Key Features & Benefits
- OEM-Grade Precision: Manufactured to LAM RESEARCH’s exact tolerances, ensuring drop-in compatibility with no process re-qualification required.
- Multi-Part Cross-Reference: Covers four part numbers (853-054147-001, 853-54127-001, 3151701-010, 17-291211-00), simplifying procurement across different BOM revisions.
- Chemical Compatibility: Designed for the corrosive chemical environments typical of semiconductor wet etch and CMP processes.
- Process Stability: Consistent flow rate delivery supports etch uniformity and wafer-to-wafer repeatability.
- Fast Replacement: Direct OEM form-factor replacement minimizes maintenance window duration.
- Globally Sourced Stock: Konmask.com maintains sourcing channels across Asia and North America for rapid fulfillment.
Industry & Equipment Applications
- Semiconductor wafer fabrication (front-end-of-line etch processes)
- LAM RESEARCH Versys, Exelan, 2300, and related etch platform families
- Chemical mechanical planarization (CMP) fluid delivery subsystems
- Advanced node logic and memory device manufacturing (DRAM, NAND, Logic)
- Flat panel display (FPD) and compound semiconductor fabs
- R&D and pilot line facilities using Lam etch equipment
System Integration & Compatible Parts
The 853-054147-001 liquid pump integrates within the chemical delivery module of LAM RESEARCH etch systems. When servicing or replacing this pump, the following associated components are commonly inspected or replaced simultaneously:
- Chemical delivery tubing and fittings (process-side)
- Pump drive motor and controller board
- Flow sensors and pressure transducers in the delivery line
- Filter assemblies upstream of the pump inlet
- Related cross-reference parts: 853-54127-001, 3151701-010, 17-291211-00
Contact Konmask.com with your full system configuration for a complete compatible parts list.
Our Quality Assurance Process
Every LAM RESEARCH component sourced through Konmask.com undergoes a structured verification process before shipment:
- Part Number Verification: Physical label and internal markings confirmed against OEM documentation.
- Visual Inspection: Checked for mechanical damage, corrosion, seal integrity, and port condition.
- Functional Testing (where applicable): Refurbished units are bench-tested for flow and pressure performance.
- Traceability Documentation: Certificate of conformance and inspection report available on request.
- Secure Packaging: Anti-static and moisture-barrier packaging for international transit.
How to Order
- Submit an Inquiry: Email support@konmask.com or call +0086 19859288691 with your part number and required quantity.
- Receive a Quote: Our team will confirm availability, condition, lead time, and pricing within 24 hours.
- Confirm & Pay: Secure payment via T/T bank transfer, PayPal, or other agreed methods.
- Shipment & Tracking: Parts shipped via DHL, FedEx, or UPS with full tracking provided.
- After-Sales Support: Technical support available post-delivery for installation guidance.
Why Choose Konmask.com?
- Specialized in Semiconductor & Industrial Automation Parts: Deep inventory and sourcing network for hard-to-find OEM components.
- B2B Export Experience: Serving procurement teams, fab engineers, and MRO buyers across 30+ countries.
- Fast Response: Inquiries answered within 24 business hours with stock confirmation.
- Flexible MOQ: Single-unit orders accepted — no minimum order quantity for most parts.
- Competitive Pricing: Direct sourcing relationships enable cost-effective pricing vs. OEM list price.
- Trusted Track Record: Verified supplier with documented quality processes and export compliance.
Frequently Asked Questions
- Q: Are part numbers 853-054147-001 and 853-54127-001 the same part?
- A: Yes. These are cross-reference part numbers for the same LAM RESEARCH liquid pump, used across different BOM revisions and system generations. Part numbers 3151701-010 and 17-291211-00 are additional cross-references for the same component.
- Q: Is this a new or refurbished part?
- A: Konmask.com can supply this part in new (OEM), certified refurbished, or tested-used condition depending on availability. Please specify your preference when submitting an inquiry.
- Q: Which LAM RESEARCH systems is this pump compatible with?
- A: This pump is designed for LAM RESEARCH etch process modules. Please provide your system model number when contacting us so we can confirm exact compatibility.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. In-stock items typically ship within 3–5 business days. For sourced items, lead time is 2–4 weeks. Contact us for current availability.
- Q: Do you provide export documentation?
- A: Yes. We provide commercial invoice, packing list, certificate of conformance, and can assist with export classification documentation for international shipments.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
