Millipore FC-260 RSD126213 641182W 0100-11000 Mass Flow Controller | Replacement, Equivalent & Selection Guide
The Millipore FC-260 (part numbers: RSD126213, 641182W, 0100-11000) is a precision thermal mass flow controller widely deployed in semiconductor fabrication, chemical vapor deposition (CVD), and process gas management systems. Konmask.com supplies genuine, tested, and refurbished units with full traceability.
Technical Specifications
- Manufacturer: Millipore (now part of MilliporeSigma / Merck)
- Model: FC-260
- Part Numbers: RSD126213 | 641182W | 0100-11000
- Type: Thermal Mass Flow Controller (MFC)
- Control Signal: 0–5 V DC (analog) / RS-232 (digital, model-dependent)
- Accuracy: ±1% of full scale (typical)
- Repeatability: ±0.2% of full scale
- Response Time: <2 seconds to 98% of set point
- Valve Type: Normally closed solenoid
- Wetted Materials: 316L SS, Viton / EPDM seals
- Operating Pressure: Up to 150 psig inlet
- Power Supply: ±15 V DC, 24 V DC
- Connector: 15-pin D-sub (standard MFC interface)
- Weight: ~1,450 g
- Certifications: CE, RoHS-compliant
Compatible Replacement & Equivalent Models
The following models are functionally equivalent or drop-in replacements for the Millipore FC-260 in most process tool configurations:
- Millipore FC-260B — updated firmware variant, same mechanical footprint
- Brooks Instrument SLA5850 — industry-standard analog/digital MFC, same D-sub connector
- MKS Instruments 1179A — direct analog replacement, widely stocked
- Alicat MC Series — multi-gas capable, plug-and-play analog replacement
- Horiba SEC-Z500X — compatible for CVD/ALD tool retrofits
- Fujikin FCST Series — compatible for high-purity gas applications
Always verify gas type, full-scale range, and fitting size before substitution. Contact Konmask for a free compatibility check.
Why Choose the Original Millipore FC-260
- Proven reliability in 24/7 semiconductor fab environments
- Exact OEM calibration for your specific gas and range
- Minimizes process qualification re-work vs. third-party substitutes
- Full traceability: serial number, calibration certificate, test report
- Genuine spare parts availability through Konmask.com
Typical Applications
- Chemical Vapor Deposition (CVD / PECVD / LPCVD)
- Atomic Layer Deposition (ALD)
- Etch process gas control (RIE, ICP)
- Diffusion furnace gas management
- Semiconductor wafer fab (200 mm / 300 mm tools)
- Flat panel display (FPD) manufacturing
- Solar cell deposition equipment
- R&D laboratory gas blending systems
System Compatibility
The FC-260 uses the industry-standard 15-pin D-sub MFC interface and is compatible with the following OEM process tools (partial list):
- Applied Materials (AMAT) — Centura, Producer, P5000 platforms
- Lam Research — Versys, Kiyo, Flex series
- Novellus / AMAT — Concept One, Speed
- Tokyo Electron (TEL) — Trias, Triase+
- ASM International — Epsilon, A400 series
- Generic MFC controllers with 0–5 V analog setpoint
Selection Guide
Use the checklist below to confirm the correct MFC for your application:
- Gas type: Confirm process gas (N₂, Ar, O₂, H₂, SiH₄, NF₃, etc.) — calibration is gas-specific
- Full-scale flow range: Match sccm / slm range to your process recipe
- Inlet/outlet fittings: VCR, Swagelok, or face-seal — verify port size (¼” or ½”)
- Control interface: Analog (0–5 V) vs. digital (RS-232 / DeviceNet / EtherNet/IP)
- Valve type: Normally closed (NC) vs. normally open (NO)
- Pressure rating: Confirm max inlet pressure for your gas panel
- Replacement vs. upgrade: If upgrading, consider Brooks SLA5850 or MKS 1179A for multi-gas flexibility
Not sure which model fits? Email our engineers with your tool model and process gas — we’ll recommend the right unit within 24 hours.
Quality Assurance & Sourcing
- Condition options: New surplus (sealed OEM) | Refurbished (cleaned, calibrated, tested) | As-removed (for parts)
- Testing: Each unit flow-tested at full scale with calibration gas before shipment
- Calibration certificate: Included with new and refurbished units
- Warranty: 90-day functional warranty on refurbished units; 12-month on new surplus
- Traceability: Serial number logged; test report available on request
- Export compliance: EAR99 / ECCN classification available; export license advisory provided
How to Order
- Add to cart and complete checkout — or contact us for a formal quotation
- Specify required condition: New Surplus / Refurbished / As-Removed
- Provide your gas type and full-scale range if calibration is required
- Bulk / OEM pricing available for orders of 5+ units
- Expedited shipping available (DHL Express, FedEx International Priority)
📧 support@konmask.com | 📞 +0086 19859288691
Replacement & Compatibility FAQ
Q: Can the FC-260 be replaced by an MKS 1179A directly?
A: In most analog-controlled tools, yes — both use the 15-pin D-sub interface and 0–5 V setpoint. Verify gas calibration and flow range match.
Q: What is the difference between RSD126213, 641182W, and 0100-11000?
A: These are cross-reference part numbers used by different OEM tool manufacturers for the same Millipore FC-260 unit. They refer to the same physical product.
Q: Is recalibration required after replacement?
A: Refurbished units from Konmask are shipped pre-calibrated. If your process requires NIST-traceable recalibration on-site, we can provide the calibration data sheet for your metrology team.
Q: Do you offer exchange / core return programs?
A: Yes — contact us for core exchange pricing. Return your defective unit for a credit toward a refurbished replacement.
Q: What is the lead time?
A: In-stock units ship within 1–2 business days. Out-of-stock units: 2–4 weeks sourcing lead time.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
