Hydrogen Gas Flow Control Solution – MILLIPORE TYLAN FC-2911V | FC-2900 Series
Where This Product Is Used
The MILLIPORE TYLAN FC-2911V is a precision mass flow controller engineered for hydrogen (H₂) gas service at a full-scale range of 30 SLM. It is deployed across demanding process environments where accurate, repeatable gas delivery is critical to yield and safety:
- Semiconductor Fabrication (CVD / LPCVD / PECVD) – Controls H₂ carrier and reactant flows in epitaxial silicon, polysilicon, and silicon nitride deposition chambers.
- Thermal Diffusion Furnaces – Maintains precise H₂ ambient flow during high-temperature anneal and oxidation processes.
- Gas Panel / VMB Systems – Drop-in replacement for OEM gas sticks in Applied Materials, Lam Research, and Tokyo Electron tool platforms.
- Hydrogen Fuel Cell R&D – Accurate H₂ metering for membrane electrode assembly testing and stack characterization.
- Metallurgical Annealing – Protective atmosphere control in bright annealing lines for stainless steel and specialty alloys.
- Laboratory & Analytical Instruments – Carrier gas control for GC, ICP-MS, and other analytical platforms requiring stable H₂ supply.
Technical Specifications
| Part Number | DC01333002 |
| Model | FC-2911V |
| Series | FC-2900 |
| Manufacturer | MILLIPORE TYLAN (now part of MKS Instruments) |
| Gas Species | H₂ (Hydrogen) |
| Full-Scale Range | 30 SLM (Standard Liters per Minute) |
| Accuracy | ±1% F.S. |
| Repeatability | ±0.2% F.S. |
| Control Signal | 0–5 VDC (standard); 4–20 mA optional |
| Output Signal | 0–5 VDC linear |
| Inlet Pressure | Up to 100 psig (6.9 bar) |
| Differential Pressure | Typically 10–30 psid for rated flow |
| Valve Type | Normally Closed (NC) solenoid |
| Wetted Materials | 316L SS body, Viton seals |
| Fitting / Port | VCR face-seal (1/4″) |
| Power Supply | ±15 VDC, 24 VDC |
| Operating Temperature | 0–50 °C |
| Weight | ~1,250 g |
| Connector | 15-pin D-sub (standard TYLAN pinout) |
Why Engineers Specify This Model
- H₂-Optimized Calibration – Factory-calibrated for hydrogen with N₂-equivalent conversion factors documented; no field recalibration required for direct H₂ service.
- FC-2900 Series Reliability – The FC-2900 platform has decades of installed-base history in semiconductor fabs, offering proven MTBF and straightforward serviceability.
- OEM Drop-In Compatibility – Standard TYLAN 15-pin D-sub connector and VCR port geometry allow direct substitution in existing gas panels without wiring or plumbing changes.
- Normally Closed Fail-Safe Valve – On power loss, the valve closes automatically, preventing uncontrolled H₂ release — a critical safety feature for flammable gas service.
- Wide Pressure Tolerance – Operates reliably across typical fab supply pressures (20–80 psig), accommodating upstream pressure fluctuations without setpoint drift.
- Low Internal Volume – Minimizes purge time during gas changeovers, reducing process downtime and improving throughput.
Complete System Bill of Materials
For a fully functional H₂ gas delivery sub-system, engineers typically specify the following alongside the FC-2911V:
- Upstream pressure regulator (H₂-rated, stainless diaphragm, 0–100 psig output)
- Inlet isolation valve (VCR, NC solenoid or manual)
- Inline particulate filter (0.003 µm, 316L SS, VCR)
- MFC readout / controller (e.g., MKS 247D, Unit UFC-8160, or DCS I/O card)
- 15-pin D-sub cable assembly (TYLAN-compatible pinout)
- Downstream check valve (H₂-rated, low cracking pressure)
- Purge / vent valve and exhaust line to H₂ abatement system
- H₂ gas detector / interlock (per local safety code)
Compliance & Industry Standards
- SEMI S2 – Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI F1 – Standard for gas distribution components in semiconductor equipment
- CE Marking – Electromagnetic compatibility and low-voltage directive compliance (verify on unit label)
- RoHS – Restriction of Hazardous Substances (confirm lot-specific documentation)
- NFPA 55 / IEC 60079 – Relevant for H₂ storage and handling safety in facility design
Quality Assurance & Sourcing
Every MILLIPORE TYLAN FC-2911V unit offered by Konmask.com undergoes the following before shipment:
- Visual and mechanical inspection against OEM drawings
- Functional flow verification at rated conditions (H₂ or N₂ equivalent)
- Leak test to <1×10⁻⁹ atm·cc/sec He (where applicable)
- Traceability documentation: serial number, P/N DC01333002, calibration gas, and test date recorded
- Anti-static, moisture-barrier packaging with desiccant for international shipment
Units are sourced from decommissioned semiconductor tool refurbishment, authorized distributor surplus, or OEM-certified repair channels. Condition (refurbished / tested / new surplus) is stated explicitly in the listing.
How to Source This Part
- Add to Cart – Click Buy Now or Add to Cart on this page.
- Request a Quote – For volume orders (>3 units) or urgent fab requirements, email support@konmask.com with your PO number and required delivery date.
- Lead Time – In-stock units ship within 1–3 business days (DHL Express / FedEx International Priority). ETA to US/EU fabs: 5–10 business days.
- Export Compliance – This product is classified as EAR99 (no export license required for most destinations). Customers in controlled regions should confirm with their compliance team.
- Payment – T/T (wire transfer), PayPal, and major credit cards accepted. Net-30 available for qualified accounts.
Application-Specific FAQ
Q: Can the FC-2911V control gases other than H₂?
A: Yes, with a conversion factor applied. The unit is calibrated for H₂ (N₂-equivalent factor ≈ 1.008). For other gases, apply the appropriate K-factor. Contact us for a recalibration service if a different gas-specific calibration is required.
Q: Is this compatible with my Applied Materials Centura tool?
A: The FC-2900 series is widely used in AMAT Centura, Producer, and DxZ platforms. Verify the connector pinout and VCR port orientation against your gas stick drawing before installation.
Q: What is the difference between FC-2911V and FC-2911MEV?
A: The “MEV” suffix denotes a metal-sealed valve body for ultra-high-purity (UHP) applications. The standard FC-2911V uses Viton seals, suitable for most semiconductor-grade H₂ service. For sub-ppb purity requirements, specify the MEV variant.
Q: Do you provide a calibration certificate?
A: Yes. A functional test report with flow data at 0%, 50%, and 100% setpoints is included. NIST-traceable calibration certificates are available on request (additional lead time may apply).
Q: What warranty is provided?
A: Konmask.com provides a 90-day functional warranty on all tested units. Units that fail to perform to specification within the warranty period will be repaired, replaced, or refunded at our discretion.
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