Genuine MKS 853-030675-001 ENI VI Probe Assembly | RF Power Monitor – Verified Source
The MKS 853-030675-001 (P/N: 000-1106-100) is an authentic ENI VI Series Voltage-Current Probe Assembly designed for real-time RF power monitoring in plasma processing and semiconductor fabrication equipment. Sourced directly through verified MKS Instruments supply channels and authenticated by Konmask.com’s 4-step quality process before shipment.
Technical Specifications
- Manufacturer: MKS Instruments (ENI Division)
- Part Number: 853-030675-001
- Alternate P/N: 000-1106-100
- Series: ENI VI (Voltage-Current) Probe Series
- Compatible Modules: FX2N-16EYR-ES/UL, FX2N-8AD, FX3U-32M, SAC-DE03C2/I V1.0A
- Function: RF Voltage & Current Probe Assembly for in-situ plasma diagnostics
- Weight: 800 g
- Condition: Genuine OEM / Refurbished (specify at inquiry)
- Origin: USA (MKS Instruments)
Our 4-Step Quality Verification Process
- Step 1 – Source Authentication: All MKS parts are procured exclusively from authorized distributors or verified surplus channels with traceable documentation.
- Step 2 – Physical Inspection: Each unit undergoes visual and dimensional inspection against OEM datasheets — connectors, labels, serial numbers, and housing integrity are verified.
- Step 3 – Functional Bench Test: Where applicable, probe assemblies are bench-tested for signal continuity and impedance characteristics prior to listing.
- Step 4 – Secure Packaging & Documentation: Units ship with inspection records, anti-static packaging, and a Konmask authenticity label. Certificate of conformance available on request.
Key Features & Benefits
- ✅ Genuine OEM Part — not a clone or aftermarket substitute
- ✅ Real-Time RF Monitoring — measures voltage, current, and phase for precise plasma control
- ✅ Drop-In Replacement — direct fit for compatible MKS/ENI RF generator systems
- ✅ Reduces Process Drift — accurate VI sensing stabilizes etch and deposition uniformity
- ✅ Durable Construction — engineered for continuous high-power RF environments
- ✅ Traceable Supply Chain — full sourcing documentation available for regulated fabs
Typical Applications
- Plasma-enhanced CVD (PECVD) and ALD systems
- Reactive ion etching (RIE) and deep silicon etch (DRIE)
- Sputter deposition and PVD chambers
- Semiconductor wafer fabrication (200 mm / 300 mm fabs)
- Flat panel display (FPD) manufacturing
- Research plasma reactors and university labs
Compatible System Components
- MKS / ENI RF Generators (OEM and aftermarket)
- FX2N-16EYR-ES/UL — Mitsubishi MELSEC FX2N output module
- FX2N-8AD — Mitsubishi FX2N analog input module
- FX3U-32M — Mitsubishi MELSEC FX3U main unit (32 I/O)
- SAC-DE03C2/I V1.0A — SICK safety controller interface module
- Matching impedance networks and RF transmission lines
Global Sourcing & Shipping Capabilities
- 📦 In-Stock & Ready to Ship — most orders dispatched within 1–3 business days
- 🌍 Worldwide Delivery — DHL Express, FedEx International, and EMS available
- 🇨🇳 China Export Hub — consolidated shipping from Fujian, China for Asia-Pacific customers
- 📋 Export Documentation — commercial invoice, packing list, and ECCN classification provided
- 🔒 Secure Packaging — anti-static foam, moisture barrier bag, and outer carton
Certifications & Compliance Statement
MKS Instruments designs its products to meet applicable international standards. This probe assembly is associated with systems compliant with:
- CE Marking (EU Machinery & EMC Directives)
- RoHS Directive 2011/65/EU
- SEMI S2 / S8 Safety Guidelines (semiconductor equipment)
- ISO 9001 Quality Management (MKS Instruments manufacturing)
Konmask.com is an independent reseller. Compliance documentation from the original manufacturer is available upon request.
How to Order
- Add to Cart — click the purchase button above for standard stock orders.
- Request a Quote — for bulk orders (5+ units), OEM pricing, or custom lead times, email [email protected].
- Provide Your PO — B2B customers may submit a purchase order; net-30 terms available for approved accounts.
- Confirm Shipping Method — our logistics team will confirm carrier, ETA, and tracking within 24 hours of order confirmation.
Authenticity & Trust FAQ
Q: Is this a genuine MKS / ENI part?
A: Yes. We source exclusively from verified supply channels. Each unit carries the original MKS part label and serial number.
Q: Can you provide a certificate of conformance (CoC)?
A: Yes, CoC and inspection reports are available upon request at no additional charge.
Q: What if the part doesn’t match my system?
A: Contact us within 7 days of receipt. We offer exchange or full refund for mismatched or defective parts.
Q: Do you offer warranty?
A: All parts carry a 90-day Konmask functional warranty. Extended warranty available for volume orders.
Q: How do I verify the part number before ordering?
A: Send us your system model and existing part label photo via email — we’ll confirm compatibility before you pay.
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Original Source: https://Konmask.com
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