MKS Instruments 1350-01083 Baratron Capacitance Manometer – Precision Pressure Measurement for Semiconductor & Vacuum Processes
When a pressure transducer fails mid-process in a semiconductor fab or vacuum coating system, the consequences are immediate and costly: process drift, wafer scrap, unplanned downtime, and potential damage to downstream equipment. In high-purity, low-pressure environments where every Pascal matters, there is no acceptable substitute for a precision-grade capacitance manometer. The MKS Baratron series was engineered precisely for these zero-tolerance conditions.
The MKS 1350-01083 — with cross-reference part numbers 852B61PCA2GC, 0100-01692, 0100-20458, P5/6X86 SBC, M9313-00126, and 960560-G4B — represents a mature, field-proven configuration within MKS Instruments’ globally trusted Baratron capacitance manometer family. Baratron transducers are the de facto standard in semiconductor OEM equipment, thin-film deposition, and advanced vacuum research worldwide, recognized for their temperature-compensated, gas-independent measurement technology.
Technical Specifications
- Manufacturer: MKS Instruments
- Primary Part Number: 1350-01083
- Cross-Reference / OEM Part Numbers: 852B61PCA2GC | 0100-01692 | 0100-20458 | P5/6X86 SBC | M9313-00126 | 960560-G4B
- Series: Baratron® Capacitance Manometer
- Measurement Technology: Capacitance manometer (gas-independent, temperature-compensated)
- Weight: 2,600 g
- Condition: New / Refurbished / Tested — please contact us to confirm current stock condition
- Compliance: RoHS-compatible configurations available
Note: Additional specifications (full-scale range, output signal, process connection, operating temperature) are available upon request. We do not publish unverified parameters.
Key Features & Benefits
- Gas-Independent Measurement: Capacitance sensing technology delivers accurate readings regardless of gas composition — critical for multi-gas process chambers.
- Temperature Compensation: Integrated thermal management ensures stable output across varying ambient and process temperatures.
- High Repeatability: Baratron sensors are renowned for long-term stability and minimal zero drift, reducing recalibration frequency.
- Multi-OEM Cross-Reference: Covers Applied Materials (0100-01692, 0100-20458), Lam Research, and other OEM part numbers — simplifying procurement across mixed equipment fleets.
- Drop-In Replacement: Designed for direct substitution in existing process tool configurations without mechanical or electrical modification.
- Proven Field Reliability: Baratron transducers have accumulated decades of deployment in the world’s most demanding semiconductor fabs.
Industry & Equipment Applications
- Semiconductor Manufacturing: CVD, PVD, ALD, etch, and implant process chambers requiring precise sub-atmospheric pressure control.
- Flat Panel Display (FPD) Production: Large-area deposition systems with stringent process pressure uniformity requirements.
- Solar Cell Fabrication: PECVD and sputtering tools for thin-film photovoltaic production.
- Research & Development: University and national laboratory vacuum systems, surface science instruments, and mass spectrometry setups.
- Industrial Vacuum Coating: Optical coating, hard coating, and decorative PVD systems.
- Pharmaceutical & Chemical Processing: Vacuum distillation and drying applications requiring traceable pressure measurement.
System Integration & Compatible Parts
The MKS 1350-01083 Baratron transducer integrates with MKS signal conditioners, power supplies, and process control systems. Commonly paired components include:
- MKS PDR-C-2C / PDR-D-1 Readout Units
- MKS 670 / 672 Signal Conditioner Modules
- MKS Type 248 / 250 / 651 Pressure Controllers
- Applied Materials (AMAT) and Lam Research OEM process tool interfaces (cross-referenced via 0100-01692, 0100-20458)
Contact our technical team to verify connector pinout, cable compatibility, and mounting configuration for your specific tool.
Our Quality Assurance Process
- Source Verification: All units are sourced from authorized distributors, OEM decommissions, or certified refurbishers with full traceability.
- Incoming Inspection: Visual inspection, part number verification, and cross-reference validation before listing.
- Functional Testing: Where applicable, units undergo electrical continuity and basic functional checks prior to shipment.
- Secure Packaging: ESD-safe packaging with moisture barrier and shock-absorbing materials for international transit.
- Documentation: Certificate of conformance and test reports available upon request.
How to Order
- Submit an inquiry via the Contact Us page or email [email protected].
- Provide your required quantity, delivery timeline, and destination country.
- Our team will confirm stock availability, condition, and lead time within 24 business hours.
- Receive a formal quotation with payment terms and shipping options.
- Upon order confirmation, we arrange secure export packaging and international logistics.
Why Choose Konmask.com?
- Industrial Automation Specialists: We focus exclusively on PLC, DCS, and process instrumentation components — not a generalist marketplace.
- Global B2B Export Experience: Serving procurement teams, MRO buyers, and OEM service engineers across Asia, Europe, the Middle East, and the Americas.
- Hard-to-Find Parts: We stock and source obsolete, long lead-time, and OEM-specific components that standard distributors cannot supply.
- Technical Pre-Sales Support: Our engineers assist with cross-reference validation, compatibility checks, and application guidance.
- Transparent Communication: No hidden fees. Clear quotations, honest lead times, and responsive after-sales support.
Frequently Asked Questions
- Q: What is the difference between 1350-01083, 852B61PCA2GC, 0100-01692, and 0100-20458?
- A: These are cross-reference part numbers used by different OEM equipment manufacturers (Applied Materials, Lam Research) and MKS Instruments for the same or functionally equivalent Baratron transducer configuration. Contact us to confirm exact interchangeability for your specific tool revision.
- Q: Is this a new or refurbished unit?
- A: Stock condition varies. Please inquire directly — we will confirm whether current inventory is new, factory-refurbished, or tested-used, along with available warranty terms.
- Q: Can you ship internationally?
- A: Yes. We ship globally via DHL, FedEx, UPS, and freight forwarder. Export documentation including commercial invoice and packing list is provided as standard.
- Q: What is the lead time?
- A: In-stock units typically ship within 3–5 business days. Out-of-stock items are sourced on request — typical sourcing lead time is 2–6 weeks depending on availability.
- Q: Do you provide a warranty?
- A: Warranty terms are provided on a per-unit basis depending on condition and source. Details are included in the formal quotation.
© 2026 Konmask.com. All rights reserved.
Original Source: https://konmask.com
Contact: [email protected] | +0086 19859288691
