Pressure & Flow Measurement Solution – MKS DA01A12TGAS20A00 | CP4010 Series
Where This Product Is Used
The MKS DA01A12TGAS20A00 Transducer Assembly is a precision measurement component deployed across demanding industrial and semiconductor environments. Typical deployment sites include:
- Semiconductor Fabrication (Fab) – CVD, PVD, etch, and diffusion chambers requiring accurate gas pressure feedback
- Vacuum Process Systems – Integrated into vacuum lines where stable pressure signals are critical for process repeatability
- Industrial Gas Distribution – Monitoring and controlling gas manifold pressure in specialty gas cabinets
- OEM Equipment Platforms – Direct replacement in systems referencing CP4010, FC-226-02, 2709-75313, 13190869, or EVS9322-ES part numbers
- Research & Laboratory Instruments – Analytical instruments requiring traceable, stable transducer output
Technical Specifications
| Attribute | Detail |
|---|---|
| Manufacturer | MKS Instruments |
| Primary Part Number | DA01A12TGAS20A00 |
| Cross-Reference / Alt. P/N | CP4010 | FC-226-02 | 2709-75313 | 13190869 | EVS9322-ES |
| Product Type | Transducer Assembly |
| Series | MKS CP4010 / DA Series |
| Application | Pressure & Flow Measurement |
| Weight | 2,600 g (approx.) |
| Condition | New / Refurbished (specify at inquiry) |
| Warranty | 90-Day Konmask Quality Guarantee |
Why Engineers Specify This Model
- Multi-Reference Compatibility – A single assembly resolves five cross-reference part numbers (CP4010, FC-226-02, 2709-75313, 13190869, EVS9322-ES), simplifying procurement and reducing BOM complexity.
- Drop-In Replacement – Designed to match OEM mechanical and electrical interfaces; no modification required for qualified platforms.
- MKS Instruments Pedigree – MKS is the global leader in pressure measurement and gas control for semiconductor and industrial processes, ensuring long-term support and calibration traceability.
- Reduced Downtime – Stocked and ready to ship, minimizing unplanned equipment downtime in critical production environments.
Complete System Bill of Materials
When specifying the DA01A12TGAS20A00, engineers typically include the following complementary components:
- MKS Signal Conditioner / Controller (e.g., MKS 670 or 600 Series)
- Compatible vacuum fittings and VCR/VCO connectors
- Shielded transducer cable assemblies
- Mounting brackets and isolation hardware
- Calibration reference standard (traceable to NIST)
Contact Konmask for a complete system quotation.
Compliance & Industry Standards
- Manufactured under MKS Instruments ISO 9001-certified quality management system
- Compatible with SEMI S2 / S8 safety guidelines for semiconductor equipment
- RoHS compliance status: confirm with Konmask at time of order
- CE marking applicability: per OEM equipment documentation
Quality Assurance & Sourcing
Konmask sources the MKS DA01A12TGAS20A00 through verified industrial supply channels. Every unit undergoes:
- Visual and dimensional inspection upon receipt
- Cross-reference verification against OEM documentation
- Secure anti-static packaging for transit protection
- Traceable documentation provided upon request
How to Source This Part
- Click Add to Cart or submit a Request for Quote (RFQ) via the contact form.
- Provide your required quantity, delivery timeline, and destination country.
- Konmask will confirm availability, lead time, and shipping options within 1 business day.
- Payment via T/T, PayPal, or other agreed terms; export documentation available for international orders.
Application-Specific FAQ
Q: Is DA01A12TGAS20A00 a direct replacement for EVS9322-ES?
A: Yes. EVS9322-ES is a recognized cross-reference for this assembly. Verify connector pinout and process connection before installation.
Q: What is the lead time for this part?
A: In-stock units ship within 2–5 business days internationally. Contact us for expedited options.
Q: Can Konmask provide a calibration certificate?
A: Calibration certificates from MKS-authorized labs can be arranged upon request at additional cost.
Q: Does this unit work with MKS 670 Signal Conditioner?
A: The DA01A12TGAS20A00 is designed for use within the MKS CP4010 / DA Series ecosystem. Confirm compatibility with your specific controller model via our technical team.
Q: What is the warranty?
A: Konmask provides a 90-day quality guarantee covering defects in materials and workmanship. Extended warranty available on request.
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