Vacuum Pressure Control Solution — MKS Instruments TYPE 683 | 683B Series
Where This Product Is Used
The MKS Instruments TYPE 683 Exhaust Throttle Control Valve is a precision vacuum flow-control component engineered for demanding semiconductor and industrial process environments. Typical deployment locations include:
- CVD / PECVD Chambers — Maintains stable process pressure during thin-film deposition cycles, preventing particle contamination caused by pressure transients.
- Dry Etch & RIE Systems — Provides fast-response throttling to sustain etch uniformity across wafer surfaces.
- PVD / Sputtering Tools — Controls exhaust conductance to stabilize argon/reactive-gas ratios during target conditioning and deposition.
- ALD (Atomic Layer Deposition) — Enables precise purge-cycle pressure management critical to monolayer-accurate film growth.
- Diffusion Furnaces & Oxidation Tubes — Regulates exhaust flow to maintain uniform ambient pressure across the process tube.
- Industrial Vacuum Systems — Applied in R&D and pilot-scale vacuum furnaces, leak-test benches, and coating systems requiring repeatable pressure set-points.
Technical Specifications
| Manufacturer | MKS Instruments |
| Series | TYPE 683 / 683B |
| Primary Part Number | 683B-24617 |
| Cross-Reference / Alt. P/N | 0100-00269 · TEC 68356 · D45877 |
| Component Type | Exhaust Throttle Control Valve |
| Function | Variable-conductance vacuum exhaust throttling for closed-loop pressure control |
| Compatible Controllers | MKS Type 651 / 652 Pressure Controllers; third-party 0–10 V / 4–20 mA analog interfaces |
| Gross Weight | 2,600 g (approx.) |
| Condition | Used / Refurbished — Tested & Verified Functional |
Why Engineers Specify This Model
- Proven Platform — The TYPE 683 series has accumulated decades of field hours across AMAT, Lam Research, TEL, and ASML tool platforms.
- Fast Actuator Response — Pneumatic or motorized actuation delivers sub-second valve positioning, essential for tight pressure-loop stability.
- Multi-OEM Cross-Reference — Single valve covers four part numbers (683B-24617 / 0100-00269 / TEC 68356 / D45877), simplifying procurement across mixed-OEM fabs.
- Drop-In Replacement — Maintains original flange dimensions and electrical interface, minimizing downtime during scheduled PM or emergency swap-out.
- Corrosion-Resistant Wetted Surfaces — Compatible with halogen-bearing process gases (Cl₂, HBr, NF₃, SF₆) common in etch and clean steps.
Complete System Bill of Materials
For a fully functional exhaust pressure-control loop, the following components are typically specified alongside the TYPE 683 valve:
- MKS Type 651 / 652 Exhaust Pressure Controller
- MKS Baratron® Capacitance Manometer (Type 627 / 628 series)
- Pneumatic supply line (clean dry air, 60–80 psi) or stepper-motor driver card
- KF / ISO-K vacuum flange fittings and centering rings
- Valve position feedback cable (D-sub or M12 connector, OEM-specific)
Compliance & Industry Standards
- Designed and manufactured to SEMI S2 environmental, health & safety guidelines for semiconductor equipment.
- Wetted materials selected for compatibility with SEMI F57 ultrapure fluid handling requirements.
- Electrical interfaces conform to CE / RoHS directives where applicable.
- Vacuum integrity tested per ISO 3529 leak-rate classification standards.
Quality Assurance & Sourcing
Every unit listed on Konmask.com undergoes a structured inspection protocol before shipment:
- Visual Inspection — Flange faces, actuator housing, and position-sensor connectors checked for mechanical damage.
- Functional Actuation Test — Full open/close cycle verified; valve travel and torque within OEM specification.
- Leak Test — Helium or nitrogen leak-check performed to confirm vacuum integrity at the valve seat and body seals.
- Electrical Continuity — Solenoid coil resistance and position-feedback signal verified against OEM datasheet values.
- Photographic Documentation — Unit-specific images captured and archived for traceability.
Parts are sourced from decommissioned semiconductor tools, authorized surplus channels, and certified refurbishers — never from unverified grey-market brokers.
How to Source This Part
- Confirm Part Number — Match your BOM against any of the four cross-reference numbers: 683B-24617 · 0100-00269 · TEC 68356 · D45877.
- Request a Quote — Email support@konmask.com with your required quantity, delivery timeline, and destination country.
- Receive Inspection Report — We provide a pre-shipment inspection report and photos upon request.
- Shipping & Export — Worldwide shipping available; export documentation (commercial invoice, packing list, COO) provided for customs clearance.
- Lead Time — In-stock units typically ship within 1–3 business days of order confirmation.
Application-Specific FAQ
Q: Is this valve compatible with my AMAT Centura or Producer platform?
A: The TYPE 683 series is widely used across AMAT Centura, Producer, and DPS chamber configurations. Please share your tool model and chamber type for confirmation.
Q: Can this valve be used with corrosive process gases?
A: Yes. The wetted surfaces are constructed from materials compatible with common halogen-bearing etch and clean gases. Contact us for a full materials-of-construction list if your process requires specific compatibility verification.
Q: Do you offer a warranty?
A: All units carry a 90-day functional warranty covering actuation and vacuum integrity. Extended warranty options are available — contact us for details.
Q: Can you supply multiple units for a fleet PM program?
A: Yes. We maintain inventory for volume orders and can support scheduled PM kitting programs. Request a volume quote via email.
Q: What is the lead time for international orders?
A: In-stock units ship within 1–3 business days. International transit typically takes 5–10 business days depending on destination and shipping method selected.
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