MKS R750B13TCE2GG – High-Accuracy Capacitance Manometer | Baratron® Series
Engineering Background
The MKS Baratron® capacitance manometer is the industry benchmark for absolute pressure measurement in vacuum and process environments. Developed by MKS Instruments — a global leader in gas and pressure control — the Baratron® platform has been deployed in semiconductor fabs, thin-film deposition systems, and precision chemical process lines for over five decades. The R750B series represents the ruggedized, temperature-controlled variant engineered for demanding process conditions where measurement drift and contamination resistance are critical.
Product Positioning
The R750B13TCE2GG (P/N 50412470000, cross-ref 0020-26112) is a 1000 Torr full-scale absolute pressure transducer with a heated sensor head, stainless steel wetted surfaces, and a 0–10 VDC analog output. It is designed for direct integration into process chambers, load-lock systems, and gas delivery manifolds where traceable, repeatable pressure data is non-negotiable.
Complete Technical Specifications
- Model / SKU: R750B13TCE2GG
- Part Numbers: 50412470000 | 0020-26112
- Manufacturer: MKS Instruments (USA)
- Series / Platform: Baratron® 750B – Heated Capacitance Manometer
- Measurement Type: Absolute pressure (capacitance sensing)
- Full-Scale Range: 1000 Torr (1333 mbar / 133.3 kPa)
- Accuracy: ±0.5% of reading (typical)
- Output Signal: 0–10 VDC analog (linear)
- Sensor Temperature: Heated (45 °C standard), minimizes condensation and zero drift
- Wetted Materials: 316L stainless steel diaphragm and body
- Process Connection: 1.33″ CF (ConFlat) flange — confirm per unit label
- Electrical Connector: 15-pin D-sub (TCE2 pinout)
- Supply Voltage: ±15 VDC (typical MKS standard)
- Operating Temperature: 15 °C – 50 °C ambient
- HS Code: 9026.20.40
- Weight (unit): ~0.45 kg (shipping weight declared separately)
Proven Application Environments
- Semiconductor CVD / PVD / ALD process chambers
- Etch and strip tool pressure control loops
- Load-lock and transfer chamber pressure monitoring
- Thin-film deposition and sputtering systems
- Pharmaceutical freeze-drying (lyophilization) vessels
- Industrial vacuum furnaces and heat-treatment systems
- Gas delivery manifolds requiring absolute reference measurement
- Research vacuum systems (UHV pre-stage monitoring)
Engineering Advantages
- Heated sensor head eliminates process gas condensation on the diaphragm, preserving zero stability over long run times
- Capacitance sensing principle is gas-species independent — no correction factor required for non-nitrogen gases
- All-metal wetted path (316L SS) compatible with corrosive and reactive process chemistries
- 0–10 VDC linear output interfaces directly with standard PLC analog input cards and MFC controllers without signal conditioning
- Proven MKS calibration traceability — NIST-traceable factory calibration certificate available on request
- Drop-in replacement for legacy 750B-series units; same footprint, connector, and output scaling
System Architecture & Signal Flow
The R750B13TCE2GG operates as a passive absolute pressure reference in a closed-loop pressure control architecture:
- Process chamber → CF flange connection → R750B13TCE2GG sensor → 0–10 VDC signal → MKS 600-series controller / PLC analog input → throttle valve or pump speed command → chamber pressure setpoint maintained
- The heated sensor head is powered via the 15-pin D-sub connector; no separate heater supply required when using MKS-compatible power/readout units
- Compatible readout/controller units: MKS 670, 672, PR4000B, and third-party 0–10 V analog inputs (0 V = 0 Torr; 10 V = 1000 Torr)
Sourcing & Quality Verification
- Units sourced from decommissioned OEM tool sets, certified MKS distributors, or authorized refurbishers
- Each unit inspected for: physical integrity of CF flange sealing surface, connector pin condition, and sensor zero/span verification where test equipment is available
- Original MKS calibration label and serial number preserved; factory calibration certificate available upon request (subject to unit history)
- Packaging: anti-static bag + foam-lined box; CF flange capped for transit
- All listings on Konmask.com reflect actual stock — no drop-ship or unverified inventory
Procurement Process
- Lead time: In-stock units ship within 1–3 business days (DHL / FedEx international)
- MOQ: 1 unit
- Payment: T/T bank transfer, PayPal, credit card via Shopify Payments
- Export documentation: Commercial invoice, packing list, and HS 9026.20.40 declaration provided
- Warranty: 30-day DOA warranty; extended warranty available — contact sales
- RFQ / bulk pricing: Contact [email protected] for volume orders ≥ 3 units
Technical FAQ
Q: Is the R750B13TCE2GG a direct replacement for the standard 750B13TCE2GG?
A: Yes. The “R” prefix denotes a refurbished or remanufactured unit with equivalent electrical and mechanical specifications. Verify the serial number and calibration date label on receipt.
Q: What power supply does this unit require?
A: Standard MKS Baratron® ±15 VDC supply via the 15-pin D-sub (TCE2 pinout). Compatible with MKS 670/672 readout units and most OEM tool power rails.
Q: Can this transducer measure pressures below 1 Torr accurately?
A: The 1000 Torr full-scale range provides best accuracy in the 10–1000 Torr band. For sub-Torr or mTorr measurement, a lower full-scale Baratron® (e.g., 10 Torr or 100 mTorr range) is recommended.
Q: Is a calibration certificate included?
A: Original factory calibration documentation is provided where available. Contact us before ordering if a current NIST-traceable calibration is required — we can arrange third-party recalibration.
Q: What is the shelf life / storage requirement?
A: Store in a dry, clean environment (15–30 °C, <60% RH) with CF flange caps installed. Avoid exposure to corrosive atmospheres during storage.
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