MKS 1179AX11CR14V26 PF802-ADS Mass Flow Controller – Mass-Flo Series
When a mass flow controller fails mid-process in a semiconductor fab or chemical vapor deposition system, the consequences are immediate and costly: process gas flows out of spec, wafer batches are scrapped, and production lines halt while engineers scramble to source a replacement. In high-purity gas delivery systems, there is no acceptable substitute for a precisely calibrated, OEM-grade MFC — every millisecond of uncontrolled flow is a liability.
The MKS 1179AX11CR14V26 PF802-ADS (also referenced as E17601520 / E19299450) is a thermal mass flow controller from MKS Instruments’ renowned Mass-Flo® Series — one of the most widely deployed MFC platforms in global semiconductor manufacturing, flat panel display production, and advanced industrial gas process control. This model combines MKS’s proven thermal sensing technology with a robust metal-sealed flow body, delivering repeatable, drift-resistant performance in demanding process environments.
Technical Specifications
- Part Number: 1179AX11CR14V26
- Reference Numbers: PF802-ADS / E17601520 / E19299450
- Brand: MKS Instruments
- Series: Mass-Flo® (Model 1179)
- Type: Thermal Mass Flow Controller (MFC)
- Weight: 2,600 g
- Valve Type: Normally Closed (NC) — inferred from suffix
- Connector: D-Sub / standard MKS interface (per PF802-ADS designation)
- Wetted Materials: 316L SS body, Cr-plated internals (per AX11CR suffix)
- Seal Material: Refer to OEM datasheet for gas-specific seal selection
- Output Signal: 0–5 VDC analog (standard Mass-Flo interface)
- Power Supply: ±15 VDC (standard MKS 1179 platform)
Note: Specifications above are based on MKS 1179 series platform data and part number decoding. Always verify against the OEM datasheet or contact us for confirmation before installation.
Key Features & Benefits
- Proven Mass-Flo® Platform: The MKS 1179 series has decades of field-proven reliability across thousands of semiconductor and industrial installations worldwide.
- High Repeatability: Thermal sensing technology delivers consistent, repeatable flow measurement with minimal drift over extended operation cycles.
- Metal-Sealed Flow Path: Cr-plated internals and 316L SS wetted surfaces ensure compatibility with corrosive and high-purity process gases.
- Drop-In Replacement: Standard MKS D-Sub interface and 0–5 VDC signal output ensure direct compatibility with existing MKS-based gas panels and process controllers.
- Dual Reference Numbers: Cross-referenced as E17601520 and E19299450, simplifying procurement across different OEM BOM systems.
- Normally Closed Valve: Fail-safe design closes the valve on power loss, protecting process integrity and equipment safety.
Industry & Equipment Applications
- Semiconductor Manufacturing: CVD, PECVD, ALD, etch, and diffusion furnace gas delivery systems
- Flat Panel Display (FPD) Production: TFT-LCD and OLED deposition process gas control
- Solar Cell Fabrication: Thin-film deposition and passivation gas flow management
- LED & Compound Semiconductor: MOCVD reactor precursor gas control
- Industrial Gas Processing: Specialty gas blending, calibration gas systems, and R&D laboratory flow control
- OEM Equipment: Applied Materials, Lam Research, Tokyo Electron, and other major OEM tool platforms using MKS MFC standards
System Integration & Compatible Parts
The MKS 1179AX11CR14V26 integrates directly into standard MKS Mass-Flo gas delivery panels. Compatible and commonly paired components include:
- MKS 247 Multi-Channel Readout & Control
- MKS PR4000 / PR4000B Power Supply & Readout
- MKS Type 1179 series MFCs (other flow ranges and gas calibrations)
- MKS 248 Control Valve
- Standard VCR® or Swagelok® face-seal fittings (per installation configuration)
Contact our technical team to confirm compatibility with your specific gas panel or process tool configuration.
Our Quality Assurance Process
- Source Verification: All MKS components are sourced from authorized distributors, certified refurbishers, or directly from decommissioned OEM equipment with full traceability.
- Visual & Mechanical Inspection: Each unit is inspected for physical integrity, connector condition, label legibility, and absence of contamination or damage.
- Functional Testing: Where applicable, units are bench-tested for valve actuation and signal response prior to shipment.
- Secure Packaging: Anti-static bags, foam cushioning, and sealed cartons protect sensitive MFC internals during international transit.
- Documentation: Test records and inspection reports available upon request for critical procurement requirements.
How to Order
- Submit your inquiry via the Contact / RFQ form on this page or email support@konmask.com
- Provide your required quantity, target delivery timeline, and destination country
- Our team will respond within 1 business day with availability confirmation and a formal quotation
- Upon PO confirmation, we arrange secure packaging and international shipping with full tracking
Why Choose Konmask.com?
- Industrial Automation Specialists: We focus exclusively on PLC, DCS, MFC, and process control components — not a generalist marketplace.
- Global B2B Supply: Serving engineering teams, procurement departments, and MRO buyers across Asia, Europe, and the Americas.
- Hard-to-Find Parts: We stock and source obsolete, long lead-time, and EOL components that standard distributors cannot supply.
- Technical Support: Our team includes engineers with hands-on experience in semiconductor and industrial automation systems.
- Transparent Process: Clear quotation, inspection documentation, and shipping tracking — no surprises.
Frequently Asked Questions
Q: What does the part number suffix “AX11CR14V26” indicate?
A: MKS part number suffixes encode configuration details such as flow range, gas calibration, valve type, seal material, and connector type. “CR” typically refers to Cr-plated wetted surfaces, and “V” designates the valve configuration. Contact us or refer to the MKS 1179 configuration guide for full decoding.
Q: Is this unit new, refurbished, or used?
A: Stock condition varies. Please submit an RFQ and we will specify the exact condition, source, and available documentation for the unit(s) in stock at the time of your inquiry.
Q: Can this MFC be recalibrated for a different gas or flow range?
A: MKS 1179 series MFCs can be recalibrated by MKS-authorized service centers. We can advise on recalibration options upon request.
Q: What is the lead time for international orders?
A: In-stock units typically ship within 3–5 business days. Lead time for sourced units varies by availability. We provide estimated delivery timelines in our formal quotation.
Q: Do you provide a warranty?
A: We offer a limited inspection warranty covering physical and functional condition as described. Terms are specified in the quotation. Extended warranty options may be available — please inquire.
Q: What shipping methods do you support?
A: We ship via DHL, FedEx, UPS, and EMS for international orders. Air freight and sea freight options are available for bulk orders.
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