NOVELLUS 04-732063-01 253B-15488 0050-61196 ESC Wafer Notch Clamp – Electrostatic Chuck Wafer Handling Component
When a wafer notch clamp fails mid-process in a CVD chamber, the consequences are immediate and costly: wafer misalignment, particle contamination, unplanned downtime, and scrapped batches worth tens of thousands of dollars. In high-throughput semiconductor fabs running 24/7, even a single unscheduled stop cascades into yield loss and delivery delays. The NOVELLUS 04-732063-01 ESC WT Notch Clamp is the precision mechanical interface that prevents exactly this scenario — holding the wafer in exact rotational registration on the electrostatic chuck throughout deposition cycles.
Within the NOVELLUS CVD platform ecosystem, the 04-732063-01 (cross-referenced as 253B-15488 and 0050-61196) occupies a critical position as the wafer-to-chuck alignment component. NOVELLUS Systems — now part of Lam Research — built its reputation on high-throughput PECVD and SACVD systems deployed in leading-edge fabs worldwide. This notch clamp is engineered to the same exacting tolerances as the original OEM specification, ensuring compatibility with the electrostatic chuck assembly and maintaining the sub-micron positional accuracy that advanced node processes demand.
Technical Specifications
- Part Number: 04-732063-01
- Cross Reference: 253B-15488 / 0050-61196
- OEM Brand: NOVELLUS Systems (Lam Research)
- Component Type: ESC Wafer Notch Clamp (Electrostatic Chuck Wafer Notch Clamp)
- Function: Wafer rotational alignment and retention on ESC during CVD process
- Compatible Platform: NOVELLUS CVD / PECVD / SACVD process chambers
- Material: Precision-machined semiconductor-grade material (OEM specification)
- Weight: Approx. 360 g
- Condition: New / Refurbished (specify at inquiry)
Key Features & Benefits
- OEM-Grade Dimensional Accuracy: Machined to original NOVELLUS tolerances for drop-in replacement without chamber re-qualification
- Multi-PN Cross-Reference: Covers 04-732063-01, 253B-15488, and 0050-61196 — eliminates sourcing confusion across different fab documentation systems
- Contamination-Controlled Handling: Packaged and shipped under cleanroom-compatible protocols to protect critical surfaces
- Reduced Downtime Risk: Ready-to-install condition minimizes mean time to repair (MTTR) during unplanned maintenance windows
- Verified Compatibility: Sourced and inspected against NOVELLUS CVD platform assembly drawings
Industry & Equipment Applications
- Semiconductor Fabrication (Front-End): PECVD, SACVD, and HDP-CVD deposition chambers in logic and memory fabs
- Flat Panel Display Manufacturing: Large-area CVD systems adapted from NOVELLUS platform architecture
- Advanced Packaging: Wafer-level packaging lines utilizing ESC-based handling for thin wafer processes
- R&D & Pilot Lines: University and research institute CVD tools requiring OEM-equivalent spare parts
- Equipment Refurbishment: Tool refurbishers and used equipment dealers restoring NOVELLUS CVD systems to operational spec
System Integration & Compatible Parts
The 04-732063-01 notch clamp interfaces directly with the electrostatic chuck (ESC) assembly in NOVELLUS CVD process modules. When performing maintenance or replacement, engineers should also inspect and consider replacing the following associated components:
- ESC Assembly (Electrostatic Chuck Body)
- Wafer Lift Pin Assembly
- Chamber Liner / Shield Kit
- ESC RF Connector and Cabling
- Wafer Temperature Sensor Assembly
Contact our technical team at [email protected] to confirm compatibility with your specific chamber configuration and software revision.
Our Quality Assurance Process
At Konmask.com, every semiconductor spare part undergoes a structured verification process before shipment:
- Source Verification: Parts are traced to authorized distributors, OEM surplus channels, or certified refurbishment facilities
- Visual & Dimensional Inspection: Critical mating surfaces, bore dimensions, and material integrity are checked against reference specifications
- Documentation Package: Each shipment includes part traceability documentation upon request
- Cleanroom-Compatible Packaging: Parts are bagged and labeled to maintain surface cleanliness during transit
- Post-Sale Support: Our engineering team is available to assist with installation questions and compatibility verification
How to Order
- Submit an inquiry via the Contact / Request a Quote button on this page
- Provide your required quantity, delivery timeline, and destination country
- Our team will respond within 1 business day with availability, lead time, and pricing
- Upon confirmation, we issue a proforma invoice and arrange secure international shipping
- Tracking information and shipping documents (commercial invoice, packing list) are provided upon dispatch
Why Choose Konmask.com?
- Specialized Inventory: We focus exclusively on industrial automation and semiconductor equipment spare parts — not a generalist marketplace
- Global Shipping: Experienced in export documentation, customs compliance, and international logistics for industrial components
- Technical Expertise: Our team understands the engineering context of every part we supply — not just the part number
- Responsive Communication: Direct access to technical staff, not a call center — faster answers for time-critical procurement
- Competitive Pricing: Transparent quotation with no hidden fees; volume discounts available for MRO and project orders
Frequently Asked Questions
Q: Is the 04-732063-01 a new OEM part or a refurbished component?
A: We supply both new and refurbished conditions depending on availability. Please specify your requirement in the inquiry form and we will confirm the condition and source.
Q: What is the difference between part numbers 04-732063-01, 253B-15488, and 0050-61196?
A: These are cross-reference part numbers used across different NOVELLUS documentation revisions and internal tracking systems. They refer to the same physical component — the ESC Wafer Notch Clamp.
Q: Can you ship to our fab in the US / Europe / Southeast Asia?
A: Yes. We ship internationally with full export documentation. Contact us to confirm lead time and shipping options for your region.
Q: Do you offer a warranty on this part?
A: Warranty terms depend on the part condition (new vs. refurbished) and are confirmed at the time of quotation. Please include your requirements in the inquiry.
Q: How quickly can you deliver?
A: Lead time depends on current stock status. In-stock items typically ship within 3–5 business days. Contact us for real-time availability.
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