Novellus PVD300 17-260362-00 Shield Barrel | Replacement, Equivalent & Selection Guide
The Novellus PVD300 Shield Barrel (P/N 17-260362-00), also referenced as 810-019566-705 and 25160112, is a critical chamber component used in Novellus PVD300 physical vapor deposition systems. At Konmask.com, we specialize in sourcing OEM-grade and compatible replacement parts for semiconductor fab equipment — helping engineers and procurement teams make confident, spec-accurate decisions.
Technical Specifications
- Part Number: 17-260362-00
- Cross Reference: 810-019566-705 / 25160112
- Description: Shield Barrel
- Platform: Novellus PVD300
- Manufacturer: Novellus Systems (now Lam Research)
- Component Type: PVD Chamber Shield / Barrel Assembly
- Material: High-purity metal alloy (OEM specification)
- Function: Protects chamber walls from deposition contamination; maintains process uniformity
- Condition Available: New OEM, Refurbished, Used Tested
Compatible Replacement & Equivalent Models
When sourcing a replacement for the 17-260362-00 Shield Barrel, the following part numbers are confirmed cross-references or functionally equivalent alternatives:
- 810-019566-705 — Novellus internal revision reference
- 25160112 — Alternate catalog number for the same assembly
- OEM-equivalent aftermarket shields machined to Novellus PVD300 chamber tolerances
- Refurbished 17-260362-00 units with full dimensional inspection and cleaning certification
Note: Always verify dimensional tolerances and material grade before substituting with aftermarket equivalents. Contact our team for a compatibility check.
Why Choose the Original Model
- Process Integrity: OEM shields maintain the exact geometry required for uniform thin-film deposition in PVD300 chambers.
- Contamination Control: Precision-fit barrel shields minimize particle generation and cross-contamination between process runs.
- Longer Service Life: Original Novellus materials are optimized for high-temperature, high-vacuum PVD environments.
- Reduced Downtime: Drop-in fit eliminates alignment issues common with non-OEM alternatives.
- Warranty Compliance: Using OEM parts preserves equipment service agreements with Lam Research / Novellus.
Typical Applications
- Physical Vapor Deposition (PVD) of metal thin films (Al, Ti, TiN, Cu, etc.)
- Semiconductor front-end-of-line (FEOL) metallization processes
- 200mm wafer fabrication lines using Novellus PVD300 platforms
- R&D and pilot production fabs requiring high-purity deposition environments
- Scheduled preventive maintenance (PM) kit replacements
System Compatibility
- Primary Platform: Novellus PVD300 (all chamber configurations)
- Manufacturer Lineage: Novellus Systems → Lam Research (post-2012 acquisition)
- Wafer Size: 200mm
- Chamber Type: Single-wafer PVD deposition chamber
- Compatibility with adjacent Novellus platforms should be verified against chamber drawings. Contact Konmask for cross-platform fitment advice.
Selection Guide
Use the following criteria to select the correct shield barrel for your application:
- Step 1 — Confirm Platform: Verify your tool is a Novellus PVD300. Check the tool ID plate or process module documentation.
- Step 2 — Match Part Number: Use P/N 17-260362-00 as the primary reference. Cross-check with 810-019566-705 or 25160112 if sourcing from alternate suppliers.
- Step 3 — Assess Condition Requirements: New OEM for critical process chambers; refurbished for non-critical or backup tools.
- Step 4 — Evaluate Lead Time vs. Cost: New OEM parts have longer lead times; refurbished units are typically available for faster delivery.
- Step 5 — Request Certification Docs: For ISO-certified fabs, request material certs and dimensional inspection reports from your supplier.
Quality Assurance & Sourcing
- All parts sourced through Konmask.com undergo visual inspection and cross-reference verification before shipment.
- Refurbished units are cleaned, measured, and certified to OEM dimensional specifications.
- Traceability documentation available upon request (COC, material certs, inspection reports).
- Secure packaging for vacuum-sensitive components — ESD-safe and cleanroom-compatible where applicable.
- Global shipping with export compliance support for semiconductor equipment components.
How to Order
- Online: Add to cart directly from this page. Specify required condition (New / Refurbished / Used Tested) in order notes.
- Email: Send your BOM or part number list to [email protected] for a quote.
- Phone/WhatsApp: +0086 19859288691 — speak directly with our parts specialists.
- Bulk / Contract Orders: Volume pricing available for fab PM programs and MRO contracts.
Replacement & Compatibility FAQ
Q: Is 810-019566-705 the same as 17-260362-00?
A: Yes. 810-019566-705 is a Novellus internal cross-reference for the same Shield Barrel assembly (17-260362-00). Both numbers refer to the identical part.
Q: Can I use a refurbished shield barrel in a production chamber?
A: Refurbished units that meet OEM dimensional and cleanliness specs are widely used in production. We recommend requesting an inspection report and confirming with your process engineer.
Q: Does this part fit Lam Research tools?
A: This part is specific to the Novellus PVD300 platform. While Lam Research acquired Novellus, chamber hardware is not interchangeable across different tool families. Contact us to verify fitment.
Q: What is the typical lead time?
A: Refurbished and used units are typically available within 1–5 business days. New OEM parts may require 4–12 weeks depending on availability. Contact us for current stock status.
Q: Do you offer a warranty?
A: Yes. Refurbished parts carry a 90-day functional warranty. New OEM parts follow the manufacturer’s standard warranty terms.
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