NOVELLUS 16-167627-00 Process Filter | CVD System Replacement Part | Concept One / Sequel / Vector Platform
Engineering Background
Novellus Systems (now Lam Research) pioneered high-throughput chemical vapor deposition (CVD) platforms for advanced semiconductor fabs. The Concept One, Sequel, and Vector series remain widely deployed in 200 mm and 300 mm wafer fabs globally. Maintaining process integrity in these systems depends critically on reliable filtration of process gases and exhaust streams — a role fulfilled by the NOVELLUS 16-167627-00 Process Filter.
Product Positioning
This filter is a direct OEM-equivalent replacement component sourced from qualified supply chains. It is stocked and distributed by Konmask.com to support procurement engineers and fab maintenance teams requiring fast, traceable access to critical CVD consumables. Cross-reference part numbers: 8122-410-05002 / 4022.470.78191 / 8122-410-55702 / 16-273491-00.
Complete Technical Specifications
- Primary Part Number: 16-167627-00
- Cross-Reference P/N: 8122-410-05002 | 4022.470.78191 | 8122-410-55702 | 16-273491-00
- Component Type: Process Filter
- OEM Brand: NOVELLUS Systems (Lam Research)
- Compatible Platforms: Novellus Concept One, Sequel, Vector CVD Systems
- Application: Process gas / exhaust filtration in CVD chambers
- Weight: 1,450 g (net)
- Country of Origin: United States
- Condition: New / Refurbished (specify at inquiry)
Proven Application Environments
- 200 mm & 300 mm semiconductor wafer fabrication facilities
- CVD dielectric deposition processes (TEOS, PECVD oxide, nitride)
- High-volume production fabs requiring scheduled PM (preventive maintenance) cycles
- Research & development labs operating Novellus legacy platforms
- Refurbishment and tool reconditioning operations
Engineering Advantages
- OEM-grade compatibility: Dimensionally and materially equivalent to original Novellus specification
- Multi-P/N traceability: Covers five cross-reference part numbers under a single SKU for simplified procurement
- Reduced downtime risk: In-stock availability minimizes unplanned tool downtime
- Qualified supply chain: Sourced through vetted industrial channels with documentation support
- Global logistics: Export-ready with HS code classification and customs documentation available
System Architecture & Signal Flow
In Novellus CVD systems, process filters are positioned within the gas delivery manifold or exhaust foreline to prevent particulate contamination from entering sensitive chamber components or vacuum pumps. The 16-167627-00 filter maintains differential pressure within design tolerances, protecting downstream components including throttle valves, turbo pumps, and abatement systems. Replacement at scheduled PM intervals (typically every 250–500 RF hours or per fab SOP) is critical to sustaining process yield and equipment uptime.
Sourcing & Quality Verification
- All parts are inspected prior to shipment for dimensional conformance and packaging integrity
- Certificate of Conformance (CoC) available upon request
- Traceability documentation (lot records, supplier CoC) available for qualified buyers
- Anti-counterfeit verification: parts sourced exclusively from authorized industrial distributors and OEM surplus channels
- Export compliance: ECCN classification and export license assessment available on request
Procurement Process
- Confirm part number match against your BOM or PM kit list (cross-reference: 8122-410-05002 / 4022.470.78191 / 8122-410-55702 / 16-273491-00)
- Submit RFQ via [email protected] or place order directly online
- Receive order confirmation with lead time and shipping estimate within 1 business day
- Parts shipped with commercial invoice, packing list, and CoC (if requested)
- Post-delivery technical support available for installation verification
Technical FAQ
Q: Is this an OEM part or aftermarket?
A: We supply both OEM surplus and qualified OEM-equivalent parts. Please specify your requirement at inquiry and we will confirm availability and documentation.
Q: What is the lead time?
A: In-stock orders typically ship within 1–3 business days. Lead time for non-stock items is quoted individually.
Q: Can you provide a CoC or material certification?
A: Yes. Certificate of Conformance is available upon request for qualified procurement orders.
Q: Is this compatible with the Novellus Vector Express platform?
A: Compatibility depends on your specific tool configuration. Please share your tool serial number or BOM reference and our engineering team will confirm fitment.
Q: Do you accept purchase orders (PO)?
A: Yes. We accept PO from qualified companies. Contact us to establish terms.
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