Swagelok SS-SCF3-VR4-P-600 – UHP Inline Gas Filter | Male VCR Fitting | VAR Platform
Engineering Background
The Swagelok SS-SCF3-VR4-P-600 is a stainless steel ultra-high-purity (UHP) inline gas filter engineered for semiconductor fabrication, specialty gas distribution, and precision analytical systems. It is designed to remove particulate contamination from high-purity gas streams while maintaining system integrity under demanding pressure and temperature conditions.
Product Positioning
This filter is a direct-fit solution for OEM and MRO procurement in cleanroom gas panels, gas cabinet assemblies, and point-of-use purification systems. Cross-reference part numbers include R750B11TCD2GS, 750B11TCD2GG, and 0100-20358, making it a verified replacement for Applied Materials, Lam Research, and equivalent OEM gas delivery platforms.
Complete Technical Specifications
- Manufacturer: Swagelok Company
- Part Number: SS-SCF3-VR4-P-600
- Cross-Reference: R750B11TCD2GS | 750B11TCD2GG | 0100-20358
- Series / Platform: VAR – UHP Inline Gas Filter Series
- Body Material: 316L Stainless Steel (electropolished)
- End Connections: Male VCR® Face Seal Fitting, 1/4 in.
- Filter Element: Sintered stainless steel, 600 nm absolute rating
- Maximum Allowable Working Pressure (MAWP): 3000 psig (206 bar)
- Operating Temperature Range: –65°F to +450°F (–54°C to +232°C)
- Cv Flow Coefficient: Refer to Swagelok SCF Series datasheet
- Leak Integrity: Helium leak tested to 1×10⁻⁹ std cm³/s
- Surface Finish (internal): Ra ≤ 5 µin (0.125 µm) electropolished
- Weight: Approx. 20 g
- Compliance: SEMI F57, SEMI S2 compatible
Proven Application Environments
- Semiconductor CVD / ALD / Etch gas delivery panels
- Gas cabinet and VMB (Valve Manifold Box) assemblies
- Specialty gas distribution in ISO Class 1–5 cleanrooms
- Analytical instrumentation (GC, mass spectrometry) carrier gas lines
- Hydrogen, nitrogen, argon, oxygen, and corrosive specialty gas service
- OEM replacement for Applied Materials, Lam Research, TEL gas systems
Engineering Advantages
- 600 nm absolute filtration – removes sub-micron particles that cause process defects and yield loss
- Electropolished 316L SS body – minimizes outgassing, moisture adsorption, and particle shedding
- Male VCR® connection – leak-tight metal-to-metal seal; no elastomers in the gas path
- High-pressure rated to 3000 psig – suitable for high-delivery-pressure gas systems
- Compact inline form factor – direct drop-in for existing SCF3 / VR4 port configurations
- Helium leak tested – each unit factory-verified for UHP-grade leak integrity
System Architecture & Signal Flow
In a typical UHP gas delivery system, the SS-SCF3-VR4-P-600 is installed downstream of the gas source regulator and upstream of the mass flow controller (MFC) or point-of-use valve. The male VCR® fittings connect directly to female VCR® gland nuts on adjacent components, forming a continuous all-metal sealed gas path. The 600 nm sintered element captures particulate generated by upstream regulators, valves, and tubing joints before the gas stream reaches process-critical equipment.
Sourcing & Quality Verification
- All units sourced from authorized Swagelok distributors or verified OEM surplus channels
- Each unit inspected for physical integrity, fitting condition, and filter element completeness
- Cross-reference verification performed against Swagelok SCF Series catalog and OEM BOM data
- Traceability documentation available upon request for regulated procurement environments
- Konmask.com maintains quality records in compliance with ISO 9001 procurement standards
Procurement Process
- Step 1: Confirm part number SS-SCF3-VR4-P-600 or cross-reference (R750B11TCD2GS / 750B11TCD2GG / 0100-20358) against your BOM
- Step 2: Submit RFQ via Konmask.com product page or email support@konmask.com with quantity and delivery requirements
- Step 3: Receive quotation with lead time, unit price, and shipping options (DHL / FedEx / sea freight)
- Step 4: Confirm purchase order; payment via T/T, PayPal, or credit card accepted
- Step 5: Shipment with commercial invoice, packing list, and optional CoC documentation
Technical FAQ
Q: Is this filter compatible with corrosive gases such as HCl, HF, or Cl₂?
A: The 316L SS body and sintered SS element provide good resistance to many corrosive gases. Consult Swagelok’s chemical compatibility guide and your process safety team before use in aggressive corrosive service.
Q: What is the replacement interval for the filter element?
A: The SCF3 series uses a non-replaceable sintered element. The entire filter assembly is replaced when differential pressure exceeds acceptable limits or per your preventive maintenance schedule.
Q: Can this unit be cleaned and reused?
A: Swagelok does not recommend field cleaning of UHP filter elements. Replacement with a new unit is the standard practice to maintain UHP cleanliness levels.
Q: What torque specification applies to the VCR® connections?
A: Follow Swagelok VCR® fitting installation instructions. Typical initial make-up is 1/8 turn past finger-tight for new gaskets. Refer to MS-01-15 for full torque guidance.
Q: Do you provide a Certificate of Conformance (CoC)?
A: Yes. CoC documentation is available upon request for qualified procurement orders. Contact support@konmask.com to arrange.
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