Semiconductor Process Automation Solution – CELERITY 1/4VCR DB9-T FC-2900 | CKD AVB41V-X0004 | PCM-3362N-S6A1E
This multi-component automation kit integrates a CELERITY mass flow controller (MFC), CKD pneumatic valve, and a PC/104+ single-board computer into a verified IFLOW-compatible assembly. Engineered for semiconductor fab environments, CVD/PVD chambers, and precision gas delivery systems where signal integrity and process repeatability are non-negotiable.
Where This Product Is Used
- Semiconductor Fabrication (CVD / PVD / Etch): The CELERITY 1/4VCR DB9-T MFC with FC-2900 electronics controls process gas flow rates in deposition and etch chambers with ±1% FS accuracy.
- Gas Panel & Gas Box Integration: CKD AVB41V-X0004 pneumatic valve provides fast-acting, leak-tight shutoff on 1/4″ VCR gas lines — standard in OEM gas delivery manifolds.
- Embedded Process Control (PC/104+): PCM-3362N-S6A1E SBC (Intel Atom N450, VGA, LVDS, LAN) serves as the local controller node in rack-mounted or panel-embedded automation systems.
- Legacy Tool Retrofit & Spare Parts: Ideal for maintaining Applied Materials, Lam Research, TEL, and Novellus process tools requiring verified OEM-equivalent components.
- Industrial Gas Chromatography & Analytical Instruments: Precision flow control for carrier and calibration gas streams.
Technical Specifications
- MFC Model: CELERITY 1/4VCR DB9-T (FC-2900 electronics platform)
- MFC Interface: DB9 analog/digital, IFLOW protocol compatible
- Fitting Type: 1/4″ VCR face-seal (male), stainless steel body
- Valve Model: CKD AVB41V-X0004 — pneumatic actuated, normally closed
- Valve Port: Compatible with 1/4″ VCR gas line assemblies
- SBC Model: Advantech PCM-3362N-S6A1E
- SBC CPU: Intel Atom N450 (1.66 GHz, single-core)
- SBC Display: VGA + LVDS dual-display output
- SBC Network: Gigabit LAN (Intel 82567V)
- SBC Form Factor: PC/104+ (EPIC compatible)
- Part Reference: 1D80-004537-11
- Weight: ~360 g (kit, unpackaged)
- Country of Origin: Japan
Why Engineers Specify This Model
- IFLOW Ecosystem Compatibility: FC-2900 / DB9-T combination is a proven IFLOW-bus MFC — drop-in replacement for existing IFLOW gas panel wiring without re-engineering.
- VCR Leak Integrity: 1/4″ VCR face-seal fittings deliver <1×10⁻⁹ atm·cc/sec He leak rate — critical for ultra-high-purity (UHP) process gas lines.
- Embedded Reliability: PCM-3362N-S6A1E is a fanless, low-power SBC designed for 24/7 industrial operation with extended temperature tolerance.
- Single-Source BOM Consolidation: Sourcing all three components together reduces procurement lead time and ensures cross-component compatibility verification.
- OEM Tool Maintenance: Exact part numbers match OEM BOM references for Applied Materials Centura, Endura, and similar platforms.
Complete System Bill of Materials
- CELERITY 1/4VCR DB9-T Mass Flow Controller (FC-2900 electronics) — Qty: 1
- CKD AVB41V-X0004 Pneumatic Shutoff Valve — Qty: 1
- Advantech PCM-3362N-S6A1E PC/104+ SBC (Intel Atom N450) — Qty: 1
- Reference Assembly P/N: 1D80-004537-11
Note: Cables, fittings, and mounting hardware are not included unless explicitly stated. Contact us to confirm full kit configuration.
Compliance & Industry Standards
- VCR fittings conform to SEMI F20 UHP gas distribution standards
- MFC calibration traceable to NIST flow standards
- PC/104+ bus compliant with PC/104 Consortium specification Rev. 2.6
- RoHS compliant components (verify per individual datasheet)
- CE marking applicable to SBC module (PCM-3362N-S6A1E)
Quality Assurance & Sourcing
- All components sourced from verified industrial distributors and OEM surplus channels
- Each unit inspected for physical integrity, connector condition, and label authenticity prior to listing
- Functional test records available upon request for MFC and SBC units
- Konmask.com specializes in hard-to-find automation components for semiconductor and process industries — backed by a dedicated technical sourcing team
How to Source This Part
This kit is available for immediate inquiry. Lead time and pricing depend on current stock and configuration requirements.
- 📧 Email: [email protected]
- 📞 Phone/WhatsApp: +0086 19859288691
- 🌐 Website: https://konmask.com
- Request a quote with your target quantity, required certifications, and delivery timeline
Application-Specific FAQ
Q: Is the CELERITY FC-2900 compatible with my existing IFLOW gas panel?
A: Yes — the DB9-T connector and FC-2900 electronics are designed for IFLOW bus integration. Verify your gas species and full-scale flow range before ordering.
Q: Can the CKD AVB41V-X0004 valve be used with corrosive gases?
A: The AVB41V series uses stainless steel wetted surfaces. Compatibility with specific corrosive gases (e.g., Cl₂, HBr) should be confirmed with the CKD datasheet and your process engineer.
Q: What OS does the PCM-3362N-S6A1E support?
A: The Advantech PCM-3362N supports Windows XP/7/Embedded and Linux. Drivers are available from Advantech’s official support portal.
Q: Do you offer calibration services for the MFC?
A: We can arrange third-party NIST-traceable calibration. Contact us with your gas species and flow range requirements.
Q: What is the typical lead time?
A: In-stock items ship within 3–5 business days. Custom configurations or low-volume surplus sourcing typically require 2–4 weeks.
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