Semiconductor Process Control Solution – Tokyo Electron TVB3001-1/STI 3281-000035-19 | HPM Series
Where This Product Is Used
The Tokyo Electron (TEL) TVB3001-1/STI PCB Assembly (P/N: 3281-000035-19 / 1D86-006761-41 / HPM5F4F4F6S468) is a critical control board deployed inside TEL’s High-Performance Module (HPM) platforms. Engineers and process technicians encounter this assembly in the following environments:
- Dry Etch Systems – TEL Tactras, Sycamore, and Vigus etch chambers requiring precise RF and gas-flow control logic
- CVD / ALD Reactors – Thermal and plasma-enhanced deposition tools where HPM boards govern temperature and pressure feedback loops
- Wafer Cleaning Equipment – TEL CLEAN TRACK and related wet-process modules using HPM-series control architecture
- 300 mm Fab Environments – High-volume production fabs running 24/7 where unplanned downtime is measured in tens of thousands of dollars per hour
- R&D / Pilot Lines – Advanced node development labs (sub-7 nm) requiring exact OEM-matched replacement boards to maintain process repeatability
Technical Specifications
| Manufacturer | Tokyo Electron Limited (TEL) |
| Part Number (Primary) | TVB3001-1 / STI |
| Cross-Reference P/N | 3281-000035-19 | 1D86-006761-41 |
| Module Code | HPM5F4F4F6S468 |
| Assembly Type | PCB Assembly (ASSY) |
| HS Code | 8537.10 |
| Country of Origin | Japan |
| Weight | 2,600 g (approx.) |
| Condition | New / Refurbished / Tested — specify at inquiry |
| Compatibility | TEL HPM-series process modules (confirm with serial number) |
Why Engineers Specify This Model
- OEM-Matched Logic – Firmware and hardware are factory-configured for TEL HPM architecture; no re-parameterization required after swap-out
- Process Repeatability – Maintains etch rate uniformity and deposition thickness targets critical for advanced node yields
- Rapid Recovery – Board-level replacement restores tool availability faster than component-level repair, minimizing mean time to repair (MTTR)
- Multi-P/N Traceability – Three cross-reference part numbers (TVB3001-1, 3281-000035-19, 1D86-006761-41) ensure procurement teams can match against any TEL BOM revision
- Proven in High-Volume Fabs – Sourced from decommissioned or surplus TEL tool sets with documented operational history
Complete System Bill of Materials
This PCB assembly is typically ordered alongside the following TEL HPM-series components to complete a module-level restoration:
- HPM Power Supply Unit (PSU) – TEL series-matched
- RF Match Network Board
- Gas Flow Controller (GFC) Interface Card
- Temperature Sensor Interface PCB
- Backplane / Motherboard Connector Assembly
- Ribbon Cable Harness Set (HPM internal)
Contact [email protected] for a complete BOM quote.
Compliance & Industry Standards
- HS Classification: 8537.10 – Boards, panels, consoles for electric control (≤1,000 V)
- RoHS compliance status: confirm with lot documentation at time of order
- ESD-safe packaging and handling per JEDEC JESD625 guidelines
- Export classification: verify ECCN / EAR99 status prior to cross-border shipment
Quality Assurance & Sourcing
Konmask.com specializes in industrial automation and semiconductor equipment spare parts. Every PCB assembly we supply undergoes:
- Visual Inspection – Component-level check for burn marks, cracked solder joints, and physical damage
- Functional Verification – Bench-level power-on test where applicable
- Traceability Documentation – Original TEL part labels, serial numbers, and revision markings preserved
- ESD-Safe Packaging – Anti-static bags, foam inserts, and double-wall carton for international freight
How to Source This Part
- Submit your inquiry via [email protected] with your tool serial number and required delivery date
- Receive a formal quotation within 1 business day including lead time and condition options
- Confirm purchase order — we accept T/T wire transfer, PayPal, and trade-term arrangements (EXW / CIF)
- Parts ship from our warehouse with full tracking; express air freight available for AOG (Aircraft on Ground / fab emergency) situations
Application-Specific FAQ
Q: Is this board compatible with all TEL HPM module revisions?
A: Compatibility depends on your specific tool generation and firmware version. Provide your tool model and serial number for confirmation before ordering.
Q: Can you supply a tested/refurbished unit instead of new?
A: Yes. We offer new, refurbished-tested, and as-removed conditions. Pricing and lead time vary — contact us for options.
Q: Do you provide a warranty?
A: Standard 90-day warranty on functional boards. Extended warranty available upon request.
Q: What is the typical lead time?
A: In-stock units ship within 2–5 business days. Sourced units typically require 2–4 weeks depending on global availability.
Q: Can this part be exported internationally?
A: Yes, subject to applicable export regulations. Buyers are responsible for verifying import/export compliance in their jurisdiction.
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Contact: [email protected] | +0086 19859288691
