Semiconductor Vacuum Viewport Solution – VARIAN E17136671 | CMP50M Series
Where This Product Is Used
The VARIAN E17136671 / E17268910 / E17268700 Viewport Assembly (PSKF121, CMP50M/BP/KY/RH1M/SB1) is a precision optical access component engineered for ultra-high vacuum (UHV) environments in semiconductor fabrication and scientific instrumentation. Typical deployment scenarios include:
- Ion Implantation Systems – Provides optical access for beam alignment and process monitoring inside implant chambers operating at pressures below 10⁻⁷ Torr.
- Chemical Mechanical Planarization (CMP) Equipment – Integrated into CMP50M-series process modules for in-situ endpoint detection and laser interferometry.
- Physical Vapor Deposition (PVD) / Sputtering Chambers – Enables real-time plasma monitoring and optical emission spectroscopy (OES) without breaking vacuum integrity.
- Electron Beam & Ion Beam Systems – Used as a diagnostic viewport for beam characterization in research accelerators and FIB/SEM dual-beam platforms.
- Vacuum Metrology & Leak Detection – Supports RGA (Residual Gas Analyzer) optical coupling and UV/IR transmission diagnostics.
Technical Specifications
| Parameter | Value |
|---|---|
| OEM Part Numbers | E17136671 / E17268910 / E17268700 |
| Assembly Reference | PSKF121 |
| Platform Compatibility | CMP50M / BP / KY / RH1M / SB1 |
| Component Type | Viewport Assembly (VIEWPORT ASSY) |
| Manufacturer | VARIAN (Applied Vacuum / Agilent Heritage) |
| Application Environment | Ultra-High Vacuum (UHV), semiconductor process chambers |
| Weight | 2,600 g (approx.) |
| Condition | New / Refurbished OEM — specify at inquiry |
Why Engineers Specify This Model
- OEM-Matched Geometry – Direct form-fit-function replacement for VARIAN CMP50M-series chambers; no custom flanging or adapter plates required.
- UHV-Grade Sealing – Metal-sealed or ConFlat-compatible flange design maintains system base pressure without outgassing penalties.
- Broadband Optical Transmission – Viewport glass selected for UV-to-NIR transparency, supporting OES, laser interferometry, and pyrometry simultaneously.
- Multi-Platform Cross-Reference – Single SKU covers BP, KY, RH1M, and SB1 sub-configurations, simplifying spare-parts inventory management.
- Proven Field Reliability – Sourced from VARIAN’s qualified supply chain; traceable lot documentation available on request.
Complete System Bill of Materials
When specifying this viewport assembly, engineers typically also require the following complementary components:
- ConFlat / ISO-KF flange gaskets (Cu or Al, matched to chamber port size)
- Viewport shutter or protective cover (anti-deposition shield)
- Optical fiber coupling adapter or collimating lens mount
- Bakeout heater tape (for UHV conditioning cycles)
- Torque-controlled fastener set (per VARIAN chamber torque spec)
Contact Konmask for bundled BOM sourcing and consolidated shipping.
Compliance & Industry Standards
- Designed to SEMI S2 / S8 equipment safety guidelines
- Compatible with SEMI F47 voltage sag immunity requirements (system-level)
- RoHS-compliant materials where applicable
- Traceable to VARIAN OEM manufacturing standards (Applied Materials / Agilent heritage)
Quality Assurance & Sourcing
Konmask.com sources VARIAN vacuum components through verified industrial channels. Each unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Part number cross-verification (E17136671 / E17268910 / E17268700)
- Packaging in ESD-safe, cleanroom-compatible materials
- Optional helium leak-test certification (on request)
Lot traceability and certificate of conformance (CoC) available for qualified buyers.
How to Source This Part
- Submit an RFQ – Email support@konmask.com with your required quantity, delivery timeline, and destination country.
- Receive a Quote – Our team responds within 1 business day with pricing, lead time, and shipping options (DHL / FedEx / sea freight).
- Place Order & Confirm – Secure payment via T/T, PayPal, or trade assurance. Export documentation (commercial invoice, packing list, CO) included.
- Track Shipment – Real-time tracking provided from our warehouse in China to your facility worldwide.
Application-Specific FAQ
Q: Is E17136671 interchangeable with E17268910 and E17268700?
A: Yes — these part numbers represent revision iterations of the same viewport assembly. All three are functionally interchangeable within CMP50M/BP/KY/RH1M/SB1 platforms. Confirm your chamber revision with your OEM service manual before installation.
Q: What is the maximum bakeout temperature for this viewport?
A: Standard VARIAN UHV viewports support bakeout up to 150–200 °C. Consult the specific lot datasheet provided with your unit for confirmed thermal limits.
Q: Can this viewport be used in corrosive process gas environments?
A: The assembly is designed for inert and mildly reactive gas environments. For aggressive halogen-based chemistries (e.g., Cl₂, HBr), consult Konmask for material compatibility review.
Q: Do you offer expedited shipping for fab-down situations?
A: Yes. Contact us at +0086 19859288691 for emergency sourcing and next-flight-out freight options.
Q: Is a warranty provided?
A: All parts carry a 90-day warranty against manufacturing defects. Extended warranty and exchange programs available for volume buyers.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
