Semiconductor Etch & CVD Equipment Solution — APPLIED MATERIALS HOUSING EEP | F-MASTER3 / TTLI29-11 Series
The APPLIED MATERIALS HOUSING EEP (Part Numbers: 0040-47632 / 0010-10663 / 810-495659-400) is a precision structural enclosure component engineered for use in Applied Materials’ advanced semiconductor process equipment platforms, including the F-MASTER3 and TTLI29-11 module assemblies. Cross-reference part numbers: 3880-200181-11.
Where This Product Is Used
This housing component is specified for integration into Applied Materials process chambers and module sub-assemblies deployed across high-volume semiconductor fabs worldwide. Typical installation environments include:
- CVD (Chemical Vapor Deposition) systems — thin-film deposition chambers requiring hermetic structural integrity
- Plasma Etch systems — reactive ion etch (RIE) and dielectric etch platforms where dimensional stability under thermal cycling is critical
- PVD (Physical Vapor Deposition) module frames — used in metal deposition process modules
- CMP ancillary assemblies — structural housing for slurry and rinse module sub-systems
- 300mm wafer fab environments — compatible with SEMI S2/S8 safety-compliant tool architectures
End-use facilities include logic foundries, DRAM/NAND memory fabs, and advanced packaging lines operating at 28nm to sub-3nm nodes.
Technical Specifications
| Attribute | Detail |
|---|---|
| OEM Brand | APPLIED MATERIALS (AMAT) |
| Part Description | HOUSING EEP |
| Primary Part Number | 0040-47632 |
| Cross-Reference P/N 1 | 0010-10663 |
| Cross-Reference P/N 2 | 810-495659-400 |
| Cross-Reference P/N 3 | 3880-200181-11 |
| Module / Series | F-MASTER3 | TTLI29-11 |
| Component Category | Structural Housing / Enclosure Assembly |
| Weight | 2.6 kg (approx.) |
| Material Class | Precision-machined alloy / anodized aluminum (OEM spec) |
| Condition | New OEM / Refurbished Available — contact for stock status |
| Compatibility | Applied Materials F-MASTER3, TTLI29-11 platform assemblies |
Why Engineers Specify This Model
- OEM-matched dimensional tolerances — ensures drop-in replacement without re-qualification of the process chamber
- Thermal stability — housing geometry maintains alignment under repeated thermal cycling inherent to CVD/etch processes
- Multi-P/N cross-reference coverage — one part resolves four procurement part numbers, simplifying BOM consolidation
- Reduced downtime risk — stocked and ready to ship, minimizing fab tool downtime versus lead times from OEM channels
- Traceable sourcing — each unit is inspected and documented prior to dispatch
Complete System Bill of Materials
This housing is typically installed alongside the following Applied Materials components. Contact Konmask for availability on complete BOM kits:
- Chamber lid assembly / top plate
- EEP (Electrostatic End Point) sensor module
- RF match network bracket / mounting hardware
- Gas distribution manifold sub-assembly
- Process kit (focus ring, edge ring, liner)
- Vacuum seal / O-ring kit (OEM-spec elastomers)
Compliance & Industry Standards
- SEMI S2 — Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI S8 — Ergonomic guidelines for equipment design
- RoHS compliant materials where applicable
- Compatible with SEMI E10 equipment reliability and maintenance reporting frameworks
Quality Assurance & Sourcing
Konmask.com sources Applied Materials spare parts through verified industrial supply channels. Every unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Part number verification and cross-reference validation
- Secure anti-static packaging for electrostatic-sensitive assemblies
- Documentation package available upon request (inspection report, CoC)
We maintain inventory of both new OEM and certified refurbished units to support varying fab budget requirements.
How to Source This Part
- Submit an RFQ — email [email protected] with your required quantity and delivery timeline
- Confirm stock & lead time — our team responds within 1 business day with availability and pricing
- Place order — purchase order, wire transfer, or online checkout accepted
- Shipping — global export from China; DHL / FedEx / freight forwarding options available
- Receive & install — parts shipped with inspection documentation; drop-in OEM replacement
Application-Specific FAQ
Q: Is this a genuine Applied Materials OEM part?
A: Yes. We source from verified industrial channels. Certificates of conformance are available upon request.
Q: Which AMAT tool platforms use this housing?
A: This part is associated with the F-MASTER3 and TTLI29-11 module assemblies. Please confirm your tool serial number with our team for exact fitment verification.
Q: Can you supply the full BOM for a chamber rebuild?
A: Yes. Contact us with your tool model and we will prepare a complete BOM quotation.
Q: What is the lead time if not in stock?
A: Typical lead time for sourced OEM parts is 2–6 weeks depending on global availability. Expedited sourcing available.
Q: Do you ship internationally?
A: Yes. We export globally from China with full customs documentation support.
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