Applied Materials 0041-56777 – RF Faceplate 23mil Centerhole | Endura / Centura Platform
Engineering Background: The RF faceplate is a precision-machined dielectric component installed at the process chamber interface in Applied Materials PVD and CVD systems. Its 23-mil centerhole geometry and RF-transparent cap design are critical for maintaining uniform plasma distribution and process repeatability across wafer surfaces.
Product Positioning: This part (P/N 0041-56777, cross-reference FCSP7302DW2-T5-4CC2-F30E/HF-H3D12, drawing 02-298156-00) is a direct OEM-equivalent replacement sourced through verified AMAT supply channels. It is suited for fabs running 200mm and 300mm wafer processes requiring tight dimensional tolerances and RF integrity.
Complete Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0041-56777
- Cross Reference: FCSP7302DW2-T5-4CC2-F30E/HF-H3D12
- Drawing Number: 02-298156-00
- Description: Faceplate, 23mil Centerhole, RF Cap
- Centerhole Diameter: 23 mil (0.584 mm)
- Component Type: RF Faceplate / Showerhead Cap
- Weight: ~800 g
- Compatibility Platform: Applied Materials Endura / Centura PVD/CVD Systems
- Material: High-purity dielectric / anodized aluminum (OEM spec)
- Condition: New / Refurbished OEM-equivalent (specify on inquiry)
Proven Application Environments
- PVD (Physical Vapor Deposition) process chambers – barrier metal and seed layer deposition
- CVD (Chemical Vapor Deposition) chambers requiring RF-coupled plasma excitation
- 200mm and 300mm wafer fabs with AMAT Endura or Centura tool sets
- Preventive maintenance (PM) cycles requiring faceplate replacement to restore process baseline
- Yield recovery programs targeting plasma uniformity degradation
Engineering Advantages
- Precision 23mil Centerhole: Maintains gas flow uniformity and plasma symmetry critical for within-wafer uniformity (WIW)
- RF Cap Design: Ensures RF energy coupling integrity, minimizing parasitic losses at the chamber interface
- OEM-Equivalent Geometry: Drop-in replacement with no tooling or process recipe adjustment required
- Verified Dimensional Compliance: Each unit inspected against AMAT drawing 02-298156-00 tolerances
- Reduced Downtime: In-stock availability supports rapid PM turnaround vs. OEM lead times of 8–16 weeks
System Architecture & Signal Flow
In AMAT PVD/CVD systems, the RF faceplate sits between the gas distribution manifold and the process chamber volume. RF power from the generator is coupled through the faceplate cap to sustain the plasma. The 23mil centerhole array controls precursor gas injection velocity and distribution. Degradation of the faceplate (erosion, deposition buildup, or dimensional drift) directly impacts deposition rate uniformity, step coverage, and film stress — making timely replacement essential to process control.
Sourcing & Quality Verification
- Sourced from authorized AMAT distribution networks and certified secondary market suppliers
- Each unit accompanied by traceable documentation (lot number, inspection record)
- Visual and dimensional inspection performed prior to shipment
- Packaging: ESD-safe, anti-static foam, double-boxed for international freight
- Export compliance: ECCN classification reviewed; HTS code available on request
Procurement Process
- Submit inquiry with your tool ID, chamber configuration, and required quantity
- Receive quotation with lead time, condition disclosure, and documentation package
- Confirm purchase order — payment via T/T, PayPal, or trade terms (MOQ: 1 pc)
- Shipment via DHL / FedEx / UPS with full tracking; customs documentation provided
- Post-delivery technical support available via email or WhatsApp
Technical FAQ
Q: Is this part compatible with both Endura and Centura platforms?
A: Compatibility depends on the specific chamber module. Please provide your tool configuration (e.g., Endura HP, Centura XT) for confirmation before ordering.
Q: What is the typical replacement interval?
A: AMAT recommends faceplate inspection every 250–500 RF hours depending on process chemistry. Replacement is triggered by centerhole erosion exceeding ±10% of nominal diameter or visible deposition bridging.
Q: Can you provide a Certificate of Conformance (CoC)?
A: Yes. CoC and inspection reports are available upon request for all units shipped from Konmask.
Q: Do you offer volume pricing?
A: Yes. Contact us for tiered pricing on orders of 3+ units or annual blanket PO arrangements.
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