Applied Materials 0050-10076 – Weldment Dual HE Manifold for SACVD Liquid Process | CA140-3 RF Generator Platform
Applied Materials’ SACVD (Sub-Atmospheric Chemical Vapor Deposition) process platform demands precision fluid and gas delivery components engineered to withstand aggressive chemical environments and sub-atmospheric pressure differentials. The 0050-10076 Weldment Dual HE Manifold is a critical process-wetted assembly designed for helium-based heat transfer and liquid precursor distribution within the SACVD chamber architecture.
This manifold assembly — cross-referenced as 17107270 and paired with the CA140-3 RF Generator via a 12FT (03-00125-FT12/F) RF cable — is a verified OEM-specification replacement sourced through Konmask.com’s certified industrial surplus network. It is positioned for procurement engineers requiring drop-in compatibility with Applied Materials SACVD tool sets without extended lead times.
Complete Technical Specifications
- OEM Part Number: 0050-10076
- Cross-Reference / Alternate PN: 17107270
- Assembly Type: Weldment Dual HE (Helium) Manifold
- Process Application: SACVD Liquid (Sub-Atmospheric CVD)
- Associated RF Generator: CA140-3
- RF Cable Assembly: 03-00125-FT12/F (12 Foot)
- Manufacturer: Applied Materials (AMAT)
- Country of Origin: United States
- Weight: ~4.1 kg
- HS Code: 848659 (Parts for semiconductor manufacturing equipment)
- Condition: Verified Surplus / Refurbished-to-Spec
Proven Application Environments
- Applied Materials SACVD deposition chambers (TEOS/O₃ and SiH₄-based processes)
- Sub-atmospheric pressure CVD tool sets requiring dual helium manifold assemblies
- Fab environments operating CA140-3 RF generator configurations
- 300mm and 200mm wafer process lines requiring OEM-equivalent fluid delivery hardware
- Preventive maintenance (PM) cycles and unplanned downtime recovery scenarios
Engineering Advantages
- Dual-Channel HE Distribution: Simultaneous helium flow to two process zones ensures uniform wafer backside cooling and thermal stability during deposition
- Weldment Construction: All-welded stainless steel body eliminates threaded joint leak paths in aggressive SACVD chemical environments
- OEM Cross-Reference Verified: PN 17107270 confirmed as direct equivalent, reducing qualification risk for process engineers
- RF System Integration: Pre-matched to CA140-3 generator with 12FT cable assembly for plug-and-play RF circuit restoration
- Surplus Availability: Immediate ship from verified stock — bypasses 16–26 week OEM lead times typical for AMAT process components
System Architecture & Signal Flow
Within the SACVD tool architecture, the Dual HE Manifold interfaces between the helium supply line and the electrostatic chuck (ESC) or susceptor backside cooling circuit. Helium pressure is regulated upstream; the manifold splits and meters flow to dual zones, maintaining ±0.1 Torr backside pressure uniformity. The CA140-3 RF generator delivers 13.56 MHz power through the 03-00125-FT12/F coaxial cable assembly to the process electrode, with the manifold assembly mounted in the adjacent process module bay. Liquid precursor lines (TEOS or equivalent) route through separate wetted passages within the same weldment envelope, minimizing footprint and thermal gradients.
Sourcing & Quality Verification
- All units inspected against AMAT OEM dimensional and material specifications
- Weld integrity verified; no cracks, porosity, or corrosion on wetted surfaces
- RF cable assembly (03-00125-FT12/F) continuity and impedance tested prior to shipment
- Serialized traceability documentation available upon request
- Konmask.com sources exclusively from decommissioned OEM fab lines and authorized surplus channels — no gray-market or counterfeit risk
Procurement Process
- Step 1: Submit RFQ via Konmask.com product page or email [email protected] with your tool ID and site location
- Step 2: Receive stock confirmation, condition report, and pricing within 1 business day
- Step 3: Issue PO — net payment terms available for qualified accounts
- Step 4: Same-day or next-day dispatch; export documentation (commercial invoice, packing list, COO) included for cross-border shipments
- Step 5: Post-delivery technical support available via email or WhatsApp (+0086 19859288691)
Technical FAQ
Q: Is 17107270 a direct replacement for 0050-10076?
A: Yes. 17107270 is the AMAT-assigned alternate part number for the same assembly. Both numbers reference identical form, fit, and function.
Q: Does this include the CA140-3 RF generator and cable?
A: The listing covers the weldment manifold assembly. The CA140-3 generator and 03-00125-FT12/F cable are associated components — contact us to inquire about bundle availability.
Q: What is the lead time from order to delivery?
A: In-stock units ship within 1–2 business days. International delivery to Asia-Pacific typically 3–7 business days via DHL/FedEx express.
Q: Can you provide a certificate of conformance?
A: Yes. Inspection reports and traceability documentation are available for all units upon request at time of order.
Q: Is this compatible with 200mm tools?
A: Compatibility depends on your specific tool configuration. Please provide your tool model and chamber ID when submitting your RFQ for confirmation.
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