Applied Materials 0190-35310 ASSY RTP Chamber Interface | Replacement, Equivalent & Selection Guide
The Applied Materials 0190-35310 (also referenced as 0100-35175, 61-276646-00, PK569AUHA) is an RTP (Rapid Thermal Processing) Chamber Interface Assembly designed for semiconductor wafer processing equipment. This page provides a comprehensive selection guide, compatible replacement models, and sourcing information for engineers and procurement teams.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Primary Part Number: 0190-35310
- Cross-Reference SKUs: 0100-35175 | 61-276646-00 | PK569AUHA
- Assembly Type: RTP Chamber Interface Assembly (ASSY)
- Application: Rapid Thermal Processing (RTP) semiconductor equipment
- Weight: 4.1 kg
- Country of Origin: USA
- Condition: New / Refurbished / Tested (specify at order)
Compatible Replacement & Equivalent Models
The following part numbers are known cross-references or functional equivalents for the 0190-35310 interface assembly. Always verify compatibility with your specific tool configuration before installation.
- 0100-35175 — Applied Materials internal revision reference
- 61-276646-00 — OEM sub-assembly drawing number
- PK569AUHA — Kit/package designation for bundled assembly
- Contact Konmask for additional third-party equivalent options
Why Choose the Original Model
- Guaranteed OEM-spec dimensional and electrical compatibility
- Validated for use in Applied Materials RTP platforms (Radiance, Centura RTP)
- Minimizes re-qualification time vs. aftermarket alternatives
- Full traceability documentation available upon request
- Supports fab-level change control and audit requirements
Typical Applications
- Rapid Thermal Annealing (RTA) processes
- Rapid Thermal Oxidation (RTO) in gate oxide formation
- Silicide formation and dopant activation steps
- 300 mm and 200 mm wafer processing lines
- Logic, memory, and advanced packaging fabs
System Compatibility
- Applied Materials Centura RTP platform
- Applied Materials Radiance RTP system
- Compatible chamber configurations: verify chamber revision with AMAT service documentation
- Interface with host PLC/DCS control systems via standard I/O connectors
Selection Guide
Use the following criteria to confirm the correct part for your application:
- Step 1 — Identify your tool: Confirm the Applied Materials platform model and chamber revision (A, B, C, etc.).
- Step 2 — Cross-check part numbers: Match against 0190-35310, 0100-35175, 61-276646-00, or PK569AUHA in your BOM or service manual.
- Step 3 — Verify interface type: Confirm connector pinout and signal type (analog/digital) match your chamber wiring harness.
- Step 4 — Condition selection: Choose New OEM, Certified Refurbished, or Tested Used based on budget and lead-time requirements.
- Step 5 — Contact Konmask: Our team can assist with cross-reference validation and provide datasheets or photos on request.
Quality Assurance & Sourcing
- All units inspected and tested prior to shipment
- Sourced from authorized distributors, OEM surplus, and certified refurbishers
- Packaging: anti-static ESD bag + foam-lined carton
- Certificate of Conformance (CoC) and test reports available
- Export compliance: ECCN classification available upon request
How to Order
- Add to cart directly on this page, or
- Email: support@konmask.com with your PO or RFQ
- Phone/WhatsApp: +0086 19859288691
- Provide: part number, required quantity, condition preference, and delivery timeline
- Lead time: typically 3–10 business days depending on stock and condition
Replacement & Compatibility FAQ
Q: Is 0100-35175 a direct replacement for 0190-35310?
A: Yes, 0100-35175 is an internal cross-reference for the same assembly. Confirm with your AMAT service manual for your specific tool revision.
Q: Can this interface assembly be used on non-AMAT RTP tools?
A: This assembly is designed specifically for Applied Materials RTP platforms. Adaptation to third-party tools requires engineering review.
Q: Do you offer refurbished units?
A: Yes. Refurbished units are fully tested and include a warranty. Contact us for pricing and availability.
Q: What is the lead time for a new OEM unit?
A: New OEM units typically ship within 5–10 business days. Refurbished units may ship sooner depending on stock.
Q: Can Konmask provide a Certificate of Conformance?
A: Yes, CoC and test documentation are available upon request for all units.
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Contact: support@konmask.com | +0086 19859288691
