Applied Materials 0050-41494 – Normally-Closed Pneumatic Valve Assembly | Clean Line Platform
Engineering Background: The Applied Materials 0050-41494 is a factory-original pneumatic valve assembly engineered for integration into Applied Materials’ CLEAN LINE gas-delivery and process-control circuits. Carrying cross-reference part numbers 543573 and 0021-21779, this valve is a direct OEM replacement designed to maintain process integrity in ultra-high-purity semiconductor fabrication environments.
Product Positioning: Targeting process engineers and procurement specialists responsible for CVD, PVD, and etch tool uptime, this assembly delivers the leak-tight, repeatable actuation performance required in Class 1–100 cleanroom gas-handling systems. It is a drop-in replacement that eliminates re-qualification risk associated with aftermarket alternatives.
Complete Technical Specifications
- OEM Part Number: 0050-41494
- Cross-Reference / Alternate P/N: 543573 | 0021-21779
- Valve Type: Normally Closed (N.C.) — de-energized state = closed
- Operating Pressure Range: 0.39 – 0.59 MPa (56.6 – 85.6 PSI)
- Series / Platform: CLEAN LINE
- Manufacturer: Applied Materials (AMAT)
- Actuation: Pneumatic (solenoid-piloted)
- Wetted Materials: Cleanroom-compatible alloys and elastomers (contact Konmask for full BOM)
- Weight: 2,600 g (approx.)
- Condition: New / Refurbished OEM — specify at inquiry
- Country of Origin: USA
Proven Application Environments
- Applied Materials Centura, Producer, and Endura platform process chambers
- CVD (Chemical Vapor Deposition) and ALD process gas-line isolation
- PVD (Physical Vapor Deposition) chamber vent and purge circuits
- Dry etch (ICP/CCP) gas-delivery manifold control
- Cleanroom Class 1–100 (ISO 3–5) gas-handling sub-systems
- Fab-wide preventive maintenance (PM) kits for AMAT tool fleets
Engineering Advantages
- OEM Dimensional Conformance: Direct bolt-in replacement — no adapter plates or re-piping required.
- Fail-Safe N.C. Design: Valve closes automatically on loss of pilot pressure or power, protecting process chambers from uncontrolled gas flow.
- Cleanroom-Grade Construction: Low particle-generation materials and electropolished flow paths meet SEMI F57 and SEMI E49 purity standards.
- Pressure-Optimized Actuation: Calibrated spring and diaphragm assembly ensures consistent cracking and seating across the full 0.39–0.59 MPa operating band.
- Traceable Provenance: Each unit supplied with available documentation (test reports, serialization) to support fab QA/QC records.
System Architecture & Signal Flow
In a typical CLEAN LINE circuit, the 0050-41494 sits downstream of the mass-flow controller (MFC) and upstream of the process chamber inlet. The solenoid pilot receives a 24 VDC signal from the equipment controller (EPC/PLC). On signal assertion, pilot pressure (0.39–0.59 MPa) overcomes the return spring, opening the valve and allowing process gas to flow. On signal de-assertion or pressure loss, the spring returns the valve to the normally-closed (safe) position, isolating the chamber. Cross-reference 543573 identifies the valve body sub-assembly; 0021-21779 identifies the complete actuator-valve kit as shipped.
Sourcing & Quality Verification
- Konmask.com sources AMAT spare parts through authorized distribution channels and verified secondary-market suppliers with full traceability.
- Each unit undergoes incoming inspection: visual, dimensional, and functional leak-test verification before dispatch.
- Serialization and lot documentation available upon request to support your fab’s incoming quality control (IQC) process.
- RoHS and REACH compliance documentation available for applicable units.
Procurement Process
- Step 1 — Inquiry: Submit your RFQ via [email protected] or call +86 198-5928-8691 with your tool model, chamber ID, and required quantity.
- Step 2 — Quote & Lead Time: Konmask responds within 1 business day with pricing, availability, and estimated ship date.
- Step 3 — Order Confirmation: Purchase order accepted via email; proforma invoice issued for prepayment or net terms (qualified accounts).
- Step 4 — Shipping: Packed in anti-static, cleanroom-compatible packaging; shipped via DHL / FedEx with full tracking. Export documentation (commercial invoice, packing list, COO) included.
- Step 5 — After-Sales: 90-day warranty on verified OEM units. Technical support available for installation queries.
Technical FAQ
- Q: Is 0050-41494 interchangeable with 543573 and 0021-21779?
- A: Yes. 543573 is the AMAT sub-assembly part number for the valve body, and 0021-21779 is the complete kit part number. All three reference the same physical assembly in different AMAT BOM contexts.
- Q: What pilot medium is required?
- A: Clean dry air (CDA) or nitrogen at 0.39–0.59 MPa. Avoid oil-contaminated air to preserve wetted-surface integrity.
- Q: Can this valve be used with corrosive process gases?
- A: Compatibility depends on the specific process gas. Contact Konmask with your gas species for a materials-compatibility review before ordering.
- Q: What is the typical lead time?
- A: In-stock units ship within 3–5 business days. Out-of-stock units: 2–6 weeks depending on sourcing channel. Contact us for real-time availability.
- Q: Do you offer exchange / core return programs?
- A: Yes, for select AMAT assemblies. Inquire at the time of order for core credit eligibility.
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Contact: [email protected] | +0086 19859288691
