Applied Materials 0021-21779 CZM01.3-02-07 PVD Blade | Replacement, Equivalent & Selection Guide
The Applied Materials 0021-21779 (CZM01.3-02-07) is a precision PVD (Physical Vapor Deposition) Blade used in Applied Materials semiconductor deposition systems. This page provides full technical specifications, compatible replacement part numbers (0130-35064, 0110-35064, 0100-35064), and a structured selection guide to help engineers and procurement teams source the correct component with confidence.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0021-21779
- Drawing / Revision: CZM01.3-02-07
- Component Type: PVD Blade
- Cross-Reference P/Ns: 0130-35064 / 0110-35064 / 0100-35064
- Weight: 2,600 g (approx.)
- Application: Physical Vapor Deposition (PVD) chamber
- Condition: New / Refurbished (specify on inquiry)
Compatible Replacement & Equivalent Models
The following part numbers are functionally equivalent or direct replacements for the 0021-21779 blade. Always verify drawing revision and chamber configuration before substitution:
- 0130-35064 — Direct replacement (latest revision)
- 0110-35064 — Compatible equivalent (mid-revision)
- 0100-35064 — Compatible equivalent (early revision)
- CZM01.3-02-07 — Engineering drawing reference shared across revisions
Note: Confirm chamber model and process recipe compatibility with your process engineer before installation.
Why Choose the Original Model (0021-21779)
- OEM-specified geometry ensures precise fit within AMAT PVD chamber assemblies
- Maintains process uniformity and deposition rate consistency
- Reduces risk of particle contamination from dimensional mismatch
- Backed by AMAT engineering drawing CZM01.3-02-07 for traceability
- Preferred for GMP/ISO-controlled fabs requiring OEM part documentation
Typical Applications
- Applied Materials Endura PVD platforms
- Applied Materials Centura PVD chambers
- Metal thin-film deposition processes (Al, Ti, TiN, Cu barrier layers)
- 300 mm and 200 mm wafer fabrication lines
- Logic, memory, and advanced packaging fabs
System Compatibility
- Platform: Applied Materials Endura / Centura
- Process Module: PVD (Physical Vapor Deposition)
- Wafer Size: 200 mm / 300 mm (verify per chamber config)
- Cross-reference drawing: CZM01.3-02-07
Always cross-check the chamber BOM and engineering change orders (ECOs) before ordering.
Selection Guide
Use the table below to select the correct blade part number for your system:
| Part Number | Revision | Status | Recommended Use |
|---|---|---|---|
| 0021-21779 | CZM01.3-02-07 | Current OEM | New installations, OEM compliance required |
| 0130-35064 | Latest | Active replacement | Drop-in replacement, latest revision |
| 0110-35064 | Mid | Compatible | Legacy systems, mid-revision chambers |
| 0100-35064 | Early | Compatible | Early-generation chambers, verify fit |
Not sure which part fits your system? Contact our technical team with your chamber model and current BOM — we’ll confirm compatibility before shipment.
Quality Assurance & Sourcing
- All parts are inspected and verified against OEM specifications prior to shipment
- Traceability documentation available upon request (COC, test reports)
- Sourced from authorized distributors and certified refurbishers
- Packaging: anti-static, cleanroom-compatible where applicable
- Lead time: typically 3–10 business days (stock-dependent)
How to Order
- Confirm your part number: 0021-21779 or compatible cross-reference
- Specify quantity and required condition (New / Refurbished)
- Submit your RFQ via [email protected] or use the cart
- Receive quote with lead time and shipping options within 24 hours
- Approve PO — we ship with full documentation
Replacement & Compatibility FAQ
Q: Can 0130-35064 directly replace 0021-21779?
A: Yes, 0130-35064 is the current active replacement and shares the same CZM01.3-02-07 drawing family. Verify with your process engineer for critical applications.
Q: What is the difference between 0110-35064 and 0100-35064?
A: These are earlier revisions of the same blade design. Dimensional differences may exist — always compare against your chamber BOM before substitution.
Q: Do you supply refurbished blades?
A: Yes. Refurbished units are available with inspection reports. Specify condition at time of inquiry.
Q: What is the lead time?
A: Typically 3–10 business days depending on stock. Expedited options available — contact us for urgent requirements.
Q: Can I get a certificate of conformance (COC)?
A: Yes, COC and traceability documentation are available upon request.
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