Applied Materials 0100-89002 / 0100-89003 Main Gas Platter | Replacement, Equivalent & Selection Guide
The Applied Materials 0100-89002 (also referenced as 0100-89003, board assembly SYS68K/SASI-1) is a Main Gas Platter used in Applied Materials CVD and etch process chambers. Konmask.com supplies both original AMAT units and verified compatible equivalents including LAM Research 810-017035-001 and 880-12536-101, enabling cost-effective replacement without compromising process integrity.
Technical Specifications
- Part Number (Primary): 0100-89002
- Cross Reference: 0100-89003 / SYS68K/SASI-1
- Compatible Equivalent: LAM Research 810-017035-001 / 880-12536-101
- Description: Main Gas Platter
- Manufacturer: Applied Materials (AMAT)
- Weight: ~2,600 g
- Condition: New / Refurbished (specify on inquiry)
- Lead Time: In-stock or 3–7 business days
Compatible Replacement & Equivalent Models
The following part numbers are confirmed compatible replacements or functional equivalents for the Applied Materials 0100-89002 Main Gas Platter:
- Applied Materials 0100-89003 — alternate revision of the same assembly
- Applied Materials SYS68K/SASI-1 — board-level designation
- LAM Research 810-017035-001 — OEM cross-reference equivalent
- LAM Research 880-12536-101 — functional replacement, same gas distribution interface
Always verify chamber model, process recipe, and gas line configuration before substituting parts. Contact our engineers for a compatibility check.
Why Choose the Original Model
- Factory-calibrated gas distribution geometry ensures process repeatability
- OEM material certification (anodized aluminum / stainless wetted surfaces)
- Full traceability with AMAT part documentation
- Preferred for qualification-locked processes (e.g., DRAM, logic gate oxide)
Typical Applications
- CVD (Chemical Vapor Deposition) process chambers — gas inlet distribution
- Plasma etch systems — uniform gas delivery to wafer surface
- Applied Materials Centura, Producer, and P5000 platform chambers
- LAM Research Versys and 2300 series chamber retrofits
System Compatibility
- Applied Materials: Centura, Producer, P5000, Precision 5000
- LAM Research: 2300 Versys, Rainbow, TCP 9400 (verify revision)
- Controller Interface: SYS68K/SASI-1 SCSI-based gas control board
- Process Gases: Compatible with standard CVD precursor and etch gas chemistries (verify with process engineer)
Selection Guide
Use the table below to select the correct part for your application:
- Need OEM traceability for qualified process? → Order Applied Materials 0100-89002 (original)
- Cost-sensitive replacement with same form/fit/function? → LAM 810-017035-001 or 880-12536-101
- Alternate AMAT revision acceptable? → 0100-89003 or SYS68K/SASI-1
- Unsure? → Send us your chamber model and process recipe; our engineers will confirm compatibility within 24 hours.
Quality Assurance & Sourcing
- All units inspected and tested before shipment
- Sourced from authorized distributors, OEM surplus, or certified refurbishers
- Packaging: ESD-safe, anti-static foam, double-boxed for international freight
- Documentation available: CoC, test report, photos on request
- Export compliance: ECCN / HTS classification available for customs clearance
How to Order
- Add to cart directly, or
- Email [email protected] with your PO / chamber model / quantity
- WhatsApp / WeChat: +0086 19859288691
- We respond within 1 business day with availability, lead time, and pricing
Replacement & Compatibility FAQ
Q: Can LAM 810-017035-001 directly replace Applied Materials 0100-89002?
A: In most cases yes — both serve as Main Gas Platters with compatible mounting and gas port geometry. Confirm with your process engineer before installation.
Q: Is 0100-89002 the same as 0100-89003?
A: They are revision variants of the same assembly. Minor BOM differences may exist; contact us to verify for your specific chamber revision.
Q: Do you offer refurbished units?
A: Yes. Refurbished units are cleaned, inspected, and tested. Specify new or refurbished when ordering.
Q: What is the lead time?
A: In-stock units ship within 1–2 business days. Non-stock items typically 3–7 business days.
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