Rapid Thermal Processing (RTP) Solution — Applied Materials FL2004 & FL2006 | Flash Lamp Series
Where This Product Is Used
The Applied Materials FL2004 and FL2006 Flash Lamps are critical consumable components used in Rapid Thermal Processing (RTP) and Chemical Vapor Deposition (CVD) chambers within semiconductor wafer fabrication facilities. These lamps deliver high-intensity pulsed light energy to achieve precise, millisecond-range thermal cycles essential for:
- Dopant activation after ion implantation (anneal processes)
- Gate oxide growth and reflow in advanced logic and memory nodes
- Silicide formation (NiSi, CoSi₂) in CMOS device manufacturing
- Epitaxial layer growth in SiGe and III-V compound processes
- Stress relief and junction formation in 200mm and 300mm wafer lines
Typical host equipment includes Applied Materials Radiance Plus RTP, Centura RTP, and compatible OEM chamber configurations operating in high-volume production fabs.
Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | Applied Materials (AMAT) |
| Part Numbers | FL2004 / FL2006 |
| OEM P/N | 1006146 · 0190-17311 · 1007454 · 0190-29887 · 700009835 |
| Component Type | Flash Lamp (Xenon Arc / Pulsed) |
| Application | RTP Chamber Illumination / Thermal Anneal |
| Compatibility | Applied Materials Radiance Plus, Centura RTP Modules |
| Weight | 800 g (packaged) |
| Condition | New / OEM-Grade Replacement |
Why Engineers Specify This Model
- Exact OEM cross-reference: FL2004 and FL2006 are direct replacements with matched spectral output and geometry — no chamber re-qualification required.
- Process repeatability: Consistent pulse energy ensures wafer-to-wafer uniformity within ±1°C across the anneal zone.
- Reduced downtime: Stocking FL2004/FL2006 as PM consumables prevents unplanned chamber outages during high-volume production runs.
- Dual P/N coverage: A single sourcing event covers both 0190-17311 and 0190-29887 variants, simplifying procurement and MRO inventory.
- Validated traceability: Each unit ships with full lot documentation supporting SEMI S2 and fab-level change control requirements.
Complete System Bill of Materials
For a complete RTP chamber lamp replacement kit, engineers typically specify the following alongside FL2004/FL2006:
- Quartz window / reflector assembly (chamber-specific)
- Lamp power supply / igniter module
- Pyrometer calibration wafer (for post-PM verification)
- O-ring and seal kit for lamp housing
- Thermocouple assembly
Contact [email protected] for a complete BOM quote for your specific chamber configuration.
Compliance & Industry Standards
- SEMI S2 — Environmental, Health & Safety Guideline for Semiconductor Manufacturing Equipment
- SEMI F47 — Voltage Sag Immunity Standard (compatible power supply requirement)
- RoHS compliant packaging and documentation
- ISO 9001:2015 supply chain traceability maintained throughout sourcing and fulfillment
Quality Assurance & Sourcing
Konmask.com sources FL2004 and FL2006 Flash Lamps exclusively through verified industrial channels with documented chain-of-custody. Every unit undergoes:
- Visual and dimensional inspection against OEM drawings
- P/N and date-code verification prior to shipment
- Anti-static, moisture-barrier packaging per JEDEC J-STD-033
- Certificate of Conformance (CoC) available upon request
We do not source from unauthorized brokers or grey-market channels. All inventory is traceable to authorized distribution or OEM surplus with full documentation.
How to Source This Part
- Add to cart and complete checkout — in-stock units ship within 1–3 business days.
- Request a quote for volume orders (>5 units) or blanket PO arrangements via [email protected].
- Provide your chamber config (tool ID, process module) if you need cross-reference confirmation before ordering.
- Expedite available — contact us for same-day or next-flight-out shipping options for critical fab situations.
Application-Specific FAQ
Q: Are FL2004 and FL2006 interchangeable?
A: They share the same functional role in the RTP lamp array but may differ in geometry or wattage rating. Confirm your chamber’s lamp map before substituting one for the other. Contact us with your tool serial number for verification.
Q: What is the typical replacement interval for these flash lamps?
A: Most fabs replace RTP flash lamps on a PM cycle of 500,000–1,000,000 pulses or per OEM-recommended kWh thresholds. Actual life depends on process recipe intensity and duty cycle.
Q: Can these be used in non-AMAT RTP tools?
A: Potentially, if the lamp geometry and electrical specs match. Provide your tool make/model and we will confirm compatibility before shipment.
Q: Do you offer a warranty?
A: Yes — all new units carry a 90-day DOA warranty. Warranty claims require photographic evidence of defect and original packaging.
Q: Can I get a CoC or material certification?
A: Yes. Certificate of Conformance is available for all orders. MSDS/SDS documentation available upon request for hazardous material compliance.
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