MKS 20704A Process Sense — OD 27cm / ID 21cm Vacuum Chamber Component | MKS Instruments
Engineering Background: MKS Instruments is a global leader in instruments, subsystems, and process control solutions for semiconductor manufacturing, industrial technologies, and life sciences. The 20704A series represents precision-engineered process sense components designed for demanding vacuum and process chamber environments where dimensional accuracy and material integrity are non-negotiable.
Product Positioning: The MKS 20704A (P/N 0200-03313 / 0190-83096) is a critical OEM-grade process sense component used in semiconductor fabrication equipment. With an outer diameter of 27cm and inner diameter of 21cm, this component is engineered for precise fit within process chamber assemblies, ensuring reliable process sensing and chamber integrity across high-cycle production environments.
Complete Technical Specifications
- Model: MKS 20704A
- Part Numbers: 0200-03313 / 0190-83096
- Outer Diameter (OD): 270 mm (27 cm)
- Inner Diameter (ID): 210 mm (21 cm)
- Component Type: Process Sense Component
- Manufacturer: MKS Instruments, Inc.
- Weight: 2,600 g (approx.)
- Origin: United States
- Application: Semiconductor process chamber / vacuum system
- Compatibility: MKS OEM process chamber assemblies; cross-reference 0200-03313 and 0190-83096
Proven Application Environments
- CVD / PECVD / ALD semiconductor deposition chambers
- Etch process chambers (ICP, CCP, RIE)
- PVD and sputtering systems
- Vacuum load-lock and transfer module assemblies
- High-purity gas delivery and process control subsystems
- Flat panel display (FPD) manufacturing equipment
- Solar cell and advanced packaging process tools
Engineering Advantages
- OEM-Grade Dimensional Accuracy: Precision-machined to MKS factory tolerances — OD 27cm / ID 21cm — ensuring drop-in compatibility with original chamber assemblies.
- Dual P/N Cross-Reference: Covers both 0200-03313 and 0190-83096 part numbers, simplifying procurement across different BOM revisions.
- Material Integrity: Manufactured to withstand the thermal, chemical, and mechanical stresses of high-vacuum semiconductor process environments.
- Reduced Downtime: Ready-to-install OEM replacement minimizes chamber qualification time and production interruption.
- Traceability: Each unit supplied with full documentation for quality audit and equipment maintenance records.
System Architecture & Signal Flow
The MKS 20704A Process Sense component integrates within the process chamber’s sensing and sealing architecture. It interfaces between the chamber body and the process sense instrumentation layer, providing a dimensionally stable interface for pressure and process condition monitoring. The annular geometry (OD 27cm / ID 21cm) is designed to align with standard MKS chamber flange patterns, ensuring consistent signal path integrity and vacuum seal performance across the component’s service life.
Sourcing & Quality Verification
- Source: Konmask.com specializes in genuine and OEM-equivalent automation and semiconductor process components sourced through verified supply channels.
- Inspection: All units undergo dimensional verification and visual inspection prior to shipment.
- Documentation: Certificate of conformance and packing documentation available upon request.
- Condition: New / refurbished stock available — specify requirement at time of inquiry.
- Lead Time: Contact us for current stock availability and lead time confirmation.
Procurement Process
- Submit your RFQ via [email protected] or call +0086 19859288691.
- Provide your P/N (0200-03313 or 0190-83096), required quantity, and delivery timeline.
- Receive quotation with lead time, unit price, and shipping options within 24 business hours.
- Confirm purchase order — payment terms and export documentation arranged per your requirements.
- Shipment with full tracking and commercial invoice / packing list provided.
Technical FAQ
Q: Is this component compatible with both P/N 0200-03313 and 0190-83096?
A: Yes. The MKS 20704A covers both part numbers and is the correct replacement for either BOM reference.
Q: What is the dimensional tolerance on OD/ID?
A: Manufactured to MKS OEM specifications. Exact tolerance data available upon request with technical datasheet.
Q: Can this be used in high-vacuum environments?
A: Yes. The 20704A series is designed for semiconductor process chamber applications which operate under high-vacuum conditions.
Q: Do you offer expedited shipping?
A: Yes. Express air freight options are available. Contact us for current lead times and shipping cost estimates.
Q: Is a certificate of conformance available?
A: Yes. CoC documentation is available upon request for all units.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
