Applied Materials FL2004 – High-Intensity Xenon Flash Lamp | RTP & CVD Semiconductor Platform
The Applied Materials FL2004 is a precision xenon arc flash lamp engineered for high-throughput semiconductor thermal processing equipment. Sourced directly against OEM part numbers 0190-15637, 1005936, 101110075, and 2213-75SLTA, this lamp delivers consistent photon output and arc stability critical to wafer-level uniformity in rapid thermal processing (RTP) and chemical vapor deposition (CVD) chambers.
Procurement engineers sourcing replacement lamps for Applied Materials RTP systems will find this unit fully cross-referenced and ready for immediate qualification. Konmask.com maintains verified stock with full traceability documentation available upon request.
Complete Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number (Primary): FL2004
- Cross-Reference P/N: 0190-15637 | 1005936 | 101110075 | 2213-75SLTA
- Lamp Type: Xenon Arc Flash Lamp
- Envelope Dimensions: 5 × 5 × 18 (mm, arc tube cross-section × length)
- Light Source: High-pressure xenon gas discharge
- Application Platform: Applied Materials RTP / CVD semiconductor processing systems
- Weight: 800 g (packaged)
- Country of Origin: USA (OEM specification)
- Condition: New / OEM-equivalent replacement
Proven Application Environments
- Rapid Thermal Processing (RTP) – wafer annealing, silicidation, oxidation
- Chemical Vapor Deposition (CVD) – UV-assisted deposition chambers
- Ion Implant anneal post-processing modules
- Applied Materials Centura, Producer, and Radiance RTP platforms
- High-volume 200 mm and 300 mm wafer fabs requiring lamp-based thermal uniformity
Engineering Advantages
- Arc Stability: Consistent discharge geometry ensures wafer-to-wafer temperature repeatability within ±1°C
- Spectral Output: Broad-spectrum xenon emission optimized for silicon and compound semiconductor absorption
- Envelope Integrity: Quartz envelope rated for high-cycle thermal shock; resists devitrification under sustained pulsed operation
- Drop-in Replacement: Dimensional and electrical compatibility verified against OEM drawings for FL2004 / 0190-15637
- Extended Service Life: Optimized electrode geometry reduces sputtering and extends mean time between replacements (MTBR)
System Architecture & Signal Flow
In Applied Materials RTP systems, the FL2004 flash lamp array is positioned above (or below) the wafer susceptor within a water-cooled reflector housing. A capacitor bank discharges through the xenon arc at controlled pulse widths, generating a high-intensity photon flux that heats the wafer surface to target anneal temperatures (typically 900–1100°C) within milliseconds. The pyrometer feedback loop monitors wafer emissivity in real time, and the lamp pulse energy is modulated to maintain setpoint uniformity across the wafer diameter.
Replacing a degraded FL2004 lamp restores peak photon output, eliminates cold-spot non-uniformity, and prevents yield loss from under-annealed junctions or gate oxides.
Sourcing & Quality Verification
- All units cross-checked against Applied Materials BOM part numbers prior to shipment
- Dimensional inspection report available (envelope OD, arc gap, electrode protrusion)
- Packaging: anti-static foam insert, nitrogen-purged sealed bag, outer carton with shock indicators
- Traceability: lot number, date code, and certificate of conformance (CoC) provided on request
- Export compliance: ECCN classification and HTS code documentation available for international shipments
Procurement Process
- Submit your P/N or equipment model to [email protected] for cross-reference confirmation
- Receive formal quotation with lead time and CoC availability within 24 business hours
- Place order via Konmask.com checkout or purchase order (NET terms available for qualified accounts)
- Shipment via DHL / FedEx Express with full tracking; export documentation included for international orders
- Post-delivery technical support available for installation and qualification questions
Technical FAQ
Q: Is this lamp compatible with the Applied Materials Centura RTP chamber?
A: Yes. The FL2004 / 0190-15637 is a standard lamp used across multiple Applied Materials RTP platforms including Centura. Please confirm your chamber revision with our team for final verification.
Q: What is the typical replacement interval for the FL2004?
A: Replacement intervals vary by process recipe and pulse energy settings. Most fabs schedule preventive replacement at 500–1,000 wafer runs or upon detection of arc instability via the system’s lamp monitor diagnostics.
Q: Can you provide a Certificate of Conformance?
A: Yes. CoC is available for all units. Please request at time of order or contact [email protected].
Q: Do you offer volume pricing for fab-level blanket orders?
A: Yes. Contact us for volume pricing, consignment stock programs, and long-term supply agreements.
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