CVD Process Gas Delivery Solution – Applied Materials 0021-36509 | CVD460 Series
The Applied Materials 0021-36509 (MFS460-022 / CVD460-198) is a precision gas manifold engineered for chemical vapor deposition (CVD) semiconductor fabrication systems. Sourced through verified supply channels, this component ensures process integrity and system uptime in demanding fab environments.
Where This Product Is Used
This gas manifold is a critical sub-assembly in Applied Materials CVD460-series process chambers, commonly deployed in:
- Semiconductor wafer fabrication – thin-film deposition of dielectric and conductive layers (SiO₂, Si₃N₄, W, TiN)
- PECVD / Thermal CVD reactors – precise multi-gas blending for process repeatability at wafer scale
- 300 mm advanced logic & memory fabs – high-volume production lines requiring zero-downtime spare management
- R&D pilot lines – process development requiring OEM-spec gas delivery accuracy
- Refurbished tool integration – drop-in replacement for MFS460-022 manifold assemblies during tool refurb or PM cycles
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number | 0021-36509 |
| Cross Reference | MFS460-022 / CVD460-198 |
| Component Type | Gas Manifold Assembly |
| Compatible Platform | Applied Materials CVD460 Series |
| Application | Chemical Vapor Deposition (CVD) Process Gas Delivery |
| Weight | ~800 g |
| Condition | New / Refurbished (specify at inquiry) |
| Lead Time | Subject to stock availability – contact for ETA |
Why Engineers Specify This Model
- OEM-matched geometry – direct drop-in fit for CVD460-198 chamber configurations; no field modification required
- Process-critical precision – manifold flow paths maintain gas ratio accuracy essential for film uniformity and defect control
- Reduced PM downtime – stocking this assembly enables same-shift swap during scheduled preventive maintenance windows
- Dual cross-reference – catalogued under both MFS460-022 (MFC sub-system) and CVD460-198 (chamber BOM) for unambiguous procurement
- Verified provenance – Konmask.com sources through traceable supply chains with documentation available on request
Complete System Bill of Materials
This manifold interfaces with the following CVD460 sub-system components. Konmask.com can source the full BOM:
- MFC (Mass Flow Controller) assemblies – MFS460-series
- Gas line isolation valves and pneumatic actuators
- Process chamber lid and showerhead assembly
- RF match network and electrode assembly
- Exhaust throttle valve and turbo pump interface
- Chamber temperature control modules
Contact us with your full BOM list for consolidated sourcing and volume pricing.
Compliance & Industry Standards
- Designed and qualified to Applied Materials internal engineering specifications
- Compatible with SEMI S2 / S8 safety guidelines for semiconductor equipment
- Suitable for use in ISO Class 1–5 cleanroom environments
- RoHS-compliant materials (confirm at order for specific lot)
- Traceability documentation (CoC / CoO) available upon request
Quality Assurance & Sourcing
At Konmask.com, every semiconductor component undergoes a structured verification process before dispatch:
- Part number & cross-reference validation – confirmed against OEM documentation and cross-reference databases
- Physical inspection – dimensional check, connector integrity, and surface condition assessment
- Provenance review – supply chain documentation reviewed for traceability
- Secure packaging – ESD-safe, cleanroom-compatible packaging with part labelling for inventory control
How to Source This Part
- Submit a Request for Quote (RFQ) via Konmask.com or email support@konmask.com
- Provide your required quantity, condition preference (new / refurbished), and target delivery date
- Receive a formal quotation with lead time, pricing, and available documentation within 1 business day
- Confirm order – we arrange export documentation, customs clearance support, and global logistics
- Track shipment via dedicated order management communication
📞 +0086 19859288691 | ✉️ support@konmask.com
Application-Specific FAQ
Q: Is 0021-36509 compatible with both MFS460-022 and CVD460-198 configurations?
A: Yes. The part number 0021-36509 is the OEM assembly number; MFS460-022 and CVD460-198 are sub-system and chamber-level cross-references respectively. All three designations refer to the same physical manifold assembly.
Q: Can this manifold be used in PECVD as well as thermal CVD chambers?
A: The CVD460 platform supports both process modes. Confirm your specific chamber configuration with our technical team to ensure compatibility with your process recipe requirements.
Q: Do you offer refurbished units with warranty?
A: Yes. Refurbished units are available with a defined warranty period and inspection report. Contact us to discuss warranty terms and available stock condition.
Q: What is the typical lead time for this part?
A: Lead time depends on current stock status. In-stock units ship within 3–5 business days internationally. For out-of-stock items, sourcing lead time is typically 2–6 weeks. Contact us for real-time availability.
Q: Can Konmask.com source the full CVD460 chamber BOM?
A: Yes. We specialize in consolidated BOM sourcing for semiconductor equipment. Submit your full parts list and we will provide a comprehensive quotation.
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Contact: support@konmask.com | +0086 19859288691
