Applied Materials SM312CV2 0021-70379 KLB-1SII N2200 USC-881 Shutter with Sensor | Replacement, Equivalent & Selection Guide
The Applied Materials SM312CV2 (P/N 0021-70379) is a precision Shutter with Sensor assembly used in Applied Materials PVD and CVD process chambers. Referenced across sub-assemblies including KLB-1SII, N2200, and USC-881, this component controls target exposure timing and monitors shutter position in real time — critical for process repeatability and yield.
Konmask.com specializes in sourcing, cross-referencing, and supplying OEM and equivalent replacement parts for semiconductor capital equipment.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0021-70379
- Model / Assembly: SM312CV2
- Sub-Assembly References: KLB-1SII, N2200, USC-881
- Component Type: Shutter with Integrated Position Sensor
- Function: Controls target shutter open/close cycle; provides real-time position feedback via sensor signal
- Compatible Chamber Types: Endura PVD, Centura CVD (verify with your chamber BOM)
- Weight: Approx. 2,600 g
- Condition Available: New OEM, Refurbished, Used Tested
Compatible Replacement & Equivalent Models
The following parts are known to be functionally compatible or direct replacements. Always verify against your chamber BOM before ordering.
- 0021-70379 — OEM original (this listing)
- 0021-70379-001 / -002 — Revision variants; confirm revision level with your service manual
- SM312CV2 Assembly — Full shutter assembly; may include sensor harness
- KLB-1SII Shutter Module — Sub-assembly reference; cross-check mounting interface
- N2200 Shutter Unit — Alternative sub-assembly designation used in some chamber configurations
- USC-881 Shutter Sensor Kit — Sensor-only replacement if mechanical shutter is intact
Contact [email protected] with your chamber serial number for exact cross-reference confirmation.
Why Choose the Original Model
- Process Repeatability: OEM-spec sensor calibration ensures consistent shutter timing, directly impacting deposition uniformity and film thickness control.
- Chamber Qualification: Using the original P/N avoids re-qualification cycles required when substituting non-OEM components.
- Integrated Sensor Reliability: Factory-integrated sensor eliminates field-assembly tolerances that can cause false position signals.
- Warranty & Traceability: OEM parts carry full traceability documentation, essential for ISO-certified fabs.
Typical Applications
- Applied Materials Endura PVD systems — Al, Ti, TiN, Cu target chambers
- Applied Materials Centura CVD platforms — process isolation shutter applications
- Semiconductor wafer fabrication lines (200 mm / 300 mm)
- Flat panel display (FPD) deposition equipment
- R&D and pilot-line PVD tools requiring precision shutter control
System Compatibility
| System Platform | Chamber Type | Compatibility |
|---|---|---|
| Endura 200 / 300 | PVD Metal | Confirmed |
| Centura 200 | CVD Dielectric | Verify BOM revision |
| Producer GT | CVD | Not applicable |
| Custom OEM Builds | Various | Contact us to verify |
Selection Guide
- Identify your chamber platform — Endura or Centura? Check the chamber nameplate or service manual.
- Locate your BOM P/N — Search for 0021-XXXXX in your chamber spare parts list. If 0021-70379 appears, this is your part.
- Check sub-assembly reference — If your BOM lists KLB-1SII, N2200, or USC-881, this assembly is the correct match.
- Determine condition requirement — New OEM for critical process chambers; refurbished for non-critical or backup tools.
- Confirm sensor harness compatibility — Verify connector type matches your chamber wiring harness before installation.
Quality Assurance & Sourcing
- All parts sourced from authorized distributors, OEM surplus, or certified refurbishers.
- Each unit undergoes visual inspection and functional verification prior to shipment.
- Refurbished units include test reports and cleaning certification.
- Packaging: ESD-safe bags + foam-lined export carton, suitable for international air freight.
- Documentation available: Certificate of Conformance (CoC), packing list, commercial invoice.
How to Order
- Click Add to Cart or contact us for bulk / urgent inquiries.
- Provide your chamber serial number and BOM revision for exact cross-reference confirmation.
- Specify required condition: New OEM / Refurbished / Used Tested.
- Our team responds within 1 business day with availability, lead time, and pricing.
Email: [email protected] | Tel: +0086 19859288691
Replacement & Compatibility FAQ
Q: Can I use a refurbished SM312CV2 in a production chamber?
A: Yes, provided the unit has been cleaned, inspected, and comes with a test report. Many fabs use certified refurbished shutters in non-critical or backup chambers to reduce cost.
Q: What is the difference between 0021-70379 and 0021-70379-001?
A: The suffix typically denotes a minor engineering change order (ECO). Functionally they are often interchangeable, but confirm with your process engineer or AMAT field service representative.
Q: Is the sensor replaceable separately?
A: The USC-881 sensor kit may be available as a standalone item. Contact us with your specific sensor connector and signal type for availability.
Q: What is the lead time for new OEM stock?
A: New OEM units typically ship within 3–10 business days depending on regional stock. Refurbished units are often available for same-week dispatch.
Q: Do you provide export documentation for international shipments?
A: Yes. We provide commercial invoice, packing list, CoC, and can assist with ECCN/HTS classification for customs clearance.
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Contact: [email protected] | +0086 19859288691
