Applied Materials US22203 0190-13031 8-STN Pneumatic Slit Valve Assembly | Replacement, Equivalent & Selection Guide
The Applied Materials US22203 0190-13031 (0040-86854) MANF ASSY SLIT VALVE PNEU 8-STN is a precision pneumatic slit valve assembly designed for 8-station semiconductor process chambers. As an authorized sourcing partner, Konmask.com provides genuine, tested, and equivalent replacement units to minimize downtime and maintain process integrity.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: US22203 / 0190-13031
- Sub-Assembly P/N: 0040-86854
- Description: MANF ASSY SLIT VALVE PNEU 8-STN
- Type: Pneumatic Slit Valve Assembly
- Station Configuration: 8-Station
- Actuation: Pneumatic
- Weight: 360 g
- Application: Semiconductor vacuum process chamber isolation
- Condition Available: New OEM / Refurbished / Equivalent
Compatible Replacement & Equivalent Models
The following part numbers are commonly cross-referenced or used as functional equivalents for the 0190-13031 slit valve assembly. Always verify dimensional and pressure ratings before substitution:
- Applied Materials 0190-13031 (direct OEM)
- Applied Materials 0040-86854 (sub-assembly reference)
- Applied Materials US22203 (internal assembly code)
- Compatible 8-station pneumatic slit valve assemblies from qualified OEM rebuild suppliers
- Contact Konmask for verified cross-reference list specific to your chamber model
Why Choose the Original Model
- Process Integrity: OEM-spec sealing surfaces maintain vacuum integrity in CVD, PVD, and etch chambers
- 8-Station Design: Engineered for multi-station cluster tool architectures — not interchangeable with 4-station or 6-station variants
- Pneumatic Actuation: Faster cycle times and lower particle generation vs. motor-driven alternatives
- Traceability: Full OEM documentation and lot traceability available upon request
- Reduced Risk: Avoids qualification re-runs associated with non-OEM substitutions in critical process steps
Typical Applications
- Applied Materials Centura® multi-chamber cluster tools
- Applied Materials Endura® PVD systems
- Applied Materials Producer® CVD platforms
- 8-station transfer chamber isolation between process and load-lock modules
- Wafer handling environments requiring contamination-free gate isolation
System Compatibility
- Chamber Types: CVD, PVD, Etch, ALD process modules
- Wafer Size: Typically 200 mm / 300 mm platforms (confirm with chamber model)
- Interface: Pneumatic supply line, standard AMAT fitting spec
- Control: Compatible with AMAT chamber controller I/O for open/close feedback
- Not Compatible With: 4-station or 6-station slit valve assemblies — station count must match
Selection Guide
Use the following criteria to confirm the correct slit valve assembly for your system:
- Step 1 — Confirm Station Count: Verify your transfer chamber is an 8-station configuration (US22203 series)
- Step 2 — Confirm Actuation Type: Pneumatic (this model) vs. electromechanical — check your chamber BOM
- Step 3 — Verify Part Number: Cross-check 0190-13031 and 0040-86854 against your chamber’s illustrated parts list (IPL)
- Step 4 — Condition Requirement: New OEM for critical process chambers; certified refurbished acceptable for non-critical or backup tools
- Step 5 — Lead Time: Contact Konmask for current stock status and lead time before committing to a rebuild schedule
Quality Assurance & Sourcing
- All units sourced through verified supply channels with full chain-of-custody documentation
- Functional inspection and leak-down testing available on refurbished units
- Packaging: ESD-safe, cleanroom-compatible anti-static bags with desiccant
- Export compliance: ECCN classification and export documentation provided where required
- Warranty: 90-day warranty on refurbished units; OEM warranty applies to new stock
How to Order
- Online: Add to cart directly from this page
- Email RFQ: support@konmask.com — include part number, quantity, and required condition
- Phone/WhatsApp: +0086 19859288691
- Lead Time: In-stock units ship within 1–3 business days; sourced units 5–15 business days
- Payment: T/T, PayPal, credit card accepted; net terms available for qualified accounts
Replacement & Compatibility FAQ
Q: Can I use a 4-station slit valve assembly as a replacement?
A: No. Station count is a fixed mechanical parameter. The 8-STN assembly (0190-13031) is not interchangeable with 4-station or 6-station variants.
Q: Is 0040-86854 the same as 0190-13031?
A: 0040-86854 is the sub-assembly reference number; 0190-13031 is the top-level manufactured assembly part number. Both refer to the same physical unit in different BOM contexts.
Q: Do you offer refurbished units?
A: Yes. Refurbished units undergo functional testing and are supplied with a 90-day warranty. Contact us for pricing and availability.
Q: Can Konmask provide a certificate of conformance (CoC)?
A: Yes. CoC, material certifications, and test reports are available upon request for qualified orders.
Q: What is the typical failure mode for this assembly?
A: Common failure modes include seal degradation (O-ring wear), pneumatic actuator leakage, and valve blade misalignment. Konmask can advise on rebuild vs. replace decisions based on your failure description.
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