ASML 4022.639.92101 – Laser Lamp Assembly | ASML Lithography Platform
Engineering Background
ASML is the world’s leading supplier of photolithography equipment for semiconductor manufacturing. The Laser Lamp Assembly (P/N 4022.639.92101, cross-reference: 0040-84146 / 0040-18219) is a critical illumination source component used within ASML’s deep ultraviolet (DUV) and i-line lithography systems. This assembly provides the high-intensity, spectrally stable light required to expose photoresist patterns on silicon wafers with sub-micron precision.
Product Positioning
Designed for OEM-grade replacement and system maintenance, this Laser Lamp Assembly is sourced from verified surplus and decommissioned ASML tool inventories. It is suitable for fabs operating legacy ASML platforms that require cost-effective, specification-matched spare parts to maintain uptime without committing to new OEM pricing. Konmask.com specializes in providing procurement engineers with traceable, quality-verified components for exactly this use case.
Complete Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | ASML |
| Primary Part Number | 4022.639.92101 |
| Cross-Reference P/N 1 | 0040-84146 |
| Cross-Reference P/N 2 | 0040-18219 |
| Component Type | Laser Lamp Assembly |
| Application | DUV / i-line Photolithography Illumination |
| Platform Compatibility | ASML PAS / TWINSCAN series (confirm with engineering team) |
| Weight | 2,600 g (approx.) |
| Condition | Surplus / Refurbished (specify on inquiry) |
| Origin | OEM ASML Supply Chain |
Proven Application Environments
- Semiconductor Fabs: 200mm and 300mm wafer production lines requiring DUV illumination source maintenance
- R&D Laboratories: University and corporate research facilities operating ASML lithography tools
- Equipment Refurbishers: Third-party tool refurbishment companies rebuilding ASML systems for resale
- Spare Parts Depots: Regional spare parts hubs maintaining strategic inventory for ASML tool fleets
- Legacy Node Fabs: Mature-node fabs (90nm–350nm) extending tool life beyond OEM support windows
Engineering Advantages
- OEM Part Number Traceability: Three cross-referenced P/Ns (4022.639.92101 / 0040-84146 / 0040-18219) ensure unambiguous identification and BOM matching
- Drop-in Replacement: Maintains original mechanical and optical interface dimensions for direct swap without system modification
- Cost Efficiency: Surplus pricing delivers significant savings vs. new OEM procurement, critical for legacy tool TCO management
- Rapid Availability: In-stock surplus units reduce lead time from weeks to days, minimizing unplanned downtime impact
- Verified Provenance: Sourced from decommissioned ASML tools with documented service history where available
System Architecture & Signal Flow
Within the ASML lithography optical column, the Laser Lamp Assembly functions as the primary photon source. Light generated by the lamp is collected, homogenized through an integrator rod or fly-eye lens array, and directed via the illumination optics to the reticle plane. The condenser system then projects the patterned wavefront through the projection lens onto the wafer surface coated with photoresist. Lamp output stability directly governs critical dimension (CD) uniformity and overlay accuracy across the wafer field. Replacement of this assembly restores nominal dose control and exposure uniformity to specification.
Sourcing & Quality Verification
- All units are inspected upon receipt for physical integrity (connector condition, housing integrity, lamp envelope condition)
- Part numbers are verified against ASML documentation and cross-reference databases prior to listing
- Units are stored in ESD-safe, climate-controlled conditions to preserve component integrity
- Certificate of conformance and available service records provided upon request
- Functional test reports available for select units — inquire at time of order
Procurement Process
- Submit Inquiry: Contact [email protected] with your required quantity, delivery timeline, and destination country
- Quotation: Receive a formal quotation with unit price, lead time, and shipping options within 1 business day
- Order Confirmation: Approve the quotation and complete payment via bank transfer, PayPal, or other agreed method
- Export Documentation: Konmask prepares commercial invoice, packing list, and any required export/import documentation
- Shipment: Units are packed in anti-static, foam-lined packaging and shipped via DHL / FedEx / UPS with full tracking
- Delivery & Support: Post-delivery technical support available via email or phone
Technical FAQ
Q: Is this a new or used component?
A: Units are sourced from surplus and decommissioned ASML equipment. Condition (surplus-unused, refurbished, or tested-used) is specified per unit at time of quotation. Please inquire for current stock condition.
Q: Which specific ASML tool models is this compatible with?
A: Compatibility depends on your specific tool configuration. Please provide your ASML tool model and serial number when inquiring so our engineering team can confirm fitment.
Q: Can you provide a datasheet or OEM documentation?
A: Available documentation is provided upon request subject to confidentiality constraints. Contact us with your specific documentation requirements.
Q: What is the warranty policy?
A: Konmask offers a 30-day DOA (Dead on Arrival) warranty on all shipped components. Extended warranty options are available — please discuss at time of quotation.
Q: Do you accept returns?
A: Returns are accepted within 14 days for items in original, uninstalled condition. Please review our full returns policy at Konmask.com before ordering.
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