BALZERS BGG26000 – Compact Full Range Vacuum Gauge | PVD300 Platform
Engineering Background: The BGG26000 is a compact full-range combination vacuum gauge developed by Balzers (now Pfeiffer Vacuum) for integration into high-vacuum and ultra-high-vacuum process systems. It combines Pirani and cold cathode (Penning) measurement principles in a single compact housing, enabling continuous pressure monitoring from atmospheric down to the high-vacuum regime without sensor changeover.
Product Positioning: Designed for OEM integration into PVD (Physical Vapor Deposition) coating systems, sputtering platforms, and precision vacuum process equipment. The BGG26000 is a direct factory-replacement and upgrade-compatible gauge for Balzers PVD300-series and related vacuum platforms. Procurement engineers sourcing verified replacement parts for Balzers/Pfeiffer legacy systems will find this unit fully interchangeable with original specifications.
Complete Technical Specifications
- Manufacturer: BALZERS (Pfeiffer Vacuum)
- Model / Part Number: BGG26000
- Reference P/N: FL-9496 / E-E15004080 / PVD300 / 16-144558-00
- Type: Compact Full Range Gauge (Combination Pirani + Penning)
- Measurement Range: ~1000 mbar to 1×10⁻⁸ mbar (full range, combined)
- Pirani Range: 1000 mbar – 1×10⁻³ mbar
- Cold Cathode Range: 1×10⁻² mbar – 1×10⁻⁸ mbar
- Output Signal: Analog voltage (compatible with Balzers gauge controller)
- Flange Connection: KF (DN16 or DN25, per system configuration)
- Housing: Compact stainless steel body
- Weight: ~2.6 kg (as shipped)
- Compatible Platform: Balzers PVD300 series, BAK series, and related OEM vacuum systems
- Condition: Refurbished / Tested / Verified functional
Proven Application Environments
- PVD (Physical Vapor Deposition) coating systems
- Magnetron sputtering and evaporation chambers
- Semiconductor process vacuum equipment
- Optical coating and thin-film deposition systems
- Research and industrial high-vacuum chambers
- Balzers BAK / PVD300 / Leybold legacy platform maintenance
Engineering Advantages
- Wide-range single sensor: Eliminates the need for separate low- and high-vacuum gauges, reducing system complexity and potential leak points.
- Direct OEM replacement: Plug-and-play compatibility with Balzers PVD300 controller wiring and mounting interfaces.
- Compact form factor: Minimizes chamber port footprint while delivering full-range measurement capability.
- Dual-principle measurement: Pirani for rough/medium vacuum; cold cathode for high vacuum — automatic or controller-switched transition.
- Robust stainless steel construction: Suitable for process environments with reactive gases and thermal cycling.
System Architecture & Signal Flow
The BGG26000 connects to the Balzers gauge controller (e.g., BG800 or equivalent) via a multi-pin connector. The controller supplies high-voltage ignition for the Penning cell and reads the combined analog output. Pressure data is displayed on the controller front panel and/or transmitted via RS-232/analog output to the process PLC or SCADA system. The gauge mounts directly to the vacuum chamber via KF flange with a standard centering ring and clamp — no additional adapters required for PVD300-series systems.
Sourcing & Quality Verification
- Each unit is individually inspected and function-tested prior to shipment.
- Cross-referenced against OEM part numbers: FL-9496, E-E15004080, 16-144558-00.
- Sourced from decommissioned production systems or authorized surplus channels.
- Traceable documentation available upon request for regulated procurement environments.
- Packaging: anti-static foam insert, sealed poly bag, outer carton with part label.
Procurement Process
- Confirm part number compatibility with your system’s gauge controller model.
- Submit inquiry or place order directly via Konmask.com product page.
- Receive order confirmation and lead-time estimate within 1 business day.
- Shipment via DHL / FedEx international express with full tracking.
- Post-delivery technical support available via email or phone.
Technical FAQ
Q: Is the BGG26000 compatible with non-Balzers gauge controllers?
A: The gauge uses a standard analog output signal. Compatibility with third-party controllers depends on voltage range and connector pinout — contact us for wiring diagrams.
Q: What is the difference between FL-9496 and BGG26000?
A: FL-9496 is the Balzers internal catalog/order number; BGG26000 is the model designation. They refer to the same physical unit.
Q: Can this gauge be used in corrosive gas environments?
A: The stainless steel body provides moderate chemical resistance. For aggressive process gases (e.g., halogens), consult Pfeiffer Vacuum for material compatibility before installation.
Q: Is calibration certification available?
A: Functional test reports are available. NIST-traceable calibration certificates can be arranged at additional cost — please inquire at time of order.
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