MKS 626A01TDE Baratron Capacitance Manometer | Replacement, Equivalent & Selection Guide
The MKS 626A01TDE is a high-accuracy, temperature-controlled Baratron® capacitance manometer designed for absolute pressure measurement in semiconductor processing, thin-film deposition, and industrial vacuum systems. As an authorized sourcing partner, Konmask.com supplies genuine MKS units alongside verified compatible replacements to keep your process running without interruption.
Technical Specifications
| Parameter | Value |
|---|---|
| Model | MKS 626A01TDE |
| Series | Baratron® 626 |
| Measurement Type | Absolute Pressure (Capacitance) |
| Full-Scale Range | 1 Torr (1.33 mbar) |
| Accuracy | ±0.25% of reading (typical) |
| Sensor Temperature | 45 °C (heated, temperature-controlled) |
| Output Signal | 0–10 VDC (linear) |
| Process Connection | 1/4 in. VCR® Male |
| Wetted Materials | Inconel® diaphragm, 316L SS body |
| Operating Temperature | 15–50 °C (ambient) |
| Power Supply | ±15 VDC |
| Weight | ~2.76 kg |
| Certifications | CE, RoHS |
Compatible Replacement & Equivalent Models
If the MKS 626A01TDE is on lead time or you need a cost-optimized alternative, the following models offer equivalent performance and drop-in compatibility:
| Model | Brand | Range | Output | Notes |
|---|---|---|---|---|
| 626A01TDE | MKS Instruments | 1 Torr | 0–10 V | OEM original |
| 626B01TDE | MKS Instruments | 1 Torr | 0–10 V | Enhanced linearity variant |
| 627D01TDE | MKS Instruments | 1 Torr | 0–10 V | Differential version |
| CM-1000 | Inficon | 1 Torr | 0–10 V | Compatible replacement |
| CDG025D | Inficon | 1 Torr | 0–10 V | Direct equivalent, CE certified |
| RPM-626 | Konmask OEM | 1 Torr | 0–10 V | Cost-optimized, tested equivalent |
Contact us to confirm pin-out and connector compatibility before ordering a replacement.
Why Choose the Original MKS 626A01TDE
- Proven accuracy: ±0.25% of reading across the full 1 Torr range — critical for process repeatability in CVD, PVD, and etch chambers.
- Temperature-controlled sensor: The 45 °C heated sensor eliminates condensation errors and ensures stable zero-point calibration.
- Long service life: Inconel® diaphragm resists corrosive process gases (NF₃, Cl₂, HF) far better than standard stainless steel.
- Broad controller compatibility: Plug-and-play with MKS 247, 651, 670, and most third-party mass flow controllers and process controllers.
- Global installed base: Widely supported by OEM service teams and calibration labs worldwide.
Typical Applications
- Semiconductor CVD / PECVD / ALD process chambers
- PVD sputtering and evaporation systems
- Flat-panel display (FPD) manufacturing
- Solar cell thin-film deposition
- R&D vacuum furnaces and leak-detection systems
- Industrial vacuum coating lines
System Compatibility
The MKS 626A01TDE integrates directly with the following controllers and readout units:
- MKS Type 247, 247C, 247D Multi-Channel Readouts
- MKS 651C / 651E Pressure Controllers
- MKS 670 Signal Conditioner
- Brooks / Tylan mass flow controller systems
- Pfeiffer, Edwards, and Leybold vacuum system controllers (via 0–10 V analog input)
- PLC analog input modules (4–20 mA conversion available on request)
Selection Guide
Use the table below to select the correct 626-series model for your application:
| Full-Scale Range | Model Suffix | Typical Use Case |
|---|---|---|
| 0.1 Torr | 626A001TDE | Ultra-high vacuum, ALD |
| 1 Torr | 626A01TDE ✓ | CVD, PVD, etch processes |
| 10 Torr | 626A1TDE | Load-lock, rough vacuum |
| 100 Torr | 626A10TDE | Foreline, backing pump monitoring |
| 1000 Torr | 626A100TDE | Atmospheric reference, purge lines |
Suffix key: A = absolute | 01 = 1 Torr | T = temperature-controlled | D = 0–10 VDC output | E = CE marked
Quality Assurance & Sourcing
- All units shipped from Konmask.com are 100% tested against MKS factory calibration standards before dispatch.
- Genuine MKS units include original factory calibration certificate and serial number traceability.
- Compatible replacements undergo 72-hour burn-in and full-range linearity verification.
- Secure anti-static packaging with shock-absorbing foam insert for international freight.
- ISO 9001-aligned quality management process.
How to Order
- Add the MKS 626A01TDE to your cart and proceed to checkout, or
- Email [email protected] with your PO number and required delivery date for a formal quotation.
- For bulk orders (>5 units) or OEM pricing, contact our sales team directly at +0086 19859288691.
- Lead time: In-stock units ship within 1–3 business days; factory-order units 4–8 weeks.
Replacement & Compatibility FAQ
Q: Can the MKS 626A01TDE replace a 626B01TDE directly?
A: Yes, the A and B variants share the same mechanical footprint and electrical interface. The B variant offers marginally improved linearity but is otherwise interchangeable.
Q: Is the Inficon CDG025D a true drop-in replacement?
A: The CDG025D matches the 0–10 VDC output and 1/4 in. VCR connection. Verify the connector pinout against your cable harness before installation.
Q: Does the 626A01TDE work with 4–20 mA PLC inputs?
A: The native output is 0–10 VDC. A signal conditioner (e.g., MKS 670 or third-party V-to-I converter) is required for 4–20 mA PLC integration.
Q: What is the recalibration interval?
A: MKS recommends annual recalibration under normal process conditions. Corrosive gas exposure may require more frequent calibration checks.
Q: Can Konmask provide a calibration certificate?
A: Yes. A NIST-traceable calibration certificate is available on request for an additional fee.
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