BROOKS 5964-EP Mass Flow Controller CF4 | Replacement, Equivalent & Selection Guide
The Brooks Instrument 5964-EP is a high-precision thermal mass flow controller (MFC) designed for CF4 (carbon tetrafluoride) gas service in semiconductor fabrication and industrial process control. Part numbers: 0040-39138 / 2305144-B. Available new, refurbished, and as direct replacement at Konmask.com.
Technical Specifications
- Manufacturer: Brooks Instrument (Brooks Automation)
- Model / Series: 5964-EP
- Part Numbers: 0040-39138 | 2305144-B
- Gas: CF4 (Carbon Tetrafluoride)
- Device Type: Thermal Mass Flow Controller (MFC)
- Control Signal: Analog (0–5 VDC / 4–20 mA, configuration-dependent)
- Wetted Materials: 316L SS, Hastelloy C-22 (corrosion-resistant for halogen gases)
- Valve Type: Normally Closed (NC)
- Operating Pressure: Up to 500 psig inlet (typical)
- Accuracy: ±1% FS (full scale)
- Repeatability: ±0.2% FS
- Response Time: <2 seconds to 98% FS
- Connector: D-Sub 15-pin (standard Brooks interface)
- Weight: ~700 g
- Certifications: CE, RoHS compliant
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the Brooks 5964-EP in CF4 service:
- Brooks 5850E / 5850S – Same series predecessor; direct pin-compatible in many installations
- Brooks 5964-E – Standard (non-EP) variant; verify pressure rating before substitution
- MKS Instruments 1179A / 1479A – Industry-standard alternative; requires signal adapter for some controllers
- Horiba SEC-Z512MGX – Compatible range; confirm full-scale flow and gas calibration
- Alicat MC Series – Modern digital alternative with RS-232/RS-485; suitable for retrofit projects
- Fujikin FCST-series – Used in AMAT and Lam Research tool replacements
⚠ Always verify gas type, full-scale flow range, pressure rating, and connector pinout before substitution. Contact Konmask for cross-reference support.
Why Choose the Original Model
- OEM-matched calibration: Factory-calibrated for CF4 — no recalibration required on drop-in replacement
- Proven reliability: Brooks 5964-EP is a field-proven MFC widely deployed in CVD, etch, and ALD processes
- Halogen-resistant wetted path: EP (Enhanced Performance) designation indicates upgraded materials for aggressive gases like CF4, NF3, and Cl2
- Long service life: Designed for continuous duty in cleanroom environments
- OEM spare parts availability: Valve seats, seals, and PCBs available for depot-level repair
Typical Applications
- Semiconductor CVD (Chemical Vapor Deposition) — CF4 chamber clean
- Plasma etch tools (RIE, ICP) — fluorine-based etch chemistry
- ALD (Atomic Layer Deposition) precursor delivery
- Flat panel display (FPD) manufacturing
- Solar cell thin-film deposition
- Industrial gas blending and calibration systems
System Compatibility
- OEM Tools: Applied Materials (AMAT), Lam Research, Tokyo Electron (TEL), Novellus, ASM International
- MFC Controllers: Brooks 0254, MKS 247D/647C, Horiba UR-7300, Unit Instruments UFC-7300B
- Communication: Analog 0–5 V / 4–20 mA; optional DeviceNet or RS-485 (model-dependent)
- Gas Panel Integration: Compatible with standard VCR/VCO face-seal fittings (1/4″ and 1/8″)
Selection Guide
Use the table below to select the correct Brooks 5964-EP configuration for your application:
- Step 1 – Gas type: Confirm CF4 service; for NF3 or Cl2, request EP+ or specialty wetted variant
- Step 2 – Full-scale flow range: Match to your process recipe (e.g., 10 sccm, 50 sccm, 200 sccm, 1 slm)
- Step 3 – Pressure rating: Verify inlet/outlet pressure against your gas panel spec
- Step 4 – Signal interface: Confirm 0–5 VDC or 4–20 mA with your MFC controller
- Step 5 – Fitting type: VCR, VCO, or compression — specify at order
- Step 6 – Valve type: Normally Closed (NC) standard; Normally Open (NO) available on request
Not sure which configuration fits your tool? Email our engineers with your tool model and process recipe.
Quality Assurance & Sourcing
- All units sourced from authorized distributors, OEM surplus, or certified refurbishers
- Each unit inspected and function-tested prior to shipment
- Calibration certificates available on request (NIST-traceable)
- Refurbished units include 90-day warranty; new OEM units carry full manufacturer warranty
- Konmask maintains inventory of Brooks 5964-EP and compatible MFCs for fast dispatch
How to Order
- Online: Add to cart directly from this page
- Email: [email protected] — include P/N, quantity, and required delivery date
- Phone/WhatsApp: +0086 19859288691
- Lead time: In-stock units ship within 1–3 business days; special orders 5–15 business days
- Payment: T/T (wire transfer), PayPal, credit card accepted
- Export: Worldwide shipping; export documentation and customs support available
Replacement & Compatibility FAQ
Q: Can the Brooks 5964-EP replace a Brooks 5850E directly?
A: In most cases yes — the 5964 series is the successor to the 5850 series with the same D-Sub 15-pin interface. Verify full-scale flow range and gas calibration match.
Q: Is the 5964-EP suitable for NF3 or WF6?
A: The EP designation covers CF4 and similar fluorinated gases. For NF3 or WF6, request the EP+ or specialty corrosion-resistant variant and confirm with Konmask.
Q: What is the difference between P/N 0040-39138 and 2305144-B?
A: These are cross-reference part numbers used by different OEM tool manufacturers for the same Brooks 5964-EP unit. Both refer to the same device.
Q: Can I use an MKS 1179A as a drop-in replacement?
A: The MKS 1179A is functionally equivalent but uses a different connector pinout. A wiring adapter or harness modification is typically required.
Q: Do you offer calibration services?
A: Yes. Konmask partners with certified MFC calibration labs. Contact us for recalibration, repair, or exchange programs.
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Contact: [email protected] | +0086 19859288691
