RIGAKU FV10105H-807HS-6460 Solid Shaft Rotary Motion Feedthrough | Replacement, Equivalent & Selection Guide
The RIGAKU FV10105H-807HS-6460 is a precision solid shaft rotary motion feedthrough designed for high-vacuum and ultra-high-vacuum (UHV) environments. Originally specified for RIGAKU X-ray diffraction systems and compatible with BROOKS MFC 5964 AT200 mass flow controller platforms, this component is a critical motion transmission element in semiconductor, analytical, and scientific instrumentation applications. Konmask.com supplies verified OEM and compatible-grade units with full traceability.
Technical Specifications
- Part Number: FV10105H-807HS-6460
- Cross Reference: BROOKS MFC 5964 AT200
- Type: Solid Shaft Rotary Motion Feedthrough
- Application: High-vacuum / UHV rotary motion transmission
- Shaft Type: Solid (non-hollow)
- Flange Standard: Compatible with standard CF / KF vacuum flange configurations
- Operating Pressure: High-vacuum to UHV range
- Rotation: Continuous 360° rotary motion
- Material: Stainless steel body with precision-machined shaft
- Weight: ~20 g (component only)
- Country of Origin: Japan
Compatible Replacement & Equivalent Models
The FV10105H-807HS-6460 is functionally equivalent to or directly replaceable by the following models in compatible system configurations:
- BROOKS MFC 5964 AT200 — Direct cross-reference for rotary feedthrough assembly
- RIGAKU 807HS — Sub-assembly reference within RIGAKU XRD platforms
- RIGAKU 6460 — Alternate part designation used in service documentation
- Generic CF-flange solid shaft rotary feedthroughs with matching shaft diameter and stroke
Note: Always verify shaft diameter, flange size, and torque rating before substitution. Contact Konmask.com for a compatibility check.
Why Choose the Original Model
- OEM Precision: Manufactured to RIGAKU’s exact dimensional and vacuum-integrity tolerances
- Proven Reliability: Validated in RIGAKU XRD and analytical instrument production lines
- Vacuum Integrity: Hermetic sealing tested to UHV standards — no outgassing risk
- Drop-in Fit: No modification required for RIGAKU OEM system installations
- Traceability: Full OEM part number traceability for maintenance records and audits
Typical Applications
- RIGAKU X-ray diffraction (XRD) and X-ray fluorescence (XRF) instruments
- BROOKS mass flow controller (MFC) vacuum system assemblies
- Semiconductor wafer handling and process chambers
- Analytical and scientific vacuum instrumentation
- Thin-film deposition and sputtering systems
- Electron beam and ion beam equipment
System Compatibility
- RIGAKU Systems: XRD, XRF, and related analytical platforms using FV10105H series feedthroughs
- BROOKS MFC: 5964 AT200 and compatible AT-series mass flow controller vacuum assemblies
- Flange Interface: Standard CF / KF vacuum flange — verify flange size (DN16, DN40, etc.) before ordering
- Drive Interface: Compatible with stepper motor, servo, and manual rotary actuators
Selection Guide
Use the following criteria to confirm the correct feedthrough for your application:
- Step 1 — Identify your system: Confirm RIGAKU model or BROOKS MFC assembly number from your equipment documentation
- Step 2 — Verify shaft specs: Match shaft diameter, length, and keyway/flat configuration
- Step 3 — Confirm flange type: CF (ConFlat) or KF (Klein Flange) and nominal size
- Step 4 — Check vacuum level: Ensure the feedthrough rating meets your chamber’s base pressure requirement
- Step 5 — Contact Konmask: Send your part number or equipment model — we will confirm compatibility before shipment
Quality Assurance & Sourcing
- ✅ Sourced from authorized distributors and verified OEM supply chains
- ✅ Each unit inspected for dimensional accuracy and vacuum seal integrity
- ✅ Traceability documentation available upon request
- ✅ Packaging: Anti-static, vacuum-sealed protective packaging for safe transit
- ✅ Shelf-life managed — no aged or refurbished stock supplied without disclosure
How to Order
- Email [email protected] with your part number: FV10105H-807HS-6460
- Include your system model and application details for compatibility confirmation
- Receive a formal quotation with lead time and shipping options within 24 hours
- Confirm order — we handle export documentation, customs HS codes, and global logistics
📞 +0086 19859288691 | 📧 [email protected]
Replacement & Compatibility FAQ
Q: Is the FV10105H-807HS-6460 a direct replacement for BROOKS MFC 5964 AT200?
A: Yes, in the rotary feedthrough assembly position. Verify shaft and flange dimensions match your specific unit before installation.
Q: Can I use a generic rotary feedthrough as a substitute?
A: Generic units may fit physically, but OEM units are recommended for UHV applications where outgassing and dimensional tolerance are critical.
Q: Do you supply refurbished units?
A: We supply new OEM and new compatible-grade units only. Refurbished stock is clearly disclosed if applicable.
Q: What is the lead time?
A: Typically 3–10 business days depending on stock availability. Express options available — contact us for urgent requirements.
Q: Do you provide a certificate of conformance?
A: Yes, CoC and traceability documentation are available upon request for all orders.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
