Semiconductor Process Gas Flow Control Solution – HORIBA SEC-Z719MGX | SU8000 Series
In semiconductor fabrication, even a 0.1% deviation in process gas flow rate can cause film thickness non-uniformity, yield loss, or catastrophic wafer-level defects. The HORIBA SEC-Z719MGX is a high-precision digital mass flow controller engineered to eliminate that risk — delivering repeatable, stable gas delivery across CVD, ALD, etch, and diffusion processes where process integrity is non-negotiable.
Part of HORIBA’s flagship SU8000 series, the SEC-Z719MGX represents the current generation of HORIBA’s digital MFC platform, combining advanced thermal sensing with digital communication protocols. It is widely specified by process engineers at leading semiconductor fabs, flat panel display manufacturers, and solar cell production lines globally.
Where This Product Is Used
The SEC-Z719MGX is deployed in precision gas delivery systems across the following environments:
- Semiconductor Wafer Fabrication (CVD / PECVD / LPCVD): Controls deposition gas flows (SiH₄, NH₃, N₂O, etc.) to achieve target film thickness and uniformity across 200mm and 300mm wafers.
- Atomic Layer Deposition (ALD): Manages precursor pulse timing and carrier gas flow with the sub-millisecond response required for monolayer-level deposition control.
- Dry Etch Systems: Regulates etchant gas ratios (CF₄, CHF₃, Cl₂) to maintain etch selectivity and critical dimension (CD) control.
- Thermal Diffusion Furnaces: Delivers dopant carrier gases (O₂, N₂, H₂) with long-term stability for oxidation and annealing processes.
- Flat Panel Display (FPD) Manufacturing: Used in large-area PECVD systems for TFT-LCD and OLED backplane deposition.
- Photovoltaic (PV) Cell Production: Controls silane and dopant gas flows in thin-film silicon solar cell deposition equipment.
- R&D Laboratories: Specified in university and corporate research reactors requiring traceable, repeatable gas flow standards.
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | HORIBA STEC |
| Model Number | SEC-Z719MGX |
| Part Number | 4022.436.4502 |
| Series | SU8000 |
| Full Configuration Code | SUR11HGBFRKG/W/US-100-IPF |
| Gas Type | HGB (Hydrogen Bromide – HBr, or as configured per suffix) |
| Full Scale Flow Range | 100 sccm (as indicated by US-100 suffix) |
| Control Type | Digital Mass Flow Controller (MFC) |
| Communication Interface | IPF (as per suffix – digital protocol) |
| Inlet/Outlet Connection | Per SUR11 configuration (refer to HORIBA datasheet) |
| Valve Type | Normally Closed (NC) – standard for process safety |
| Compatible Platform | HORIBA SU8000 MFC System |
| Weight | Approx. 2.6 kg |
Note: Specifications are based on HORIBA part numbering conventions. Always verify against the official HORIBA datasheet for your specific process requirements. Konmask does not fabricate or modify specifications.
Why Engineers Specify This Model
- Digital Precision: The SU8000 platform’s digital control loop eliminates analog signal drift, providing superior repeatability over the product lifecycle — critical for high-volume production fabs.
- Corrosive Gas Compatibility: The HGB gas configuration indicates materials selection and internal surface treatment optimized for aggressive process gases, reducing contamination risk.
- Low Full-Scale Range (100 sccm): Enables fine-resolution control for low-flow precursor delivery in ALD and specialty CVD processes where accuracy at low flow rates is paramount.
- Proven Platform Reliability: The SU8000 series is a globally adopted standard in semiconductor OEM equipment from Applied Materials, Lam Research, Tokyo Electron, and ASM International.
- Digital Communication (IPF): Supports integration with modern fab automation systems, enabling real-time flow monitoring, remote setpoint adjustment, and predictive maintenance data logging.
- Drop-in Replacement Compatibility: Maintains dimensional and interface compatibility with existing SU8000 installations, minimizing downtime during maintenance replacement cycles.
Complete System Bill of Materials
The SEC-Z719MGX operates within a broader gas delivery and process control ecosystem. Commonly associated components include:
- HORIBA SU8000 MFC Controller / Power Supply Unit
- HORIBA SEC-series Pressure Transducers and Regulators
- VCR / VCO Face-Seal Fittings (Swagelok or equivalent) – per SUR11 port configuration
- Gas Panel / Gas Box Assembly (OEM-specific)
- Process Chamber Inlet Manifold
- Digital I/O Interface Cards (for IPF protocol integration)
- Purge and Vent Valves (compatible with HBr/corrosive gas service)
Contact Konmask.com to source complete gas delivery system components alongside this MFC.
Compliance & Industry Standards
- Designed and manufactured in compliance with SEMI S2 (Environmental, Health & Safety Guidelines for Semiconductor Manufacturing Equipment)
- Compatible with SEMI F57 (Ultrapure Water and Process Chemical Purity Standards) supply chain requirements
- HORIBA STEC quality management system certified to ISO 9001
- RoHS compliance per applicable HORIBA product documentation
- CE marking (where applicable per export region)
Quality Assurance & Sourcing
At Konmask.com, every industrial automation component undergoes a structured verification process before dispatch:
- Visual & Physical Inspection: Label integrity, connector condition, housing damage assessment, and serial number verification against purchase documentation.
- Functional Pre-Check: Where test equipment is available, basic electrical continuity and communication response verification.
- Authentic Sourcing: We source from authorized distributors, OEM decommission channels, and verified surplus inventories — never from unverified grey-market sources.
- Traceability Documentation: Full chain-of-custody documentation available upon request for regulated fab environments.
- Secure Packaging: ESD-safe packaging with desiccant and shock-absorbing materials for international air freight.
How to Source This Part
- Submit an Inquiry: Use the contact form on this page or email [email protected] with your required quantity and delivery timeline.
- Receive a Quote: Our team will respond within 1 business day with availability, lead time, and pricing in your preferred currency.
- Order Confirmation: Confirm your purchase order. We accept T/T bank transfer, PayPal, and other B2B payment methods.
- Inspection & Dispatch: Parts are inspected, documented, and shipped via DHL / FedEx / UPS with full tracking.
- After-Sales Support: Our engineering team is available for installation guidance and compatibility verification post-delivery.
Application-Specific FAQ
Q: Can the SEC-Z719MGX be used with gases other than HGB?
A: The MFC is factory-calibrated for the gas specified in the part number suffix. Using it with a different gas requires recalibration using the appropriate conversion factor. Contact HORIBA or Konmask for recalibration services.
Q: Is this a new or refurbished unit?
A: Konmask supplies both new-in-box and professionally inspected surplus units. The condition of the specific unit available will be clearly stated in your quotation.
Q: What is the lead time for the SEC-Z719MGX?
A: Lead time depends on current stock status. In-stock units ship within 3–5 business days. Out-of-stock items typically have a 4–12 week lead time depending on sourcing channel. Contact us for real-time availability.
Q: Can Konmask provide a Certificate of Conformance (CoC)?
A: Yes. CoC and inspection reports are available upon request for all units. Please specify your documentation requirements at the time of inquiry.
Q: Is the IPF communication protocol compatible with my fab’s automation system?
A: The IPF interface is a HORIBA-proprietary digital protocol. Compatibility depends on your controller platform. Konmask’s technical team can advise on interface adapters or alternative configurations if needed.
Q: What warranty does Konmask offer?
A: We offer a standard 90-day warranty against defects in materials and workmanship for all inspected surplus units. Extended warranty options are available — please inquire.
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