Brooks Instrument 5964CZ67 Mass Flow Controller – Precision Gas Flow Control | 5964 Series
In high-precision industrial processes — semiconductor fabrication, chemical vapor deposition, or specialty gas blending — even a 0.5% deviation in gas flow can cascade into catastrophic yield loss, equipment damage, or safety incidents. Without a reliable mass flow controller, operators face uncontrolled process drift, inconsistent product quality, and costly unplanned downtime. The Brooks Instrument 5964CZ67 Mass Flow Controller eliminates this risk, delivering repeatable, traceable gas flow measurement and control that keeps your process locked on spec, shift after shift.
The 5964CZ67 is a flagship model within Brooks Instrument’s renowned 5964 Series — a platform trusted by leading semiconductor OEMs, specialty chemical producers, and advanced materials manufacturers worldwide. Engineered for N₂ (nitrogen) and H₂ (hydrogen) gas service with the calibration configuration 3030-07578, this unit combines thermal mass flow sensing technology with robust digital electronics, making it one of the most specified MFCs in global industrial automation procurement. Its global installed base and long-term parts availability make it a preferred choice for both new system builds and legacy equipment maintenance.
Technical Specifications
- Manufacturer: Brooks Instrument (a Emerson company)
- Model / Part Number: 5964CZ67
- Full SKU: GAS N2,3030-07578 5964CZ67 H2 5964 5964C4KAFR5KA
- Series: Brooks 5964 Mass Flow Controller Series
- Calibration Gas: N₂ (Nitrogen) primary; H₂ (Hydrogen) secondary
- Calibration Configuration: 3030-07578
- Measurement Principle: Thermal mass flow (capillary bypass)
- Control Element: Proportional solenoid valve
- Communication / Signal: Analog (0–5 VDC standard) / RS-485 optional per configuration
- Wetted Materials: 316L stainless steel body, Viton or Kalrez seals (per suffix)
- Inlet/Outlet Connection: Per suffix code (C4 = 1/4″ Swagelok-compatible)
- Power Supply: ±15 VDC or 24 VDC (per configuration)
- Operating Temperature: 0–50°C ambient
- Weight: Approx. 360 g
- Certifications: CE, RoHS (verify with datasheet for specific suffix)
Note: Specifications above are based on standard 5964 Series parameters and the decoded suffix. Always verify against the original Brooks Instrument datasheet for your exact unit.
Key Features & Benefits
- High Accuracy & Repeatability: Thermal sensing technology delivers ±1% of full-scale accuracy with excellent long-term repeatability — critical for process-sensitive applications.
- Dual-Gas Calibration (N₂ / H₂): Factory-calibrated for both nitrogen and hydrogen, providing flexibility across multiple process steps without recalibration.
- Fast Response Time: Rapid valve response minimizes transient overshoot, protecting sensitive downstream processes.
- Robust Construction: 316L SS wetted path and industrial-grade electronics ensure long service life in demanding environments.
- Drop-in Replacement Compatibility: Standard footprint and signal interface allow direct replacement in existing Brooks 5964 Series installations with zero system redesign.
- Wide Industry Adoption: Extensive global installed base means readily available technical support, calibration services, and spare parts.
- Digital Diagnostics (where configured): RS-485 interface enables remote monitoring, alarm output, and predictive maintenance integration.
Industry & Equipment Applications
- Semiconductor Manufacturing: CVD, PECVD, ALD, diffusion furnaces, and etch chambers requiring precise N₂ purge and H₂ process gas control.
- Photovoltaic (Solar) Cell Production: Thin-film deposition processes demanding stable gas ratios.
- Specialty Chemical & Pharmaceutical: Hydrogenation reactors, gas blending skids, and analytical instrument carrier gas supply.
- Research & Development Labs: University and corporate R&D facilities requiring traceable, repeatable gas flow for experimental reproducibility.
- Industrial Gas Distribution: Calibration benches and gas mixing panels for industrial gas suppliers.
- OEM Equipment Integration: Built into analytical instruments, process analyzers, and automated test equipment (ATE).
System Integration & Compatible Parts
The Brooks 5964CZ67 is designed for seamless integration within Brooks Instrument ecosystems and standard industrial control architectures:
- Compatible MFC Readout/Control: Brooks 0254 Series, 0152 Series power/readout units; Alicat, MKS, and third-party multi-channel controllers via analog interface.
- Fitting Compatibility: 1/4″ Swagelok-type compression fittings (C4 suffix); adapters available for VCR, VCO, and NPT connections.
- PLC Integration: Analog 0–5 VDC setpoint and output signals interface directly with Siemens S7, Allen-Bradley ControlLogix, Mitsubishi MELSEC, and other standard PLC analog I/O modules.
- Related Brooks Models: 5850S, 5851S, 5863, 5964 (other suffix variants), SLA5850, SLA5851 for system expansion or replacement cross-reference.
- Calibration Gas Conversion: Use Brooks GF factor tables or Smart-DDE software for conversion to other gas species (Ar, O₂, CF₄, etc.).
Our Quality Assurance Process
At Konmask.com, every Brooks Instrument MFC we supply undergoes a rigorous multi-stage verification process before shipment:
- Authenticity Verification: Cross-referenced against manufacturer part number databases and physical label inspection to confirm genuine Brooks Instrument origin.
- Visual & Mechanical Inspection: Full external inspection for damage, corrosion, seal integrity, and connector condition.
- Functional Pre-check: Where applicable, units are powered and signal-checked to confirm basic electrical functionality.
- Secure Packaging: ESD-safe packaging with desiccant and shock-absorbing materials to protect precision instrumentation during international transit.
- Documentation: Original manufacturer labels, available calibration certificates, and test records provided upon request.
How to Order
- Submit your inquiry via the Contact / RFQ form on this page or email [email protected].
- Provide your required quantity, delivery timeline, and destination country.
- Our technical team will confirm availability, lead time, and provide a formal quotation within 24 business hours.
- Upon PO confirmation, we arrange secure packaging and international shipping with full tracking.
- Post-delivery technical support is available for integration and commissioning questions.
Why Choose Konmask.com?
- ✅ Specialized in Industrial Automation Components — PLC modules, DCS parts, MFCs, drives, and instrumentation from leading global brands.
- ✅ B2B Export Expertise — Experienced in international logistics, export documentation, and customs compliance for industrial equipment.
- ✅ Fast Response — Dedicated technical sales team responds to all RFQs within 24 hours.
- ✅ Competitive Pricing — Direct sourcing relationships enable competitive pricing on both new and refurbished units.
- ✅ Long-Term Partnership — We support your procurement needs from single-unit emergency replacements to multi-unit OEM supply agreements.
Frequently Asked Questions
Q: What gases is the Brooks 5964CZ67 calibrated for?
A: This unit is factory-calibrated for N₂ (Nitrogen) as the primary gas and H₂ (Hydrogen) as the secondary gas, per calibration configuration 3030-07578. Conversion factors for other gases are available via Brooks GF tables.
Q: Is this a new or refurbished unit?
A: Please contact us directly at [email protected] to confirm current stock condition (new, surplus, or professionally refurbished). We clearly disclose the condition of every unit before purchase.
Q: Can the 5964CZ67 replace other Brooks 5964 Series variants?
A: In many cases, yes — provided the flow range, gas service, and fitting connections match your application. Our technical team can assist with cross-reference verification before you commit to a purchase.
Q: What is the lead time for international orders?
A: Lead time depends on stock availability and destination. In-stock units typically ship within 3–5 business days. Express international shipping options are available upon request.
Q: Do you provide calibration certificates?
A: Original calibration documentation is provided where available. We can also arrange third-party recalibration services upon request.
Q: What is the warranty on this product?
A: Warranty terms vary by unit condition and are confirmed at the time of quotation. Please include your warranty requirements in your RFQ.
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