Semiconductor Gas Flow Control Solution – MKS Instruments 1179A23CR16V20 | Mass-Flo® Series
The MKS 1179A23CR16V20 is a precision thermal mass flow controller from MKS Instruments’ industry-standard Mass-Flo® Series, configured for semiconductor process gas delivery in GASBOX2 assemblies. Part numbers 810-138047-005 and 800-1931 identify this unit as an OEM-integrated component used in high-volume wafer fabrication environments. When your process line demands repeatable, contamination-free gas flow with sub-1% accuracy, this is the controller engineers specify.
Where This Product Is Used
- CVD / PECVD Chambers — Precise precursor gas metering for thin-film deposition (SiO₂, Si₃N₄, low-k dielectrics)
- Plasma Etch Systems — Reactive gas (CF₄, Cl₂, HBr) flow control in RIE and ICP etch tools
- Diffusion Furnaces — Carrier and dopant gas regulation for oxidation and annealing processes
- ALD (Atomic Layer Deposition) — Pulse-accurate precursor delivery requiring fast valve response
- GASBOX2 Gas Panel Assemblies — Direct OEM replacement in Lam Research, Applied Materials, and TEL gas delivery manifolds
- Metrology & Inspection Tools — Purge gas control in wafer inspection and CD-SEM systems
Technical Specifications
- Model: MKS 1179A23CR16V20
- Series: Mass-Flo® 1179A
- OEM Part Numbers: 810-138047-005 / 800-1931
- Assembly: GASBOX2
- Manufacturer: MKS Instruments, Inc.
- Device Type: Thermal Mass Flow Controller (MFC)
- Wetted Materials: 316L SS body, Hastelloy C-22 valve seat (corrosion-resistant for halogen gases)
- Seal Material: Viton / PCTFE (process-dependent)
- Control Signal: 0–5 VDC analog / RS-232 digital (model-dependent)
- Power Supply: ±15 VDC, 24 VDC
- Response Time: ≤ 2 seconds to setpoint (typical)
- Accuracy: ±1% of full scale
- Repeatability: ±0.2% of full scale
- Operating Temperature: 0–50 °C ambient
- Weight: 2.6 kg
- Connector: 15-pin D-sub (standard MKS pinout)
Why Engineers Specify This Model
- OEM-Matched Configuration — The 1179A23CR16V20 suffix encodes gas type, full-scale range, and valve configuration, ensuring drop-in compatibility with GASBOX2 manifolds without re-calibration
- Halogen-Resistant Wetted Path — CR16 (Hastelloy) valve seat withstands aggressive etch gases that corrode standard 316L components
- Proven Fab Reliability — Mass-Flo® 1179A series has >20 years of installed base in leading-edge fabs; spare parts and calibration services are widely available
- Fast Valve Response — Critical for ALD pulse sequences and endpoint-triggered gas switching
- Analog + Digital Interface — Compatible with legacy 0–5 V analog controllers and modern RS-232/DeviceNet fab automation systems
Complete System Bill of Materials
This MFC is typically installed alongside the following components in a GASBOX2 gas panel:
- MKS 248A / 248B Pressure Controller (upstream regulation)
- MKS 122B / 628D Capacitance Manometer (process pressure sensing)
- Swagelok VCR / VCO Face-Seal Fittings (leak-tight gas connections)
- Pneumatic Isolation Valves (upstream/downstream shutoff)
- MKS PR4000B / PR4000F MFC Controller/Readout (signal conditioning)
- Gas Panel Manifold Block (GASBOX2 chassis)
Compliance & Industry Standards
- SEMI S2 — Environmental, Health & Safety guidelines for semiconductor equipment
- SEMI F47 — Voltage sag immunity for process equipment
- CE Marking — EMC Directive 2014/30/EU compliant
- RoHS Compliant — Restriction of Hazardous Substances
- Calibrated to NIST-traceable standards
Quality Assurance & Sourcing
- ✅ Each unit undergoes functional flow verification prior to shipment
- ✅ Leak-tested to <1×10⁻⁹ atm·cc/sec He
- ✅ Sourced from decommissioned fab equipment, certified refurbishers, or authorized distributors
- ✅ Traceability documentation available upon request
- ✅ 90-day warranty on all tested units
How to Source This Part
Submit your RFQ via Konmask.com or contact us directly:
- 📧 [email protected]
- 📞 +0086 19859288691
- Provide your required quantity, delivery timeline, and any calibration gas/range requirements for fastest response
- Expedited shipping available for critical tool-down situations
Application-Specific FAQ
Q: Is the 1179A23CR16V20 calibrated for a specific gas?
A: Yes — the model suffix encodes the calibration gas and full-scale range. Contact us to confirm the gas species and range before ordering if your process gas differs.
Q: Can this MFC be recalibrated for a different gas or range?
A: Yes. MKS Instruments and authorized service centers can recalibrate 1179A units. We can facilitate recalibration prior to shipment upon request.
Q: Is this compatible with my existing GASBOX2 manifold?
A: The OEM part number 810-138047-005 confirms direct GASBOX2 compatibility. Verify your manifold revision with our technical team if uncertain.
Q: What is the lead time?
A: In-stock units ship within 3–5 business days. For out-of-stock items, typical lead time is 4–8 weeks depending on sourcing.
Q: Do you offer exchange / core return programs?
A: Yes — we accept working or non-working cores for credit toward replacement units. Contact us for details.
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