LAM Research 839-182861-001 Diaphragm Valve | Replacement, Equivalent & Selection Guide
The LAM Research 839-182861-001 is a precision diaphragm valve used in semiconductor wafer fabrication equipment. Also referenced as 0100-00698, 0090-02346, and 0010-09348, this valve controls ultra-high-purity gas and chemical flow in critical process chambers. Konmask.com supplies new, tested, and refurbished units with full traceability for MRO and OEM replacement needs.
Technical Specifications
- Manufacturer: LAM Research Corporation
- Primary Part Number: 839-182861-001
- Cross-Reference / Alternate SKUs: 0100-00698 | 0090-02346 | 0010-09348
- Type: Diaphragm Valve (Pneumatically Actuated)
- Application: Semiconductor process gas / chemical flow control
- Media Compatibility: Ultra-high-purity (UHP) gases, corrosive and non-corrosive process chemicals
- Actuation: Pneumatic (air-to-open / air-to-close)
- Body Material: PTFE / Stainless Steel (316L)
- Diaphragm Material: PTFE / EPDM (process-dependent)
- Weight: 2,600 g (approx.)
- Condition Available: New OEM | Refurbished | Tested Used
Compatible Replacement & Equivalent Models
The following part numbers are confirmed cross-references or functional equivalents for the LAM Research 839-182861-001:
- 0100-00698 — LAM Research internal assembly reference
- 0090-02346 — LAM Research sub-assembly / revision variant
- 0010-09348 — LAM Research legacy / alternate catalog number
Note: Always verify port size, actuation type, and media compatibility before substituting. Contact Konmask.com for cross-reference validation support.
Why Choose the Original Model
- Engineered to LAM Research OEM tolerances for zero-leak performance in UHP environments
- Validated for use in LAM Kiyo, Flex, and Versys process chamber platforms
- Diaphragm geometry optimized for low dead-volume and fast cycle response
- Full material traceability and lot documentation available upon request
- Reduces qualification risk vs. third-party alternatives in regulated fabs
Typical Applications
- Etch gas delivery systems (CCP / ICP etch chambers)
- CVD / ALD precursor flow control
- Wet clean chemical distribution manifolds
- Abatement and exhaust gas isolation
- Semiconductor OEM equipment MRO replacement
System Compatibility
- LAM Research Kiyo — Conductor etch platform
- LAM Research Flex — Dielectric etch platform
- LAM Research Versys — Metal etch / deposition platform
- LAM Research Altus — CVD tungsten platform
- Compatible with standard 1/4″ and 1/2″ VCR / VCO gas panel fittings (verify before ordering)
Selection Guide
Use the table below to confirm the correct valve for your application:
- Process media: Confirm gas or liquid compatibility with PTFE/EPDM diaphragm
- Actuation pressure: Verify pneumatic supply pressure (typically 60–80 psi)
- Port configuration: Match inlet/outlet port size and fitting standard (VCR, Swagelok, etc.)
- Cycle life requirement: New OEM recommended for >1M cycle applications; refurbished suitable for lower-cycle MRO
- Lead time sensitivity: In-stock units ship within 1–3 business days; contact us for urgent requirements
Quality Assurance & Sourcing
- All units inspected and tested prior to shipment
- Sourced from authorized distributors, certified refurbishers, and OEM surplus channels
- Packaging: Anti-static bag + foam-lined box; cleanroom-compatible packaging available on request
- Documentation: Certificate of Conformance (CoC), test reports, and material certs available
- Export compliance: ECCN / HTS classification available; export license review conducted where required
How to Order
- Online: Add to cart directly on this page
- Email: [email protected] — include part number, quantity, and required condition
- Phone / WhatsApp: +0086 19859288691
- RFQ: For volume orders (>5 units) or blanket PO arrangements, request a formal quote
- Lead Time: In-stock items ship within 1–3 business days; ETA confirmed at order
Replacement & Compatibility FAQ
Q: Is 0100-00698 a direct replacement for 839-182861-001?
A: Yes. 0100-00698 is a LAM Research internal cross-reference for the same valve assembly. Confirm revision level with your fab’s BOM before installation.
Q: Can I use a third-party diaphragm valve as an equivalent?
A: Functional equivalents exist from Fujikin, Swagelok, and Parker, but OEM validation is required for process-critical applications. Contact us for a compatibility assessment.
Q: Do you supply refurbished units with warranty?
A: Yes. Refurbished units carry a 90-day functional warranty. New OEM units carry the manufacturer’s standard warranty.
Q: What is the typical failure mode for this valve?
A: Diaphragm fatigue, seat wear, and actuator seal degradation are the most common failure modes. We recommend proactive replacement at 500K cycles or per your PM schedule.
Q: Can you provide a CoC or material certification?
A: Yes. Documentation is available upon request at time of order.
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Contact: [email protected] | +0086 19859288691
