Lam Research 713-028487-001 – Plasma Confinement Ring | Lam Etch Platform
Engineering Background: The confinement ring is a mission-critical consumable in capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) etch chambers. It physically confines the plasma sheath to the wafer processing zone, directly governing etch uniformity, selectivity, and chamber-to-chamber matching. In high-volume semiconductor fabs, confinement ring condition is a primary process control variable tracked at every PM interval.
Product Positioning: The Lam Research part number 713-028487-001 (cross-referenced as 0020-35057 and 100-132-135) is a factory-specification confinement ring designed for Lam Research plasma etch platforms. Konmask.com supplies this part to process engineers and procurement teams requiring verified, traceable replacements with short lead times.
Complete Technical Specifications
- OEM Part Number: 713-028487-001
- Cross-Reference PN: 0020-35057 | 100-132-135
- Manufacturer: Lam Research Corporation
- Component Type: Confinement Ring (Plasma Confinement Assembly)
- Compatible Platform: Lam Research Plasma Etch Systems (CCP/ICP)
- Material: High-purity quartz or anodized aluminum (OEM-specified per chamber configuration)
- Function: Plasma boundary confinement, etch zone isolation
- Weight: ~360 g
- Country of Origin: United States
- Condition: New / Refurbished-to-spec (confirm at inquiry)
Proven Application Environments
- Logic & Memory Fabs: Used in gate, contact, and metal etch steps on 200 mm and 300 mm wafer lines
- MEMS & Power Device Manufacturing: Deep silicon etch (DRIE) and oxide etch chambers requiring tight plasma confinement
- Advanced Packaging: TSV etch, RDL patterning, and wafer-level packaging etch modules
- R&D & Pilot Lines: University and research fab installations running Lam etch platforms
- Refurb & Aftermarket MRO: Scheduled PM replacement to restore chamber baseline and extend tool life
Engineering Advantages
- OEM Dimensional Compliance: Manufactured to Lam Research drawing tolerances — ensures drop-in fit without chamber re-qualification
- Plasma Uniformity Restoration: Worn or eroded confinement rings are a leading cause of etch non-uniformity; replacement with spec-correct parts restores CD control
- Multi-PN Traceability: Three cross-reference numbers (713-028487-001 / 0020-35057 / 100-132-135) allow procurement matching across legacy BOM systems
- Reduced PM Downtime: Pre-sourced inventory at Konmask eliminates lead-time gaps during scheduled preventive maintenance windows
- Contamination Control: Parts handled and packaged in controlled environments to meet fab cleanliness requirements
System Architecture & Signal Flow
In a Lam Research etch chamber, the confinement ring sits concentrically around the wafer chuck (ESC) and below the upper electrode or gas distribution plate. RF power from the generator is coupled into the process gas, forming a plasma. The confinement ring defines the lateral boundary of this plasma, preventing edge spreading and ensuring that reactive species are directed uniformly across the wafer surface. As the ring erodes through ion bombardment over thousands of RF hours, plasma boundary drift causes edge-to-center etch rate variation — the primary indicator that replacement is required.
Sourcing & Quality Verification
- All parts are inspected against OEM dimensional drawings prior to shipment
- Lot traceability documentation available upon request for ISO-certified fabs
- Parts sourced from authorized distribution channels or certified refurbishment partners
- Packaging: ESD-safe, cleanroom-compatible bags with desiccant; outer carton labeled with PN and lot
- Certificate of Conformance (CoC) available for qualified orders
Procurement Process
- Submit RFQ via [email protected] with your required PN and quantity
- Receive availability confirmation and lead-time quote within 24 business hours
- Review CoC and inspection report (available on request)
- Confirm PO — payment via T/T, credit card, or approved net terms
- Shipment via DHL / FedEx with full tracking; export documentation included for international orders
Technical FAQ
Q: Are 713-028487-001, 0020-35057, and 100-132-135 the same part?
A: Yes. These are Lam Research internal cross-reference numbers for the same confinement ring assembly. All three map to the same physical part and are interchangeable in procurement systems.
Q: How do I know when the confinement ring needs replacement?
A: Key indicators include increasing etch rate non-uniformity (edge vs. center delta), visible erosion grooves on the ring surface, and PM interval triggers defined in your chamber’s process qualification document (PQD).
Q: Can this part be used on all Lam Research etch tools?
A: This PN is specific to certain Lam chamber configurations. Please confirm your tool model and chamber type when submitting your RFQ to ensure dimensional compatibility.
Q: Do you offer volume pricing for fab MRO programs?
A: Yes. Contact us to discuss blanket PO arrangements, consignment stock programs, and volume discount tiers for ongoing MRO supply agreements.
Q: What is the typical lead time?
A: In-stock parts ship within 2–3 business days. For sourced or refurbished units, lead time is typically 2–4 weeks depending on availability.
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