LAM RESEARCH 810-227611-003 – ADIO RS485 ROHS W/ LCD Display Board | Semiconductor Etch Control Platform
The LAM RESEARCH 810-227611-003 is a critical ADIO (Analog/Digital I/O) control board with integrated RS485 communication and ROHS-compliant LCD display interface, designed for use in LAM Research plasma etch and CVD semiconductor processing equipment. Cross-referenced as 0200-01009 and 0090-08888, this board serves as the primary I/O and operator interface module within LAM’s advanced process control architecture.
Product Positioning: Engineered for high-reliability semiconductor fab environments, this board supports real-time process monitoring, RS485 multi-drop communication, and operator-facing LCD status display — making it an essential replacement component for maintenance engineers managing LAM Research etch tool uptime.
Complete Technical Specifications
- Part Number (Primary): 810-227611-003
- Cross Reference: 0200-01009 / 0090-08888
- Manufacturer: LAM RESEARCH Corporation
- Board Type: ADIO (Analog & Digital I/O) Control Board
- Communication Interface: RS485 (multi-drop serial)
- Display: Integrated LCD Display Module
- Compliance: ROHS (Restriction of Hazardous Substances) Compliant
- Weight: Approx. 800 g
- Origin: United States
- Condition: Genuine OEM / Refurbished Available — specify at inquiry
Proven Application Environments
- LAM Research Plasma Etch Systems (e.g., Versys, Exelan, 2300 Series)
- LAM Research CVD / ALD Deposition Platforms
- Semiconductor wafer fabrication facilities (200mm / 300mm fabs)
- OEM spare parts programs for fab equipment maintenance teams
- Refurbishment and requalification of legacy LAM etch tools
Engineering Advantages
- RS485 Multi-Drop Architecture: Supports robust, noise-immune serial communication across long cable runs in EMI-intensive fab environments.
- Integrated LCD Interface: Provides on-board operator status display, reducing diagnostic time during maintenance windows.
- ROHS Compliance: Meets global environmental regulations for hazardous substance restrictions — critical for fabs operating under ISO 14001 and EU RoHS directives.
- OEM-Grade Reliability: Manufactured to LAM Research’s stringent process control specifications, ensuring drop-in compatibility with existing tool configurations.
- Multi-Reference Traceability: Dual cross-reference numbers (0200-01009 / 0090-08888) simplify procurement matching against existing BOM and MRO records.
System Architecture & Signal Flow
The 810-227611-003 board interfaces with the tool’s main process controller via RS485 serial bus, receiving command signals and returning real-time I/O status. The onboard LCD module provides local operator feedback for process state, alarm conditions, and diagnostic codes. Analog and digital I/O channels connect to sensors, actuators, and valve controllers within the process chamber subsystem. The ROHS-compliant design ensures all board-level components meet current environmental standards without compromising signal integrity or thermal performance.
Sourcing & Quality Verification
- All units sourced from verified OEM channels, certified refurbishers, or controlled decommission programs.
- Each board undergoes visual inspection, functional verification, and cross-reference validation prior to shipment.
- Traceability documentation available upon request (lot records, test reports).
- Packaging: ESD-safe anti-static bag + foam-lined carton for international transit.
- Warranty: 90-day functional warranty standard; extended warranty available on request.
Procurement Process
- Confirm part number against your tool’s BOM: 810-227611-003 (alt: 0200-01009 / 0090-08888).
- Contact us to verify current stock, condition grade (OEM new / refurbished), and lead time.
- Submit PO or place order directly via Konmask.com checkout.
- Receive ESD-safe shipment with packing list and optional test documentation.
- Installation support available via email for qualified maintenance engineers.
Technical FAQ
Q: Is 810-227611-003 compatible with all LAM Research etch platforms?
A: This board is designed for specific LAM Research tool families. Please confirm your tool model and software revision before ordering. Contact us for compatibility verification.
Q: What is the difference between 810-227611-003, 0200-01009, and 0090-08888?
A: These are alternate part numbers (cross-references) for the same board used across different LAM Research documentation systems and procurement databases.
Q: Can you provide a test report or functional verification certificate?
A: Yes. Functional test reports are available upon request for refurbished units. Please specify at time of order.
Q: What is the lead time for this part?
A: In-stock units ship within 1–3 business days. Out-of-stock lead time varies; contact us for current availability.
Q: Do you accept returns or offer exchange programs?
A: Yes. We offer a 90-day return/exchange policy for defective units. Core exchange programs available for qualifying customers.
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