LAM RESEARCH UI/FIB JTS SIH4 W/ BD 24 PCB Board – 810-111093-100 / TVB41D-1 / 853-250063-007 Control Module
When a critical PCB board fails inside a LAM RESEARCH etch or CVD chamber, the entire production line halts. Wafer throughput drops to zero, engineers scramble for a replacement, and every hour of unplanned downtime translates directly into lost yield and escalating costs. The LAM RESEARCH UI/FIB JTS SIH4 W/ BD 24 PCB Board (P/N 810-111093-100 / C1848 / TVB41D-1 / TMP 1D81-000140 / 853-250063-007) is the precision control module that keeps gas delivery, process sequencing, and chamber diagnostics running without interruption.
Within the LAM RESEARCH platform ecosystem, this multi-part-number assembly occupies a pivotal role: it bridges the UI/FIB junction timing subsystem (JTS) with the SiH₄ gas flow control board (BD 24), making it one of the most integration-critical PCB assemblies in Lam’s etch and deposition tool family. Globally, LAM RESEARCH holds a leading share of the front-end semiconductor equipment market, and this board is found in fabs across Asia, North America, and Europe running advanced node processes.
Technical Specifications
- Manufacturer: LAM RESEARCH Corporation
- Part Numbers: 810-111093-100 / C1848 / TVB41D-1 / TMP 1D81-000140 / 853-250063-007
- Assembly Description: UI/FIB JTS SIH4 W/ BD 24 PCB Board
- Board Type: Multi-function process control PCB
- Series / Platform: LAM RESEARCH Etch & CVD Tool Platform
- Form Factor: Industrial PCB assembly with integrated daughter board (BD 24)
- Weight: Approx. 800 g
- Condition: Available as OEM surplus / tested used / refurbished (specify on inquiry)
Key Features & Benefits
- Multi-PN Cross-Reference: Covers 810-111093-100, C1848, TVB41D-1, TMP 1D81-000140, and 853-250063-007 — one board, multiple Lam catalog references, simplifying procurement.
- JTS + SiH₄ Integration: Combines junction timing sequencing with silane gas flow control on a single assembly, reducing inter-board signal latency and improving process repeatability.
- BD 24 Daughter Board Included: The integrated BD 24 sub-board is pre-assembled and tested as a unit, eliminating compatibility risk from separate sourcing.
- Drop-in Replacement: Designed to fit original Lam tool slots without mechanical modification, minimizing maintenance window duration.
- Rigorous Pre-shipment Testing: Each unit undergoes functional verification before dispatch to ensure it meets OEM performance baselines.
Industry & Equipment Applications
- LAM RESEARCH plasma etch systems (Kiyo, Flex, 2300 series)
- LAM RESEARCH CVD / PECVD deposition tools
- Front-end-of-line (FEOL) semiconductor fabs — logic, memory, and foundry
- Advanced node process lines (28 nm and below) requiring high-precision gas delivery control
- Fab maintenance, repair & overhaul (MRO) operations
- Spare parts inventory programs for high-uptime production environments
System Integration & Compatible Parts
This PCB board is designed to operate within the broader LAM RESEARCH control architecture. When sourcing this assembly, consider also verifying the condition of adjacent components:
- LAM RESEARCH gas delivery manifold assemblies
- Chamber match network control boards
- RF generator interface PCBs
- TMP (turbomolecular pump) controller boards (cross-referenced via TMP 1D81-000140)
- Associated I/O backplane and ribbon cable harnesses
Contact our technical team to confirm compatibility with your specific tool serial number and software revision.
Our Quality Assurance Process
- Visual Inspection: All boards are inspected for physical damage, burnt components, and corrosion before listing.
- Functional Test: Where test fixtures are available, boards are powered and functionally verified against known-good baselines.
- ESD-Safe Packaging: Shipped in anti-static bags with foam cushioning to prevent transit damage.
- Traceability: Part numbers, serial numbers, and inspection records are documented and available on request.
- Warranty: 90-day warranty against DOA (Dead on Arrival) — contact us within 5 business days of receipt for any claims.
How to Order
- Submit an inquiry via the Contact / RFQ form on this page or email [email protected].
- Provide your tool model, serial number, and required quantity.
- Our team will confirm availability, condition grade, and lead time within 1 business day.
- Receive a formal quotation with shipping options (DHL / FedEx / UPS international).
- Confirm order and receive tracking information upon dispatch.
Why Choose Konmask.com?
- Specialist Focus: We exclusively source and supply industrial automation and semiconductor equipment spare parts — no generalist catalog dilution.
- Global Sourcing Network: Access to OEM surplus, refurbished, and tested-used inventory from verified suppliers worldwide.
- Fast Response: RFQ responses within 24 hours; urgent inquiries handled same business day.
- Technical Support: Our team includes engineers with hands-on experience in Lam Research tool maintenance.
- Secure Shipping: ESD-safe, export-compliant packaging with full documentation for customs clearance.
Frequently Asked Questions
- Q: Is this board new, refurbished, or used?
- A: We stock multiple condition grades. Please specify your requirement (new OEM surplus, tested refurbished, or as-removed) in your inquiry and we will confirm availability and pricing accordingly.
- Q: Can this board be used as a direct replacement without recalibration?
- A: In most cases, yes — it is a drop-in replacement. However, some tool configurations may require a software parameter reload. Our technical team can advise based on your tool revision.
- Q: Do you ship internationally?
- A: Yes. We ship worldwide via DHL, FedEx, and UPS with full export documentation. Lead times vary by destination; please inquire for your specific country.
- Q: What is the warranty policy?
- A: We offer a 90-day DOA warranty. If the board fails on arrival or within the warranty period due to a manufacturing defect, we will replace or refund — contact us within 5 business days of receipt.
- Q: Can you cross-reference other LAM RESEARCH part numbers?
- A: Yes. Our team maintains an extensive cross-reference database for Lam Research assemblies. Send us any related PN and we will confirm equivalency.
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