Applied Materials 0020-48185 / 0040-05133 Shield Lower — PROFORT 802 (PF802-ADSK) Process Chamber Component
Engineering Background
The Shield Lower (P/N 0020-48185 / 0040-05133) is a precision-machined chamber shielding component designed for Applied Materials’ PROFORT 802 (PF802-ADSK) physical vapor deposition (PVD) and etch platform. It forms a critical part of the process chamber’s contamination-control architecture, protecting chamber walls from deposition by-products and maintaining process repeatability across wafer runs.
Product Positioning
Sourced for fab engineers and procurement teams requiring OEM-grade replacement shields with verified dimensional conformance. This component is essential for scheduled preventive maintenance (PM) cycles and unplanned chamber recovery events on PROFORT 802 tools operating in high-volume semiconductor manufacturing environments.
Complete Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number (Primary): 0020-48185
- Part Number (Secondary / Cross-ref): 0040-05133
- Description: Shield Lower
- Compatible Platform: PROFORT 802 / PF802-ADSK
- Component Category: Process Chamber Shielding
- Material: High-purity aluminum alloy (anodized / coated per OEM spec)
- Weight: 2,600 g (2.6 kg)
- Country of Origin: USA (OEM) / Verified supply chain
- Condition: New / Refurbished-to-spec (specify at inquiry)
- Compliance: RoHS-compatible; suitable for Class 1–10 cleanroom handling
Proven Application Environments
- Applied Materials PROFORT 802 PVD / Etch chambers (PF802-ADSK configuration)
- High-volume semiconductor wafer fabs (200 mm / 300 mm process nodes)
- Scheduled PM shield replacement cycles (typically every 50–150 RF hours depending on process)
- Emergency chamber recovery following arcing events or particle excursions
- Refurbishment programs requiring OEM-dimensional baseline components
Engineering Advantages
- OEM-matched geometry: Maintains critical gap tolerances between shield and chamber body, preserving plasma uniformity and etch/deposition rate stability.
- Contamination control: Reduces metallic particle generation by providing a clean, conforming deposition surface that is easily replaced during PM.
- Dual P/N traceability: Cross-referenced under both 0020-48185 and 0040-05133 for seamless integration with AMAT BOM and ERP systems.
- Rapid PM turnaround: Drop-in replacement design minimizes chamber downtime — critical for maximizing tool availability (uptime) in high-throughput fabs.
- Verified supply chain: Konmask sources from authorized distributors and certified refurbishers with full documentation packages available on request.
System Architecture & Signal Flow
Within the PROFORT 802 chamber assembly, the Shield Lower is positioned concentrically below the process ring and above the chamber base, forming the lower boundary of the active plasma zone. During deposition or etch cycles, it intercepts stray flux and by-product species, preventing chamber body contamination. The shield interfaces mechanically with the Shield Upper (not included) and the chamber liner to create a complete shielding stack. Proper seating and torque specification per AMAT PM documentation is required during installation.
Sourcing & Quality Verification
- All units inspected for dimensional conformance, surface integrity, and absence of prior arc damage before shipment.
- Serialized documentation (CoC / CoO) available upon request for regulated fab environments.
- Packaging: ESD-safe, double-bagged, foam-cushioned for international air freight.
- Lead time: In-stock units ship within 1–3 business days; sourced units 5–15 business days.
Procurement Process
- Submit RFQ via Konmask.com or email [email protected].
- Receive formal quotation with lead time, condition report, and documentation list within 24 hours.
- Confirm PO — accepted formats: wire transfer (T/T), PayPal, credit terms for qualified accounts.
- Shipment with tracking number and packing list provided same day or next business day.
- Post-delivery technical support available for installation queries.
Technical FAQ
Q: Is 0020-48185 the same part as 0040-05133?
A: Yes — these are dual Applied Materials part numbers referencing the same Shield Lower assembly. 0020-48185 is the primary fabrication P/N; 0040-05133 is the service/replacement cross-reference. Both are interchangeable for procurement purposes.
Q: What is the recommended replacement interval?
A: Applied Materials recommends shield inspection every PM cycle (typically 50–150 RF hours). Replacement is triggered by thickness loss exceeding OEM spec, visible cracking, or particle count excursion above process control limits.
Q: Can this shield be used on non-PROFORT 802 chambers?
A: This part is dimensionally specified for the PF802-ADSK chamber configuration. Cross-compatibility with other AMAT platforms (e.g., Endura, Centura) must be verified against OEM drawings before installation.
Q: Do you offer refurbished units?
A: Yes. Refurbished units are stripped, bead-blasted or chemically cleaned, dimensionally inspected, and re-coated to OEM specification. Full refurbishment report available. Please specify condition preference in your RFQ.
Q: What documentation is included?
A: Standard shipment includes packing list and basic CoC. Full documentation packages (CoO, inspection report, material cert) available for regulated environments — request at time of order.
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