TOKYO ELECTRON 1D10-203699-11 Ring | Replacement, Equivalent & Selection Guide
The TOKYO ELECTRON 1D10-203699-11 (cross-reference: 119151-01) is a precision-engineered Ring component designed for the PW3-32/900 series semiconductor processing equipment. This part plays a critical role in plasma confinement, wafer edge protection, and process uniformity within TEL etch and deposition chambers. Konmask.com supplies this component with full traceability for MRO, spare-parts, and production-line replenishment programs.
Technical Specifications
- Manufacturer: TOKYO ELECTRON (TEL)
- Part Number: 1D10-203699-11
- Cross-Reference / Alternate P/N: 119151-01
- Series / Platform: PW3-32/900
- Component Type: Ring (Focus Ring / Edge Ring / Confinement Ring)
- Application: Semiconductor etch & CVD chamber consumable
- Material: High-purity quartz / silicon / ceramic (confirm with datasheet)
- Compatibility: TEL PW3-32/900 process chamber
- Condition: New / Refurbished (specify on inquiry)
- Weight: 1,450 g (approx.)
Compatible Replacement & Equivalent Models
Engineers sourcing a replacement for 1D10-203699-11 should verify dimensional and material compatibility before substitution. Known cross-references and functionally equivalent parts include:
- 119151-01 — TEL internal alternate part number (same assembly)
- OEM-equivalent rings for TEL PW3-32/900 chamber platforms
- Third-party aftermarket rings manufactured to TEL OEM dimensional specifications
- Refurbished / reconditioned 1D10-203699-11 units (cleaned, inspected, re-certified)
Always confirm inner diameter, outer diameter, thickness, and material grade before installing a replacement ring in a production chamber.
Why Choose the Original Model
- OEM Dimensional Accuracy: Manufactured to TEL’s exact tolerances — no fitment risk.
- Process Repeatability: Maintains plasma uniformity and edge-exclusion zone consistency across wafer lots.
- Material Certification: High-purity substrate minimizes metallic contamination and particle generation.
- Validated Lifecycle: TEL-qualified RF hours / etch cycles for predictable PM scheduling.
- Warranty & Traceability: Full lot traceability and certificate of conformance available on request.
Typical Applications
- Plasma etch chambers (dielectric, metal, poly-silicon etch)
- Chemical Vapor Deposition (CVD / PECVD) process modules
- Wafer edge protection and plasma confinement in 200 mm / 300 mm fabs
- Preventive maintenance (PM) kits for TEL PW3-32/900 platforms
- Semiconductor R&D and pilot-line equipment refurbishment
System Compatibility
- Primary Platform: TOKYO ELECTRON PW3-32/900 process chamber
- Wafer Size: Confirm with TEL chamber configuration (200 mm / 300 mm)
- Chamber Type: Etch / Deposition module (verify with TEL BOM)
- Integration: Drop-in replacement — no hardware modification required when using OEM P/N
Selection Guide
Use the following criteria to select the correct ring for your TEL PW3-32/900 system:
- Step 1 — Confirm Platform: Verify your chamber model is PW3-32/900 series.
- Step 2 — Check P/N on Existing Part: Look for 1D10-203699-11 or 119151-01 stamped/labeled on the installed ring.
- Step 3 — Measure Key Dimensions: Record OD, ID, and thickness; compare against TEL spare-parts datasheet.
- Step 4 — Specify Material: Quartz, silicon, or ceramic — match to your process chemistry (fluorine-based, chlorine-based, etc.).
- Step 5 — Choose Condition: New OEM for critical layers; certified refurbished for non-critical or R&D applications.
- Step 6 — Request CoC: Always request a Certificate of Conformance for production-line use.
Quality Assurance & Sourcing
- All parts sourced through authorized distributors or verified secondary-market channels.
- 100% visual and dimensional inspection prior to shipment.
- Certificate of Conformance (CoC) and lot traceability documentation available.
- Secure anti-static packaging with desiccant for contamination-sensitive components.
- Export compliance screening performed on all international orders.
How to Order
- Online: Add to cart directly on this page — stock availability confirmed at checkout.
- RFQ: Email [email protected] with quantity, required condition (new/refurbished), and delivery timeline.
- Phone / WhatsApp: +0086 19859288691 for urgent or large-volume inquiries.
- Lead Time: In-stock items ship within 1–3 business days; sourced items 5–15 business days.
- MOQ: 1 piece — no minimum order quantity.
Replacement & Compatibility FAQ
Q: Is 119151-01 the same as 1D10-203699-11?
A: Yes — 119151-01 is a TEL internal cross-reference for the same physical component. Both part numbers refer to the identical ring assembly for the PW3-32/900 platform.
Q: Can I use a third-party aftermarket ring as a replacement?
A: Aftermarket rings can be used in non-critical or R&D applications if dimensional and material specs match. For production-critical layers, OEM parts are strongly recommended to maintain process repeatability and yield.
Q: How often should this ring be replaced?
A: Replacement frequency depends on process chemistry, RF power, and etch rate. Follow TEL’s PM schedule (typically measured in RF hours or wafer passes) and inspect for erosion, cracking, or particle generation.
Q: Do you provide a Certificate of Conformance?
A: Yes — CoC is available for all new OEM parts. Contact us before ordering if documentation is required for your quality system.
Q: Can you source refurbished or reconditioned units?
A: Yes — refurbished 1D10-203699-11 rings are available subject to stock. All refurbished units undergo cleaning, dimensional inspection, and re-certification before shipment.
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