MKS 253B-15488 Throttle Control Valve | Replacement, Equivalent & Selection Guide
The MKS 253B-15488 (cross-reference: 0050-61196 / 0050-61197) is a precision Throttle Control Valve manufactured by MKS Instruments. Designed for high-vacuum process environments, it is widely deployed in semiconductor CVD/PVD chambers, thin-film deposition systems, and industrial vacuum process lines. Konmask.com supplies genuine and compatible-grade units with full traceability.
Technical Specifications
- Manufacturer: MKS Instruments
- Part Number: 253B-15488
- Cross-Reference / Alternate P/N: 0050-61196 | 0050-61197
- Type: Throttle Control Valve (Butterfly-type, motorized)
- Series: MKS 253B Series
- Valve Function: Pressure / flow throttling in vacuum process chambers
- Actuation: Electric motor-driven with position feedback
- Weight: 360 g (approx.)
- Compatibility: Integrates with MKS 651 / 252 / 250 Series pressure controllers
- Typical Operating Pressure: High-vacuum to rough-vacuum range
- Body Material: Anodized aluminum / stainless steel wetted surfaces
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the MKS 253B-15488. Always verify flange size, actuator interface, and controller compatibility before substitution.
- MKS 253A-15488 — Prior-generation 253A series; same flange, verify actuator wiring
- MKS 253B-15488-1 — Variant suffix; confirm O-ring material and port size
- VAT 64032-GE02 — Third-party equivalent butterfly throttle valve; requires adapter
- IRIE KOKEN BXD Series — Japanese-market equivalent; verify controller signal compatibility
- Applied Materials 0050-61196 / 0050-61197 — OEM cross-reference used in AMAT platforms
Note: Cross-reference data is provided for selection guidance only. Konmask.com recommends engineering verification before installation.
Why Choose the Original MKS 253B-15488
- ✅ Proven reliability in high-uptime semiconductor fabs worldwide
- ✅ Precise pressure control with closed-loop position feedback
- ✅ Direct drop-in for AMAT, Lam Research, and Novellus platforms using P/N 0050-61196 / 0050-61197
- ✅ Full MKS ecosystem compatibility — pairs natively with MKS 651C/252A controllers
- ✅ Traceable sourcing — Konmask.com provides documentation upon request
Typical Applications
- CVD / PECVD / ALD semiconductor process chambers
- PVD sputtering systems
- Dry etch vacuum process lines
- Industrial thin-film coating equipment
- R&D vacuum systems requiring precise conductance control
System Compatibility
- Controllers: MKS 651C, MKS 252A, MKS 250
- OEM Platforms: Applied Materials (AMAT) — cross P/N 0050-61196 / 0050-61197; Lam Research; Novellus
- Signal Interface: Analog position command (0–10 V or 4–20 mA, model-dependent)
- Flange Standard: ISO-KF / NW flange (verify exact size per installation drawing)
Selection Guide
Use the checklist below to confirm the correct valve for your application:
- ☐ Flange size & standard — match to your chamber port (NW25 / NW40 / NW50)
- ☐ Controller model — confirm signal type (analog vs. digital) matches your MKS controller
- ☐ OEM P/N — if replacing an AMAT unit, confirm 0050-61196 or 0050-61197 matches your BOM
- ☐ O-ring material — Viton (standard) vs. Kalrez (corrosive process gases)
- ☐ Actuation voltage — 24 VDC (standard); verify against your power supply
- ☐ Lead time requirement — contact Konmask.com for stock availability and expedite options
Quality Assurance & Sourcing
- Units sourced from authorized distributors and certified secondary-market channels
- Each unit inspected for physical integrity prior to shipment
- Traceability documentation (CoC / test records) available upon request
- Export compliance screening applied to all international orders
- Secure anti-static packaging for electro-mechanical components
How to Order
- Confirm your required P/N: 253B-15488, 0050-61196, or 0050-61197
- Add to cart or contact us for volume pricing and lead-time confirmation
- Provide your shipping destination for freight quote (DHL / FedEx / UPS international available)
- Payment: T/T bank transfer, PayPal, or credit card via Shopify Payments
- Dispatch: typically within 1–3 business days for in-stock units
📧 Email: [email protected] | 📞 WhatsApp / Tel: +0086 19859288691
Replacement & Compatibility FAQ
Q: Is the MKS 253B-15488 the same as AMAT P/N 0050-61196?
A: Yes. 0050-61196 and 0050-61197 are Applied Materials OEM cross-references for the MKS 253B-15488 throttle valve used in their CVD platforms.
Q: Can I use a 253A series valve as a replacement?
A: The 253A and 253B share similar form factors, but actuator wiring and controller firmware compatibility should be verified before substitution.
Q: Do you supply refurbished units?
A: Konmask.com supplies both new and certified-refurbished units. Please specify your preference when ordering.
Q: What is the lead time?
A: In-stock units ship within 1–3 business days. Contact us for current stock status.
Q: Can you provide a Certificate of Conformance?
A: Yes, CoC documentation is available upon request for all orders.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
