MKS 852B12PCJ2GC – High-Accuracy Capacitance Manometer Pressure Transducer | 852B Series Platform
Engineering Background
The MKS 852B Series represents MKS Instruments’ commitment to precision pressure measurement in demanding process environments. Engineered for semiconductor fabrication, thin-film deposition, and industrial vacuum systems, the 852B platform combines temperature-compensated capacitance manometer technology with robust signal conditioning electronics to deliver repeatable, drift-free measurements across wide operating ranges.
Product Positioning
The MKS 852B12PCJ2GC with configuration E3S-LS5C4S 2B FTP B/T SC3000-030 is a fully specified, application-ready pressure transducer targeting procurement engineers who require a drop-in replacement or new-build solution for critical process control loops. This unit ships factory-calibrated and is verified against MKS quality standards, making it suitable for direct integration into existing 852B-compatible infrastructure.
Complete Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | MKS Instruments, Inc. |
| Model / Part Number | 852B12PCJ2GC |
| Full Configuration Code | E3S-LS5C4S 2B FTP B/T SC3000-030 |
| Series / Platform | 852B Capacitance Manometer Series |
| Measurement Technology | Temperature-Compensated Capacitance Manometer |
| Full Scale Range | SC3000-030 (30 Torr full scale, per SC3000 range code) |
| Output Signal | Analog voltage (configuration-dependent; 0–10 VDC typical) |
| Connector Type | PCJ2GC – per MKS connector coding |
| Process Connection | FTP (Face-Seal / VCR-compatible fitting) |
| Sensor Diaphragm | Inconel / Hastelloy (corrosion-resistant alloy, per E3S designation) |
| Temperature Compensation | Active, integrated electronics (LS5C4S sub-assembly) |
| Accuracy | ≤ 0.25% of full scale (typical, per 852B series datasheet) |
| Repeatability | ≤ 0.1% of full scale |
| Operating Temperature | 15°C to 40°C (electronics); sensor head per process spec |
| Supply Voltage | ±15 VDC (typical MKS 852B supply requirement) |
| Weight | 360 g (nominal) |
| Country of Origin | United States |
| Compliance | CE, RoHS (verify current certificate with MKS) |
Proven Application Environments
- Semiconductor Fabrication – CVD, PVD, ALD, and etch chamber pressure control loops requiring sub-Torr precision
- Flat Panel Display Manufacturing – Large-area deposition systems with tight process pressure windows
- Pharmaceutical & Biotech – Lyophilization (freeze-drying) chamber monitoring and validation
- Research & Metrology – Ultra-high vacuum (UHV) research systems and calibration benches
- Industrial Process Control – Chemical vapor systems, gas handling manifolds, and leak-test rigs
- OEM Integration – Drop-in replacement for existing 852B-series installations in multi-vendor tool sets
Engineering Advantages
- Drift-Free Measurement – Capacitance manometer technology eliminates zero-point drift common in piezoresistive sensors
- Corrosion-Resistant Wetted Parts – E3S diaphragm material withstands aggressive process chemistries (halogens, acids)
- Active Temperature Compensation – LS5C4S electronics sub-assembly maintains accuracy across ambient temperature swings
- VCR-Compatible Face-Seal Fitting (FTP) – Leak-tight metal-to-metal seal; no elastomers in the process wetted path
- Factory Calibration Traceability – Each unit calibrated against NIST-traceable standards at MKS manufacturing facility
- Direct 852B Ecosystem Compatibility – Plug-compatible with MKS Type 252, 253, 600 series flow/pressure controllers and PDR900 readouts
System Architecture & Signal Flow
The 852B12PCJ2GC operates on a three-stage signal chain:
- Sensing Stage – The capacitance diaphragm deflects proportionally to differential pressure. The E3S Inconel diaphragm provides chemical inertness while maintaining mechanical sensitivity in the 0–30 Torr range.
- Conditioning Stage – The LS5C4S electronics module performs capacitance-to-voltage conversion, active temperature compensation, and span/zero calibration. Output is a linearized analog voltage signal.
- Interface Stage – The PCJ2GC connector delivers the conditioned signal and accepts ±15 VDC supply. The FTP process fitting provides the vacuum-tight mechanical interface to the process chamber or manifold.
This architecture ensures that the signal presented at the output connector is a true, compensated representation of process pressure — ready for direct input to a PLC analog input card, MKS controller, or data acquisition system.
Sourcing & Quality Verification
- Authentic MKS Instruments Origin – Units sourced through verified MKS authorized distribution and surplus channels; not gray-market or counterfeit
- Pre-Shipment Functional Test – Each unit undergoes electrical continuity, output signal, and zero/span verification before dispatch
- Condition Disclosure – New, refurbished, or tested-surplus condition clearly stated on invoice and packing slip
- Documentation Package – Calibration certificate, datasheet, and test report available upon request
- Konmask Quality Assurance – All units inspected at our facility in accordance with ISO 9001-aligned incoming inspection procedures
Procurement Process
- Submit RFQ – Contact support@konmask.com with your required quantity, delivery timeline, and any documentation requirements
- Quotation & Lead Time Confirmation – We respond within 1 business day with pricing, availability, and estimated ship date
- Purchase Order – Issue PO to Konmask.com; we accept T/T wire transfer, PayPal, and major credit cards
- Inspection & Dispatch – Unit tested, packed in anti-static ESD packaging, and shipped via DHL / FedEx with tracking
- Post-Delivery Support – Technical support available for integration questions; 30-day return window for DOA units
Technical FAQ
Q: Is the 852B12PCJ2GC compatible with my existing MKS PDR900 readout?
A: Yes. The 852B series uses the standard MKS analog output protocol compatible with PDR900, PR4000, and 670 signal conditioners.
Q: What is the full-scale pressure range of the SC3000-030 configuration?
A: The SC3000-030 range code designates a 30 Torr full-scale range. Confirm with the unit’s calibration certificate for exact span.
Q: Can this transducer be used with corrosive gases such as Cl₂ or HF?
A: The E3S diaphragm designation indicates an Inconel/Hastelloy wetted surface, which provides good resistance to halogen-based chemistries. Consult MKS chemical compatibility data for your specific process gas mixture.
Q: What supply voltage does the unit require?
A: Standard MKS 852B units require ±15 VDC. Verify with the unit’s label or datasheet for this specific configuration.
Q: Do you provide a calibration certificate?
A: Yes. A calibration certificate is available upon request. Please specify your requirement at the time of order.
Q: What is the lead time for this part?
A: Typically 1–5 business days for in-stock units. Contact us for current availability.
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