Vacuum Process Isolation Solution – MKS NW50 161-0050K | SGDS Series
Where This Product Is Used
The MKS NW50 161-0050K (U2M-84) 1D10-203616-12 SGDS-02A32A pneumatic vacuum gate valve is engineered for demanding process isolation applications across high-technology industries:
- Semiconductor Fabrication – CVD, PVD, etch, and diffusion chambers requiring reliable vacuum isolation between process steps
- Flat Panel Display (FPD) Manufacturing – Inline vacuum transfer and load-lock isolation in large-area deposition systems
- Solar Cell Production – PECVD and sputtering tool chamber isolation for thin-film photovoltaic lines
- Research & Analytical Instruments – Mass spectrometers, electron microscopes (SEM/TEM), and surface analysis systems requiring NW50 flange compatibility
- Industrial Vacuum Coating – Optical coating, hard-coating, and decorative PVD systems with automated valve sequencing
- Vacuum Furnaces & Heat Treatment – Isolation of pumping lines in high-temperature vacuum furnace systems
Technical Specifications
| Part Number | 161-0050K |
| Actuator Model | SGDS-02A32A |
| Internal Reference | U2M-84 / 1D10-203616-12 |
| Flange Size | NW50 (DN50 KF) |
| Valve Type | Pneumatic Gate Valve (Normally Closed) |
| Actuation | Pneumatic (Air-operated) |
| Seal Material | Viton® O-ring (standard) |
| Body Material | Aluminum Alloy (hard-anodized) |
| Operating Pressure Range | Atmosphere to 1×10⁻⁷ Torr (high vacuum) |
| Leak Rate | < 1×10⁻⁹ mbar·L/s (He) |
| Pneumatic Supply | 4–6 bar (58–87 psi) clean dry air |
| Weight | 360 g |
| Manufacturer | MKS Instruments |
| Series | SGDS / NW50 |
Why Engineers Specify This Model
- NW50 KF Flange Standard – Direct drop-in compatibility with ISO KF (QF) NW50 vacuum components; no adapter required
- Ultra-Low Leak Rate – Viton O-ring gate seal delivers <1×10⁻⁹ mbar·L/s helium leak rate, maintaining process chamber integrity
- Fast Cycle Response – Pneumatic SGDS actuator provides rapid open/close actuation for high-throughput automated process sequences
- Compact & Lightweight – 360 g body minimizes load on vacuum manifolds and supports space-constrained tool designs
- MKS OEM Pedigree – Sourced from MKS Instruments, a globally recognized leader in vacuum and process control instrumentation
- Normally Closed Fail-Safe – Valve closes on loss of pneumatic supply, protecting process chambers during power or air failures
Complete System Bill of Materials
For a complete NW50 vacuum isolation assembly, engineers typically specify:
- MKS NW50 161-0050K SGDS-02A32A Gate Valve (this unit)
- NW50 KF Centering Ring with Viton O-ring
- NW50 KF Clamp (aluminum or stainless)
- Solenoid Valve (5/2-way, 24VDC) for pneumatic actuation control
- Clean Dry Air (CDA) supply line, 4–6 bar
- Vacuum Gauge (Pirani or Capacitance Manometer) for process monitoring
- Turbomolecular or Rotary Vane Pump for system evacuation
Compliance & Industry Standards
- ISO 1609 – KF (QF) flange dimensional standard for NW50 connections
- SEMI S2 – Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- RoHS Compliant – Restriction of Hazardous Substances directive compliance
- CE Marking – Conformity with applicable EU Machinery and Pressure Equipment Directives
- MKS Internal QC Standards – 100% helium leak-tested at factory prior to shipment
Quality Assurance & Sourcing
At Konmask.com, every MKS valve unit undergoes a multi-point verification process before dispatch:
- ✅ Part number cross-check against MKS Instruments official catalog (161-0050K / SGDS-02A32A)
- ✅ Physical inspection of flange sealing surfaces, actuator body, and O-ring condition
- ✅ Pneumatic actuation function test (open/close cycle verification)
- ✅ Secure anti-static packaging with desiccant for long-term storage integrity
- ✅ Traceable documentation available upon request (test reports, CoC)
We source directly from authorized MKS distributors and verified OEM surplus channels to ensure authenticity and reliability.
How to Source This Part
Ready to order the MKS NW50 161-0050K SGDS-02A32A? Here’s how to proceed:
- Add to Cart – Click the purchase button above for immediate checkout
- Request a Quote – For volume orders (>5 units) or OEM procurement, email support@konmask.com for preferential pricing
- Confirm Compatibility – Share your system drawing or BOM and our engineers will verify fit before shipment
- Lead Time – In-stock units ship within 1–3 business days; ETA confirmation provided at order
- Export & Customs – We handle international shipping documentation (HS Code: 8481.20) for seamless cross-border delivery
Application-Specific FAQ
Q: Is the NW50 161-0050K compatible with ISO KF NW50 fittings from other brands?
A: Yes. The NW50 KF flange is an ISO-standardized interface (ISO 1609). This valve mates directly with any compliant NW50 centering ring and clamp regardless of brand.
Q: What pneumatic supply pressure is required for the SGDS-02A32A actuator?
A: The SGDS actuator requires 4–6 bar (58–87 psi) of clean dry air (CDA). Avoid using nitrogen or other gases unless confirmed compatible with your facility’s safety protocols.
Q: Can this valve be used in corrosive gas environments?
A: The standard Viton O-ring seal is compatible with many process gases. For aggressive chemistries (e.g., HF, Cl₂), please contact us to discuss FFKM (Kalrez®) seal upgrade options.
Q: What is the maximum operating temperature?
A: The standard configuration is rated for ambient to 80°C (176°F) continuous operation. Bakeout compatibility (up to 150°C) depends on actuator configuration — consult MKS datasheet for bakeout-rated variants.
Q: Do you provide a warranty or return policy?
A: Yes. All units carry a 90-day functional warranty against manufacturing defects. Contact support@konmask.com within the warranty period for RMA processing.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
