MKS MC20A-30190 Mass Flow Controller | Replacement, Equivalent & Selection Guide
The MKS MC20A-30190 is a precision thermal mass flow controller (MFC) manufactured by MKS Instruments, designed for accurate gas flow measurement and control in semiconductor fabrication, thin-film deposition, and industrial process systems. Konmask.com supplies genuine and compatible MKS MFC units with full traceability and quality verification.
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number / SKU | MC20A-30190 |
| Manufacturer | MKS Instruments |
| Series | MC20A |
| Device Type | Thermal Mass Flow Controller (MFC) |
| Full Scale Range | 30 SCCM (model-dependent; verify with datasheet) |
| Gas Compatibility | N₂ equivalent; consult MKS for reactive/corrosive gases |
| Control Signal | 0–5 VDC / 4–20 mA (standard) |
| Accuracy | ±1% F.S. |
| Repeatability | ±0.2% F.S. |
| Response Time | <2 seconds to 98% F.S. |
| Inlet/Outlet Fittings | 1/4″ VCR (verify per unit) |
| Operating Pressure | Up to 100 psig inlet |
| Weight | 2,160 g |
| Communication | Analog (RS-232 optional) |
Specifications are reference values. Always verify against the original MKS datasheet or contact Konmask for unit-specific confirmation.
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the MKS MC20A-30190. Compatibility depends on gas type, flow range, fitting, and control signal — always verify before substitution:
- MKS 1179A — General-purpose MFC, same analog interface, widely available
- MKS 1259B — High-accuracy replacement for corrosive gas applications
- MKS 247D — Multi-channel readout/control unit compatible with MC20A series sensors
- Brooks Instrument SLA5850 — Cross-brand equivalent for N₂-calibrated flow ranges
- Alicat MC Series — Drop-in analog replacement with extended gas library
- Horiba SEC-Z500X — Semiconductor-grade equivalent for CVD/ALD processes
Contact [email protected] for a verified compatibility assessment before ordering a replacement.
Why Choose the Original MKS MC20A-30190
- OEM Precision: Factory-calibrated to MKS Instruments’ traceable NIST standards
- Process Stability: Proven in high-uptime semiconductor and R&D environments
- Direct Drop-In: No re-wiring or software changes required for same-series swap
- Long Service Life: Robust thermal sensor design with minimal drift over time
- Full Traceability: Serial number, calibration certificate, and factory test data available
Typical Applications
- CVD / PECVD / ALD thin-film deposition systems
- Semiconductor etch and clean process chambers
- Gas blending and mixing panels
- R&D laboratory gas flow control
- Industrial process automation requiring precise MFC control
- Flat panel display (FPD) manufacturing equipment
System Compatibility
The MKS MC20A-30190 is compatible with the following systems and platforms:
- MKS 247, 651, 1000, and PR4000 series controllers and readout units
- Applied Materials (AMAT) CVD and etch platforms
- Lam Research process chambers using standard MKS MFC interfaces
- Tokyo Electron (TEL) equipment with analog MFC inputs
- Custom gas panels using 0–5 VDC or 4–20 mA control loops
Selection Guide
Use the following criteria to confirm the MC20A-30190 is the right MFC for your application, or to select a compatible alternative:
- Flow Range: Confirm full-scale SCCM matches your process requirement (±10% acceptable for most applications)
- Gas Type: Verify calibration gas; conversion factors apply for non-N₂ gases
- Fitting Size & Type: Match inlet/outlet fittings (VCR, Swagelok, NPT) to your manifold
- Control Signal: Confirm 0–5 VDC or 4–20 mA compatibility with your controller
- Pressure Rating: Ensure inlet pressure does not exceed rated maximum
- Certifications: Check CE, SEMI S2, or other required compliance marks
Not sure which model fits? Send your system specs to [email protected] and our engineers will recommend the right unit.
Quality Assurance & Sourcing
- All MKS MFC units sourced through authorized or verified supply channels
- Pre-shipment functional and leak testing available on request
- Calibration certificates and factory test reports provided where available
- Refurbished units clearly labeled; new OEM stock available
- Secure packaging with ESD protection and anti-vibration foam
How to Order
- Add the MKS MC20A-30190 to your cart, or contact us for bulk/project pricing
- Provide your application details (gas type, flow range, system) for compatibility confirmation
- Receive a formal quotation with lead time and shipping options within 24 hours
- Payment via T/T, PayPal, or credit card; export documentation available
📧 [email protected] | 📞 +0086 19859288691
Replacement & Compatibility FAQ
Q: Can I replace the MC20A-30190 with an MKS 1179A?
A: In many cases yes — both use analog control signals and similar fittings. Verify flow range and gas calibration before swapping.
Q: Is the MC20A-30190 compatible with AMAT Centura systems?
A: Yes, the MC20A series is widely used in AMAT platforms. Confirm the specific slot/channel requirements with your OEM documentation.
Q: Do you supply calibration certificates?
A: Yes. Factory calibration data is available for new units. Recalibration service can be arranged for refurbished stock.
Q: What is the lead time?
A: In-stock units ship within 1–3 business days. Out-of-stock items typically have a 2–6 week lead time. Contact us for current availability.
Q: Can you supply a cross-brand equivalent if the original is unavailable?
A: Yes. We can recommend and supply verified equivalents from Brooks, Alicat, Horiba, and other manufacturers.
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Contact: [email protected] | +0086 19859288691
